JPH036460U - - Google Patents
Info
- Publication number
- JPH036460U JPH036460U JP6741489U JP6741489U JPH036460U JP H036460 U JPH036460 U JP H036460U JP 6741489 U JP6741489 U JP 6741489U JP 6741489 U JP6741489 U JP 6741489U JP H036460 U JPH036460 U JP H036460U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- layers
- evaporation
- vacuum
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000009423 ventilation Methods 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 1
- 238000000427 thin-film deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は実施例に係る真空蒸着用るつぼの要部
断面説明図、第２図は第１図におけるふたの上面
図、第３図は真空蒸着装置の概念図である。 １……るつぼ本体、２……ふた、２ｃ……通気
孔。
断面説明図、第２図は第１図におけるふたの上面
図、第３図は真空蒸着装置の概念図である。 １……るつぼ本体、２……ふた、２ｃ……通気
孔。
Claims (1)
- 真空薄膜蒸着装置において、るつぼ本体１に冠
着するふた２は上下方向に複数の層を有するもの
であり、前記複数の層にそれぞれ位置を変えて通
気孔２ｃを設け、るつぼから蒸発する材料蒸気が
前記通気口２ｃを順次通過することによつて、る
つぼ外に出る蒸着材料の蒸気圧を下げるようにし
たことを特徴とする真空蒸着用るつぼ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6741489U JPH036460U (ja) | 1989-06-09 | 1989-06-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6741489U JPH036460U (ja) | 1989-06-09 | 1989-06-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH036460U true JPH036460U (ja) | 1991-01-22 |
Family
ID=31600965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6741489U Pending JPH036460U (ja) | 1989-06-09 | 1989-06-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH036460U (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60137896A (ja) * | 1983-12-23 | 1985-07-22 | Hitachi Ltd | 分子線源用ルツボ |
-
1989
- 1989-06-09 JP JP6741489U patent/JPH036460U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60137896A (ja) * | 1983-12-23 | 1985-07-22 | Hitachi Ltd | 分子線源用ルツボ |