JPH0368066B2 - - Google Patents
Info
- Publication number
- JPH0368066B2 JPH0368066B2 JP29534590A JP29534590A JPH0368066B2 JP H0368066 B2 JPH0368066 B2 JP H0368066B2 JP 29534590 A JP29534590 A JP 29534590A JP 29534590 A JP29534590 A JP 29534590A JP H0368066 B2 JPH0368066 B2 JP H0368066B2
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- pattern
- weight
- general formula
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000203 mixture Substances 0.000 claims description 42
- 150000001875 compounds Chemical class 0.000 claims description 26
- 229920001721 polyimide Polymers 0.000 claims description 19
- 239000004642 Polyimide Substances 0.000 claims description 15
- -1 amine compound Chemical class 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 12
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 11
- 229910052753 mercury Inorganic materials 0.000 claims description 11
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 6
- 125000000962 organic group Chemical group 0.000 claims description 6
- 125000000217 alkyl group Chemical group 0.000 claims description 4
- 125000002947 alkylene group Chemical group 0.000 claims description 4
- 125000003118 aryl group Chemical group 0.000 claims description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 40
- 229920000642 polymer Polymers 0.000 description 39
- 229920005575 poly(amic acid) Polymers 0.000 description 32
- 239000000243 solution Substances 0.000 description 28
- 238000000576 coating method Methods 0.000 description 27
- 239000011248 coating agent Substances 0.000 description 26
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 22
- 230000035945 sensitivity Effects 0.000 description 18
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 12
- 239000011521 glass Substances 0.000 description 11
- 239000002904 solvent Substances 0.000 description 10
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 9
- 239000011148 porous material Substances 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 7
- WWJCRUKUIQRCGP-UHFFFAOYSA-N 3-(dimethylamino)propyl 2-methylprop-2-enoate Chemical compound CN(C)CCCOC(=O)C(C)=C WWJCRUKUIQRCGP-UHFFFAOYSA-N 0.000 description 6
