JPH0359576B2 - - Google Patents
Info
- Publication number
- JPH0359576B2 JPH0359576B2 JP56151489A JP15148981A JPH0359576B2 JP H0359576 B2 JPH0359576 B2 JP H0359576B2 JP 56151489 A JP56151489 A JP 56151489A JP 15148981 A JP15148981 A JP 15148981A JP H0359576 B2 JPH0359576 B2 JP H0359576B2
- Authority
- JP
- Japan
- Prior art keywords
- gaalas
- compound semiconductor
- etching
- protective layer
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
- H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
- H10P50/246—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group III-V materials
Landscapes
- Drying Of Semiconductors (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56151489A JPS5853834A (ja) | 1981-09-25 | 1981-09-25 | 化合物半導体のエッチング方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56151489A JPS5853834A (ja) | 1981-09-25 | 1981-09-25 | 化合物半導体のエッチング方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5853834A JPS5853834A (ja) | 1983-03-30 |
| JPH0359576B2 true JPH0359576B2 (de) | 1991-09-11 |
Family
ID=15519609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56151489A Granted JPS5853834A (ja) | 1981-09-25 | 1981-09-25 | 化合物半導体のエッチング方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5853834A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61184892A (ja) * | 1985-02-12 | 1986-08-18 | Nec Corp | メサ型構造形成法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5240958B2 (de) * | 1972-06-26 | 1977-10-15 | ||
| JPS5235067B2 (de) * | 1973-06-04 | 1977-09-07 | ||
| JPS562633A (en) * | 1979-06-22 | 1981-01-12 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Etching method |
-
1981
- 1981-09-25 JP JP56151489A patent/JPS5853834A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5853834A (ja) | 1983-03-30 |
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