JPH0341949U - - Google Patents
Info
- Publication number
- JPH0341949U JPH0341949U JP10281889U JP10281889U JPH0341949U JP H0341949 U JPH0341949 U JP H0341949U JP 10281889 U JP10281889 U JP 10281889U JP 10281889 U JP10281889 U JP 10281889U JP H0341949 U JPH0341949 U JP H0341949U
- Authority
- JP
- Japan
- Prior art keywords
- slopes
- silicon substrate
- implanted
- impurities
- conductivity type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Element Separation (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Description
第１図は一実施例の基板を示す断面図、第２図
は一実施例における１つの突条におけるＣＭＯＳ
を示す断面図、第３図は製造方法を示す工程断面
図である。 ２……シリコン基板、４，６……斜面、１０，
１２……Ｎ型不純物拡散領域、２０，２２……Ｐ
型不純物拡散領域。
は一実施例における１つの突条におけるＣＭＯＳ
を示す断面図、第３図は製造方法を示す工程断面
図である。 ２……シリコン基板、４，６……斜面、１０，
１２……Ｎ型不純物拡散領域、２０，２２……Ｐ
型不純物拡散領域。
Claims (1)
- シリコン基板表面がもとの表面に対して傾きを
もつ斜面で構成された凹凸表面となつており、同
じ方向の斜面には同じ導電型の不純物が注入され
て半導体素子が形成されている半導体集積回路装
置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10281889U JPH0341949U (ja) | 1989-08-31 | 1989-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10281889U JPH0341949U (ja) | 1989-08-31 | 1989-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0341949U true JPH0341949U (ja) | 1991-04-22 |
Family
ID=31651693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10281889U Pending JPH0341949U (ja) | 1989-08-31 | 1989-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341949U (ja) |
-
1989
- 1989-08-31 JP JP10281889U patent/JPH0341949U/ja active Pending