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 150000001412 amines Chemical class 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000002798 polar solvent Substances 0.000 description 5
- JKNCOURZONDCGV-UHFFFAOYSA-N 2-(dimethylamino)ethyl 2-methylprop-2-enoate Chemical compound CN(C)CCOC(=O)C(C)=C JKNCOURZONDCGV-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 230000002411 adverse Effects 0.000 description 4
- 125000003277 amino group Chemical group 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000004132 cross linking Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 239000002966 varnish Substances 0.000 description 4
- CYSGHNMQYZDMIA-UHFFFAOYSA-N 1,3-Dimethyl-2-imidazolidinon Chemical compound CN1CCN(C)C1=O CYSGHNMQYZDMIA-UHFFFAOYSA-N 0.000 description 3
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 3
- 239000003504 photosensitizing agent Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- YLHUPYSUKYAIBW-UHFFFAOYSA-N 1-acetylpyrrolidin-2-one Chemical compound CC(=O)N1CCCC1=O YLHUPYSUKYAIBW-UHFFFAOYSA-N 0.000 description 2
- LVUQCTGSDJLWCE-UHFFFAOYSA-N 1-benzylpyrrolidin-2-one Chemical compound O=C1CCCN1CC1=CC=CC=C1 LVUQCTGSDJLWCE-UHFFFAOYSA-N 0.000 description 2
- QUVZIPHUYYZGMW-UHFFFAOYSA-N 2,6-bis[(4-azidophenyl)methylidene]-4-hydroxycyclohexan-1-one Chemical compound O=C1C(=CC=2C=CC(=CC=2)N=[N+]=[N-])CC(O)CC1=CC1=CC=C(N=[N+]=[N-])C=C1 QUVZIPHUYYZGMW-UHFFFAOYSA-N 0.000 description 2
- GPXCORHXFPYJEH-UHFFFAOYSA-N 3-[[3-aminopropyl(dimethyl)silyl]oxy-dimethylsilyl]propan-1-amine Chemical compound NCCC[Si](C)(C)O[Si](C)(C)CCCN GPXCORHXFPYJEH-UHFFFAOYSA-N 0.000 description 2
- OAKUJYMZERNLLT-UHFFFAOYSA-N 4-(dimethylamino)butyl 2-methylprop-2-enoate Chemical compound CN(C)CCCCOC(=O)C(C)=C OAKUJYMZERNLLT-UHFFFAOYSA-N 0.000 description 2
- VGVHNLRUAMRIEW-UHFFFAOYSA-N 4-methylcyclohexan-1-one Chemical compound CC1CCC(=O)CC1 VGVHNLRUAMRIEW-UHFFFAOYSA-N 0.000 description 2
- VVJKKWFAADXIJK-UHFFFAOYSA-N Allylamine Chemical compound NCC=C VVJKKWFAADXIJK-UHFFFAOYSA-N 0.000 description 2
- QISSLHPKTCLLDL-UHFFFAOYSA-N N-Acetylcaprolactam Chemical compound CC(=O)N1CCCCCC1=O QISSLHPKTCLLDL-UHFFFAOYSA-N 0.000 description 2
