JPH0352247A - Semiconductor testing apparatus - Google Patents

Abstract

PURPOSE:To make it possible to judge a sample outside the distribution as a defective product by determining a standard based on deviation, and performing judgment. CONSTITUTION:Good products and defective products are judged based on a constant standard 9 with respect to the measured values of the tests of electric characteristics. Thereafter, a deviation is obtained from the measured values. A standard 12 is obtained from the deviation by computation. The good products and the defective products are judged again based on the standard from deviation 12. Therefore, when the distribution of the measured values of the samples with respect to the constant standard 9 is a distribution 10, the sample 11 which is located at a position outside the distribution 10 is judged as the defective product by the judgment with the standard 12. In this way, the sample which is located at the position outside the distribution and which has problems in comparison with the other samples is not judged as an acceptable product.

Description

[Detailed description of the invention]

[Field of Industrial Application] This invention relates to a semiconductor testing device for determining and sorting semiconductors into good and defective products.

[Summary of the Invention] The semiconductor testing device of the present invention determines whether a good product or a defective product is determined according to a certain standard based on the measured values of an electrical property test.
The deviation is calculated from the measured value, the standard is calculated from the deviation, and the standard from the deviation is used to again judge whether it is a good product or a defective product, so that samples located on the outskirts of the distribution are determined to be defective. It is. [Prior art 1] Fig. 2 is a flowchart of a method for determining whether a good product or a defective product is determined using a semiconductor testing device according to the prior art. Conventionally, as shown in Figure 2, for the measurement value obtained by measurement 1 and measurement value reading 2,
Judgment 3 was performed based on certain standards, and 7 were found to be good and 8 were defective. [Problem to be Solved by the Invention] The above configuration has the disadvantage that if it is within a certain standard range, even a sample with problems compared to other samples located on the outskirts of the distribution will be judged as good. Ta. [Means for Solving the Problems] In order to solve the above problems, the present invention determines the deviation from the measured values after determining whether the measured values are good or defective according to a certain standard based on the measured values of the electrical property test. , the standard ellipse was determined from the deviation, and the judgment of good and defective products was made again. [Effect] With the above configuration, samples located on the outskirts of the distribution can be determined to be defective. [Example J An example of the present invention will be described below based on the drawings. 1st
The figure is a flowchart of a method for determining good and defective products in the semiconductor testing device of the present invention. The measured values obtained by measurement 1 and measurement value reading 2 are subjected to judgment 3 according to a certain standard as in the past.If the judgment 3 according to the certain standard is out of the standard, it is judged as a defective product, and if it is within the standard. Deviation calculation 4
, perform the standard calculation 5 from the deviation, and perform the judgment again in the judgment 6 based on the standard from the deviation, the judgment 6 based on the standard from the deviation.
If it is outside the standard, it is determined to be defective product 8, and if it is within the standard, it is determined to be good product 7. FIG. 3 is a conceptual diagram of the method for determining good and defective products according to the present invention. If the distribution of measured values of samples is like distribution 10 for a certain standard 9, the sample 1l located on the outskirts of the distribution is within the range of the certain standard 9 even though it has problems compared to other samples. Therefore, the conventional method would result in a non-defective product. On the other hand, the standard l2 from the deviation
sample l1 located on the outskirts of the distribution.
is determined to be a defective product. [Effects of the Invention] As explained above, in this invention, by determining the standard based on the deviation and making the judgment, it is possible to judge a sample that is outside the distribution as a defective product.

[Brief explanation of drawings]

FIG. 1 is a flowchart of a method for determining non-defective products and defective products using the semiconductor testing device of the present invention, FIG. 2 is a flowchart of a method for determining non-defective products and defective products using a conventional semiconductor testing device, and FIG. , is a conceptual diagram of a defective product determination method. Measurement Measurement reading Judgment based on a certain standard Deviation calculation Standard calculation from the deviation 6 ・ 7 ・ 8 ・ 9 ・ 1 0 ・ 11 ・ 1 2 ・ Judgment based on the standard from the deviation ・ Good product / Defective product / Fixed standard / Sample distribution of measured values, samples located on the outskirts of the distribution, deviations from the standard range

Claims (1)

[Claims] A semiconductor testing device having an electrical property testing function, which is characterized by determining a deviation from a measured value, determining a standard from the deviation, and determining whether a product is good or defective.