JPH0325556U - - Google Patents
Info
- Publication number
- JPH0325556U JPH0325556U JP8600289U JP8600289U JPH0325556U JP H0325556 U JPH0325556 U JP H0325556U JP 8600289 U JP8600289 U JP 8600289U JP 8600289 U JP8600289 U JP 8600289U JP H0325556 U JPH0325556 U JP H0325556U
- Authority
- JP
- Japan
- Prior art keywords
- laser light
- vacuum evaporation
- tunable laser
- wavelength tunable
- evaporation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例の波長可変レーザ
光源を取付けた真空蒸着装置の要部断面図である
。第２図は従来の真空蒸着装置の要部断面図であ
る。 １……蒸着材、２……電子ビーム、３……金属
原子、４……ウエハ、５，６……波長可変レーザ
光源、７……高励起金属原子。
光源を取付けた真空蒸着装置の要部断面図である
。第２図は従来の真空蒸着装置の要部断面図であ
る。 １……蒸着材、２……電子ビーム、３……金属
原子、４……ウエハ、５，６……波長可変レーザ
光源、７……高励起金属原子。
Claims (1)
- 真空蒸着装置において、蒸着材から飛び出す金
属原子に波長可変レーザ光を照射する波長可変レ
ーザ光源を取付けたことを特徴とする真空蒸着装
置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8600289U JPH0325556U (ja) | 1989-07-21 | 1989-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8600289U JPH0325556U (ja) | 1989-07-21 | 1989-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325556U true JPH0325556U (ja) | 1991-03-15 |
Family
ID=31635410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8600289U Pending JPH0325556U (ja) | 1989-07-21 | 1989-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325556U (ja) |
-
1989
- 1989-07-21 JP JP8600289U patent/JPH0325556U/ja active Pending