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 2
- DZBUGLKDJFMEHC-UHFFFAOYSA-N acridine Chemical compound C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 2
- IVRMZWNICZWHMI-UHFFFAOYSA-N azide group Chemical group [N-]=[N+]=[N-] IVRMZWNICZWHMI-UHFFFAOYSA-N 0.000 description 2
- HFACYLZERDEVSX-UHFFFAOYSA-N benzidine Chemical group C1=CC(N)=CC=C1C1=CC=C(N)C=C1 HFACYLZERDEVSX-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- JBKVHLHDHHXQEQ-UHFFFAOYSA-N epsilon-caprolactam Chemical compound O=C1CCCCCN1 JBKVHLHDHHXQEQ-UHFFFAOYSA-N 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000002165 photosensitisation Effects 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- BLYXNIHKOMELAP-UHFFFAOYSA-N 1,8-Dinitropyrene Chemical compound C1=C2C([N+](=O)[O-])=CC=C(C=C3)C2=C2C3=CC=C([N+]([O-])=O)C2=C1 BLYXNIHKOMELAP-UHFFFAOYSA-N 0.000 description 1
- HWEONUWVYWIJPF-OWOJBTEDSA-N 1-azido-4-[(e)-2-(4-azidophenyl)ethenyl]benzene Chemical compound C1=CC(N=[N+]=[N-])=CC=C1\C=C\C1=CC=C(N=[N+]=[N-])C=C1 HWEONUWVYWIJPF-OWOJBTEDSA-N 0.000 description 1
- KSURUOCVQMGISN-UHFFFAOYSA-N 1-chloropleiadene-7,12-dione Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3C(=O)C3=C2C1=CC=C3Cl KSURUOCVQMGISN-UHFFFAOYSA-N 0.000 description 1
- ALRLPDGCPYIVHP-UHFFFAOYSA-N 1-nitropyrene Chemical compound C1=C2C([N+](=O)[O-])=CC=C(C=C3)C2=C2C3=CC=CC2=C1 ALRLPDGCPYIVHP-UHFFFAOYSA-N 0.000 description 1
- OTXMSABUQSQAOY-UHFFFAOYSA-N 2,6-bis[(4-azidophenyl)methylidene]-4-(hydroxymethyl)cyclohexan-1-one Chemical compound O=C1C(=CC=2C=CC(=CC=2)N=[N+]=[N-])CC(CO)CC1=CC1=CC=C(N=[N+]=[N-])C=C1 OTXMSABUQSQAOY-UHFFFAOYSA-N 0.000 description 1
- HTIZYHWADPAKAT-UHFFFAOYSA-N 2,6-bis[(4-azidophenyl)methylidene]-4-methoxycyclohexan-1-one Chemical compound O=C1C(=CC=2C=CC(=CC=2)N=[N+]=[N-])CC(OC)CC1=CC1=CC=C(N=[N+]=[N-])C=C1 HTIZYHWADPAKAT-UHFFFAOYSA-N 0.000 description 1
- HTIGZLRGKACXNH-UHFFFAOYSA-N 2,6-bis[(4-azidophenyl)methylidene]-4-trimethylsilylcyclohexan-1-one Chemical compound O=C1C(=CC=2C=CC(=CC=2)N=[N+]=[N-])CC([Si](C)(C)C)CC1=CC1=CC=C(N=[N+]=[N-])C=C1 HTIGZLRGKACXNH-UHFFFAOYSA-N 0.000 description 1
- BWJAQVSVFPHGSU-UHFFFAOYSA-N 2-(dimethylamino)ethyl 3-phenylprop-2-enoate Chemical compound CN(C)CCOC(=O)C=CC1=CC=CC=C1 BWJAQVSVFPHGSU-UHFFFAOYSA-N 0.000 description 1
