JPH0334855B2 - - Google Patents

Info

Publication number
JPH0334855B2
JPH0334855B2 JP59240201A JP24020184A JPH0334855B2 JP H0334855 B2 JPH0334855 B2 JP H0334855B2 JP 59240201 A JP59240201 A JP 59240201A JP 24020184 A JP24020184 A JP 24020184A JP H0334855 B2 JPH0334855 B2 JP H0334855B2
Authority
JP
Japan
Prior art keywords
wiring
film
forming
insulating film
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59240201A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61119059A (ja
Inventor
Ryoichi Hazuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP24020184A priority Critical patent/JPS61119059A/ja
Publication of JPS61119059A publication Critical patent/JPS61119059A/ja
Publication of JPH0334855B2 publication Critical patent/JPH0334855B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP24020184A 1984-11-14 1984-11-14 半導体装置の製造方法 Granted JPS61119059A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24020184A JPS61119059A (ja) 1984-11-14 1984-11-14 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24020184A JPS61119059A (ja) 1984-11-14 1984-11-14 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61119059A JPS61119059A (ja) 1986-06-06
JPH0334855B2 true JPH0334855B2 (de) 1991-05-24

Family

ID=17055959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24020184A Granted JPS61119059A (ja) 1984-11-14 1984-11-14 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61119059A (de)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5998535A (ja) * 1982-11-29 1984-06-06 Hitachi Ltd 半導体集積回路の製造方法

Also Published As

Publication number Publication date
JPS61119059A (ja) 1986-06-06

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