JPH0437257U - - Google Patents
Info
- Publication number
- JPH0437257U JPH0437257U JP8005490U JP8005490U JPH0437257U JP H0437257 U JPH0437257 U JP H0437257U JP 8005490 U JP8005490 U JP 8005490U JP 8005490 U JP8005490 U JP 8005490U JP H0437257 U JPH0437257 U JP H0437257U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- mask material
- target
- evaporation target
- deposition apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の蒸着装置の概略図、第２図は
マスク材の一例を示す平面図、第３図は被蒸着物
に形成された蒸着膜の膜厚分布を示すグラフであ
る。 １０……蒸着装置、１３……被蒸着物、１４…
…蒸発源、１５……マスク材、１６……開口。
マスク材の一例を示す平面図、第３図は被蒸着物
に形成された蒸着膜の膜厚分布を示すグラフであ
る。 １０……蒸着装置、１３……被蒸着物、１４…
…蒸発源、１５……マスク材、１６……開口。
Claims (1)
- 蒸発源と被蒸着物との間に、多数の開口を有し
且つその開口率を被蒸着物の蒸着面の形状に応じ
て変化させたマスク材を配設し、被蒸着物上に形
成される蒸着膜の厚みを実質的に均一になるよう
にしたことを特徴とする蒸着装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8005490U JPH0437257U (ja) | 1990-07-26 | 1990-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8005490U JPH0437257U (ja) | 1990-07-26 | 1990-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0437257U true JPH0437257U (ja) | 1992-03-30 |
Family
ID=31624768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8005490U Pending JPH0437257U (ja) | 1990-07-26 | 1990-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437257U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0479954U (ja) * | 1990-11-21 | 1992-07-13 |
-
1990
- 1990-07-26 JP JP8005490U patent/JPH0437257U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0479954U (ja) * | 1990-11-21 | 1992-07-13 |