- DPBJAVGHACCNRL-UHFFFAOYSA-N 2-(dimethylamino)ethyl prop-2-enoate Chemical compound CN(C)CCOC(=O)C=C DPBJAVGHACCNRL-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- ODZTXUXIYGJLMC-UHFFFAOYSA-N 2-hydroxycyclohexan-1-one Chemical compound OC1CCCCC1=O ODZTXUXIYGJLMC-UHFFFAOYSA-N 0.000 description 1
- XFOHWECQTFIEIX-UHFFFAOYSA-N 2-nitrofluorene Chemical compound C1=CC=C2C3=CC=C([N+](=O)[O-])C=C3CC2=C1 XFOHWECQTFIEIX-UHFFFAOYSA-N 0.000 description 1
- PSLWNLWGDQNCSJ-UHFFFAOYSA-N 3,5-bis[(4-azidophenyl)methylidene]cyclohexane-1-carboxylic acid Chemical compound N(=[N+]=[N-])C1=CC=C(C=C2CC(CC(C2)C(=O)O)=CC2=CC=C(C=C2)N=[N+]=[N-])C=C1 PSLWNLWGDQNCSJ-UHFFFAOYSA-N 0.000 description 1
- UFQHFMGRRVQFNA-UHFFFAOYSA-N 3-(dimethylamino)propyl prop-2-enoate Chemical compound CN(C)CCCOC(=O)C=C UFQHFMGRRVQFNA-UHFFFAOYSA-N 0.000 description 1
- QGXMPHBQJFXJCI-UHFFFAOYSA-N 4-(dimethylamino)butyl prop-2-enoate Chemical compound CN(C)CCCCOC(=O)C=C QGXMPHBQJFXJCI-UHFFFAOYSA-N 0.000 description 1
- BXBJZYXQHHPVGO-UHFFFAOYSA-N 4-hydroxycyclohexan-1-one Chemical compound OC1CCC(=O)CC1 BXBJZYXQHHPVGO-UHFFFAOYSA-N 0.000 description 1
- GURGWUSKSSGTID-UHFFFAOYSA-N 5-(dimethylamino)pentyl 2-methylprop-2-enoate Chemical compound CN(C)CCCCCOC(=O)C(C)=C GURGWUSKSSGTID-UHFFFAOYSA-N 0.000 description 1
- IVBVBKJTVDCUOJ-UHFFFAOYSA-N 5-(dimethylamino)pentyl prop-2-enoate Chemical compound CN(C)CCCCCOC(=O)C=C IVBVBKJTVDCUOJ-UHFFFAOYSA-N 0.000 description 1
- CUARLQDWYSRQDF-UHFFFAOYSA-N 5-Nitroacenaphthene Chemical compound C1CC2=CC=CC3=C2C1=CC=C3[N+](=O)[O-] CUARLQDWYSRQDF-UHFFFAOYSA-N 0.000 description 1
- FRDUBKBSPUFFPN-UHFFFAOYSA-N 6-(dimethylamino)hexyl 2-methylprop-2-enoate Chemical compound CN(C)CCCCCCOC(=O)C(C)=C FRDUBKBSPUFFPN-UHFFFAOYSA-N 0.000 description 1
- UJZDVMQPVOHSDG-UHFFFAOYSA-N 6-(dimethylamino)hexyl prop-2-enoate Chemical compound CN(C)CCCCCCOC(=O)C=C UJZDVMQPVOHSDG-UHFFFAOYSA-N 0.000 description 1
- HUKPVYBUJRAUAG-UHFFFAOYSA-N 7-benzo[a]phenalenone Chemical compound C1=CC(C(=O)C=2C3=CC=CC=2)=C2C3=CC=CC2=C1 HUKPVYBUJRAUAG-UHFFFAOYSA-N 0.000 description 1
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 1
- 101000777220 Homo sapiens Ubiquitin carboxyl-terminal hydrolase 3 Proteins 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 102100031287 Ubiquitin carboxyl-terminal hydrolase 3 Human genes 0.000 description 1
- XDIFOIHGJGSGQB-UHFFFAOYSA-N acridine-1-carbonitrile Chemical compound C1=CC=C2C=C3C(C#N)=CC=CC3=NC2=C1 XDIFOIHGJGSGQB-UHFFFAOYSA-N 0.000 description 1
- 125000003368 amide group Chemical group 0.000 description 1
- RJGDLRCDCYRQOQ-UHFFFAOYSA-N anthrone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3CC2=C1 RJGDLRCDCYRQOQ-UHFFFAOYSA-N 0.000 description 1
- LHMRXAIRPKSGDE-UHFFFAOYSA-N benzo[a]anthracene-7,12-dione Chemical compound C1=CC2=CC=CC=C2C2=C1C(=O)C1=CC=CC=C1C2=O LHMRXAIRPKSGDE-UHFFFAOYSA-N 0.000 description 1
- 229910001628 calcium chloride Inorganic materials 0.000 description 1
- 239000001110 calcium chloride Substances 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229940125773 compound 10 Drugs 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 125000002243 cyclohexanonyl group Chemical group *C1(*)C(=O)C(*)(*)C(*)(*)C(*)(*)C1(*)* 0.000 description 1
- 238000006356 dehydrogenation reaction Methods 0.000 description 1
- 238000006471 dimerization reaction Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 125000004185 ester group Chemical group 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- YLQWCDOCJODRMT-UHFFFAOYSA-N fluoren-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3C2=C1 YLQWCDOCJODRMT-UHFFFAOYSA-N 0.000 description 1
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- UBIJTWDKTYCPMQ-UHFFFAOYSA-N hexachlorophosphazene Chemical compound ClP1(Cl)=NP(Cl)(Cl)=NP(Cl)(Cl)=N1 UBIJTWDKTYCPMQ-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- ZHDTXTDHBRADLM-UHFFFAOYSA-N hydron;2,3,4,5-tetrahydropyridin-6-amine;chloride Chemical compound Cl.NC1=NCCCC1 ZHDTXTDHBRADLM-UHFFFAOYSA-N 0.000 description 1
- 150000003949 imides Chemical group 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- ZLVXBBHTMQJRSX-VMGNSXQWSA-N jdtic Chemical compound C1([C@]2(C)CCN(C[C@@H]2C)C[C@H](C(C)C)NC(=O)[C@@H]2NCC3=CC(O)=CC=C3C2)=CC=CC(O)=C1 ZLVXBBHTMQJRSX-VMGNSXQWSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- MQWCXKGKQLNYQG-UHFFFAOYSA-N methyl cyclohexan-4-ol Natural products CC1CCC(O)CC1 MQWCXKGKQLNYQG-UHFFFAOYSA-N 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000006303 photolysis reaction Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000001572 propyl (E)-3-phenylprop-2-enoate Substances 0.000 description 1
- KXXXUIKPSVVSAW-UHFFFAOYSA-K pyranine Chemical compound [Na+].[Na+].[Na+].C1=C2C(O)=CC(S([O-])(=O)=O)=C(C=C3)C2=C2C3=C(S([O-])(=O)=O)C=C(S([O-])(=O)=O)C2=C1 KXXXUIKPSVVSAW-UHFFFAOYSA-K 0.000 description 1
- 239000012487 rinsing solution Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- FHYUCVWDMABHHH-UHFFFAOYSA-N toluene;1,2-xylene Chemical group CC1=CC=CC=C1.CC1=CC=CC=C1C FHYUCVWDMABHHH-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
Description
æ¬çºæã¯ãèç±æ§é«ååãšãªãæ°èŠãªæå
æ§é
åäœçµæç©ãçšãèç±æ§ã«åªããããªã€ããã®ã
ã¿ãŒã³åœ¢ææ³ã«é¢ãããã®ã§ããã åŸæ¥ãèç±æ§é«ååãšãªãæå æ§éåçµäœæç©
ãšããŠ(a)ããªã€ããã®åé§äœããããªã¢ããé žã
äž»æåãšããããªããŒãšãååŠç·ã«ããäºéåå
ã¯éåå¯èœãªççŽ äžççŽ äºéçµåããã³ã¢ããåº
åã¯ãã®åçŽåå¡©ãå«ãååç©ãšãæ··åããã
ã®ã(b)ããªã¢ããé žã®ã«ã«ããã·ã«åºã«ã¢ããçµ
åã§äžé£œåçµåãæããåºïŒããã«åºïŒãå°å ¥
ããããã«ãã¹ã¢ãžãååç©ãå ããç³»ãããªã
æå æ§èç±éåäœçµæç©ãç¥ãããŠããã ããããäžèš(a)ã®çµæç©ã¯ãæ床ãæ°çŸãæ°å
mJïŒcm2çšåºŠãããå®çšã«äŸããã«ã¯äžååã§ã
ããäžèš(b)ã®çµæç©ã¯ãçŸåæã«é²å éšã®ãã¿ãŒ
ã³ã溶åºããæããã现ããªãã¿ãŒã³ã圢æãã
ãªãã®ã¿ãªããããã¿ãŒã³ã®ç«¯é¢ãé®®æã§ãªãæ¬
ç¹ããã€ãã æ¬çºæã®ç®çã¯åèšããåŸæ¥æè¡ã®æ¬ ç¹ããªã
ããé«æ床ã§è§£å床ã®è¯å¥œãªæå æ§éåäœçµæç©
ãçšããããªã€ããã®ãã¿ãŒã³åœ¢ææ³ãæäŸãã
ã«ããã äžèšç®çãéæããããã«éææ€èšããçµæã (i) äžè¬åŒ ïŒäœããããåŒäžR1ã¯ïŒäŸ¡ãŸãã¯ïŒäŸ¡ã®æ
æ©åºãR2ã¯ïŒäŸ¡ã®ææ©åºãè¡šãããïœã¯ïŒå
ã¯ïŒã§ãããïŒã§è¡šããããç¹°ãè¿ãåäœãäž»
æåãšããããªã100éééšãšã (ii) äžè¬åŒ ãäœãããïŒåŒäžïŒžã¯âOHïŒâOR3ïŒâR4
âOHïŒâSiR3 3ïŒâCOOHïŒâCOOR3ïŒâNR2 3ïŒâ
NH2ïŒïŒR3ã¯äœçŽã¢ã«ãã«åºãR4ã¯ã¢ã«ãã¬ã³
ãè¡šããïŒããéžæãããåºãè¡šãããïœã¯ïŒ
ãŸãã¯ïŒã§ããããã§è¡šããããè³éŠæãã¹ã¢
ãžãååç©0.1ã100éééšãšã (iii) äžè¬åŒ ïŒäœããR5ïŒR6ïŒR7ïŒR9ã¯æ°ŽçŽ ãäœçŽã¢ã«
ãã«åºãããšãã«åºãããã«åºã®äžããéžæã
ããåºãR8ã¯ã¢ã«ãã¬ã³ãè¡šãããïŒã§è¡šãã
ããã¢ãã³ååç©ïŒã400éééšãšã (iv) å¿ èŠã«å¿ããŠå ããå¢æå€ãšããæãæå æ§
éåäœçµæç©ãåèšããåŸæ¥æ³ã«æ¯ã¹ãŠé«æ床
ã§ãã€è§£å床ãè¯å¥œã§ããããšãèŠãåºããã æ¬çºæã®ãã¿ãŒã³åœ¢ææ³ã«çšããæå æ§éåäœ
çµæç©ã¯ãéåžžã察象ãšããåºæ¿äžã«å¡èãšããŠ
圢æãããåŸãææã®ç®æã«çŽ«å€ç·çã®ååŠç·ã
ç §å°ããŠæªç §å°éšãšç §å°éšã®æº¶å€ã«å¯Ÿãã溶解æ§
ã®å·®ãçããããçŸå液ïŒæº¶å€ïŒã§åŠçããããš
ã«ãã€ãŠæ¬éåäœçµæç©ã§æãææã®ãã¬åãã¿
ãŒã³ãšæãã äžèšã®ãã¿ãŒã³åœ¢ææ³ã¯ååŠç·ãç §å°ããã
ãšãåå éšåã§ã¯å æ¶æ©åå¿ãèµ·ã€ãŠããªãéã«
æ¶æ©ã圢æããããã®ããã«æº¶å€ã«å¯Ÿããäžæº¶æ§
ãå¢å€§ããããšã«äŸããšèãããããæ¬æå æ§é
åäœçµæç©ã¯ããã®å æ¶æ©åå¿ãçãããããã
ãã«å æ¶æ©å€ãšããŠå æåæ§ã®é«ãããšã§ç¥ãã
ãŠãããã¹ã¢ãžãååç©ãçšããŠããããã®ãã¹
ã¢ãžãååç©ã®æã€ã¢ãžãåºïŒâN3ïŒã¯ãå ã
åžåãããšæŽ»æ§çš®ãã€ãã¬ã³ïŒâïŒïŒã圢æ
ããäºéçµåãžã®ä»å ãâçµåãžã®æ¿å ¥ãæ°Ž
çŽ åŒãæãåå¿çãèµ·ããŠçµåã圢æããããã¹
ã¢ãžãååç©ã¯ããã®ã¢ãžãåºãååã®äž¡ç«¯ã«æ
ã€ããšã«ãã€ãŠåå䞡端ã§ååŠçµåã圢æããã
ãšãã§ããåŸã€ãŠããªãã®æ¶æ©ã«ããããããšã
ã§ããããåŒããã§ç€ºãããããªã¢ããé žã¯æŽ»
æ§çš®ãã€ãã¬ã³ãšã®åå¿åºãæã€ãŠããªãããã
ã§ãæ¬æå æ§éåäœçµæç©ã§ã¯ã第ïŒã®æåãšã
ãŠããªã¢ããé žãšçµåããåºïŒã¢ããåºïŒãæã¡
ãã€æŽ»æ§çš®ãã€ãã¬ã³ãšå¹çè¯ãåå¿ããåºïŒç
çŽ äžççŽ äºéçµåãã¢ãªã«äœã®ïŒ£âåºçïŒãæ
ã€ååç©ãçšããããªã¢ããé žãšã®æ¶æ©ãå¯èœãª
ããããŠããããã®æãäžèšã®ç¬¬ïŒæåãšããŠçš
ããååç©ã¯ãã®ã¢ããåºãããªã¢ããé žã®ã«ã«
ããã·ã«åºãšã€ãªã³çµåããããšã«ãã€ãŠããªã¢
ããé žã«çµã¿èŸŒãŸãããšèããããã ããªã¢ããé žä»¥å€ã«çšãããã¹ã¢ãžãååç©ãš
ãã€ãã¬ã³ãšã®åå¿åºãæã€ã¢ãã³ååç©ãå¿ é
æåã§ãããåŸã€ãŠäžèšåå¿ãæ¶æ©ã®äž»åå¿ã§ã
ããšèããããã®ã¯ä»¥äžã®å®éšäŸã«åºãããããª
ã¢ããé žã«ãã®ã«ã«ããã·ã«åºã®ã¢ã«æ°ã«å¯ŸããŠ
çã¢ã«éã®3â²âïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒãã
ãã«âïŒâããã³ã«ã«ããã·ã¬ãŒããšã0.2åã¢
ã«éã®ïŒïŒïŒâãžïŒ4â²âã¢ãžããã³ã¶ã«ïŒâïŒâ
ããããã·ã·ã¯ããããµãã³ãå ããæå æ§éå
äœçµæç©ã¯ãå¡èå4ÎŒmãç §å°å æº350Wé«å§æ°Ž
éç¯ãçšããããªããã¹ã¯ãä»ããŠå æºãã30cm
ã®è·é¢ã§å ç §å°ããâã¡ãã«âïŒâãããªãã³
ïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæãçŸå液ã§çŸåãã
å Žåã20ç§ã®ç §å°ã«ãã€ãŠãã¿ãŒã³ã圢æããã
ã®ã«å¯Ÿããäžèšçµæã®ãã¡ããªã¢ããé žã®ã¿ã®å Ž
åãããªã¢ããé žãšãã¹ã¢ãžããŸãã¯ããªã¢ãã
é žãšã¢ãã³ååç©ã®ïŒæåãçšããçµæã®å Žåã
äžèšãšå šãåäžã®å®éšæ¡ä»¶ã§15åå ç §å°ããŠãã
ã¿ãŒã³ã¯åœ¢æãããå¡åžèã¯å šãŠçŸå液ã«æº¶è§£ã
ãã ããªã¢ããé žãšã¢ãã³ååç©ããæãç³»ã®ã
ã¡ãã¢ãã³ååç©ãå åå¿ïŒäºéåãéåçïŒã
ãäºéçµåãæã€å Žåã«ãããŠãããã¹ã¢ãžãå
åç©ãå ±åããå Žåã«ã¯å§åçã«ãã¹ã¢ãžããã
çæãã掻æ§çš®ãã€ãã¬ã³ã®ä»å ã«ããæ¶æ©åå¿
ãäž»åå¿ãšãªããäŸãã°ããªã¢ããé žãšïŒâïŒïŒ®ïŒ
âãžã¡ãã«ã¢ããïŒãšãã«ã¡ã¿ã¯ãªã¬ãŒããã
æãçµæç©ã¯ãäžèšã®ç §å°æ¡ä»¶ã§æ床ïŒå¡åžèã«
察ããŠçŸååŸåã1/2ãšãªãç §å°éïŒ3200mJïŒcm2
ã§ããããããã«ã¢ãã³æåã®ã¢ã«æ°ã«å¯ŸããŠ
0.1åã¢ã«ã®ïŒïŒïŒâãžïŒ4â²âã¢ãžããã³ã¶ã«ïŒâ
ïŒâããããã·ã·ã¯ããããµãã³ãå ããæå æ§
éåäœçµæç©ã¯æ床40mJïŒcm2ã§ãããåè ã®1.3
ïŒ ç §å°éã§ãã¿ãŒã³åœ¢æãå¯èœãšãªã€ããå³ã¡ã
ãã¹ã¢ãžãååç©ã®ãã€ãã¬ã³ã®å å解ãšããã«
ç¶ãäºéçµåãžã®ä»å ã極ããŠçæé¥ã§ãã€å¥œç
è¯ãèµ·ããŠããããšãæå³ããŠããã æ¬çºæã®ãã¿ãŒã³åœ¢ææ³ã«çšããæå æ§éåäœ
çµæç©ã¯ãå®çšçã§ãã€é«æ床ãªãã®ãšãããã
ã«åèšããæå æ§ä»äžæåèªèº«ã«ã工倫ãå ã
ããåŸæ¥ãããªãã¬ãžã¹ãææã®æå å€æåãšã
ãŠãŽã ç³»ããªãçã®æ¥µæ§ã®äœãããªããããŒã¹ãš
ããŠçšããææã«ã€ããŠã¯ããã¹ã¢ãžãååç©
ïŒäŸãã°ïŒïŒïŒâãã¹âïŒãã©ã¢ãžããã³ã¶ã«ïŒâ
ïŒâã¡ãã«ã·ã¯ããããµãã³ïŒãçšããæ¹æ³ã¯ç¥
ãããŠãããã極æ§ã®é«ãããªã¢ããé žã«ãã¹ã¢
ãžãååç©ãçšããŠè£œååããäŸã¯ç¥ãããŠããª
ããããã¯ããã¹ã¢ãžãååç©ãããªã¢ããé žãš
ã®çžæº¶æ§ãäœãããå¡èã圢æããéã«äžèšãã¹
ã¢ãžãååç©ãæåºããããåããªã¢ããé žã®æº¶
å€ïŒæ¥µæ§æº¶å€ïŒã«å¯Ÿãã溶解æ§ãäœãæ·»å éã«é
çãããããé«æ床ã®ãã®ãåŸãããšãã§ããªã
ããã§ãããæ¬çºæã«ãããŠã¯ãäžèšçžæº¶æ§ã溶
解æ§ã解決ããããã«ã¯ãã¹ã¢ãžãååç©ãšããŠ
極æ§ãªçœ®æåºãæã€ãã®ãçšããŠãããªã¢ããé ž
ããã³æ¥µæ§æº¶å€ã«å¯Ÿããçžäºäœçšãé«ããã°è¯ã
ãšèãããåãã€ã«ã äžã§ã®åå¿ã®å Žåã¯åå¿çš®
å士ã®çžäºã®äœçœ®ãè¿æ¥ããŠãããããŸãæå床
ã®é«ãäºãåå¿å¹çãé«ããå åã§ãããšèãã
ãã®èŠ³ç¹ãããããªã¢ããé žãšã®çžæº¶æ§ã®è¯ã極
æ§ãªæå æ§ä»äžæåãçšããã°è¯ããšèãããæ¬
çºæã®æå æ§éåäœçµæç©ã¯ãäžèšã®èãã«åŸ
ãããã¹ã¢ãžãååç©ãšããŠã¯ã·ã¯ããããµãã³
ç°ã®ïŒäœã«æ¥µæ§åºãæã€ãäžè¬åŒããã§è¡šãã
ããååç©ãçšããã¢ãã³æåãšããŠã¯æ¥µæ§ãªãš
ã¹ãã«åºãæã€ãäžè¬åŒããã§è¡šããããåå
ç©ãçšããããšã«ãã€ãŠå¡è圢æèœã«åªãããã€
æ°ãæ°åmJïŒcm2å°ã®é«æ床ãªææãšããããšã
ã§ããã 以äžãæ¬çºæã§äœ¿çšããææã«ã€ããŠèª¬æã
ãã äžè¬åŒããã§ç€ºãããããªã¢ããé žã¯ãå ç±
åŠçã«ãã€ãŠããªã€ãããšæãåŸããã®ã§ããã
ãããããªã€ããã¯èç±æ§ãæãããäžè¬åŒ
ããã§è¡šããããç¹°ãè¿ãåäœãäž»æåãšãã
ããªãã¯ãäžè¬åŒããã§ç€ºãããããªã¢ããé ž
ã®ã¿ãããªããã®ã§ãããããšä»ã®ç¹°ãè¿ãåäœ
ãšã®å ±éåäœã§ãã€ãŠãè¯ãããããã®äŸãšããŠ
ã¯ããªãšã¹ãã«ã¢ããé žãããªããã©ãžãã¢ãã
é žãªã©ãæãããããå ±éåã«çšããããç¹°ãè¿
ãåäœã®çš®é¡ãéã¯æçµå ç±åŠçã«ãã€ãŠåŸãã
ãããªã€ããã®èç±æ§ãèããæãªããªãç¯å²ã§
éžæããã®ãæãããããªã€ããã®èç±æ§ãšããŠ
ã¯çªçŽ é°å²æ°äž300ã400âã«ïŒæéå ç±ããŠã圢
æããã¬ãªãŒããã¿ãŒã³ãä¿æããããã®ãæãŸ
ããã äžè¬åŒããäžã®R1ïŒR2ã¯ãããªã€ãããšã
ãæã®èç±æ§ã®é¢ããå«è³éŠæç°ææ©åºãå«è€çŽ
ç°ææ©åºãæããããããã®äŸã¯U.S.P.3ïŒ179ïŒ
614ïŒU.S.P.3ïŒ740ïŒ305ïŒç¹å ¬æ48â2956å·ã«ç€º
ãããŠããããã ããããªã€ããã«èç±æ§ãäžã
ããã®ã§ããã°ããã«éå®ãããªãã R1ã¯å ·äœçã«ã¯ã
åäœçµæç©ãçšãèç±æ§ã«åªããããªã€ããã®ã
ã¿ãŒã³åœ¢ææ³ã«é¢ãããã®ã§ããã åŸæ¥ãèç±æ§é«ååãšãªãæå æ§éåçµäœæç©
ãšããŠ(a)ããªã€ããã®åé§äœããããªã¢ããé žã
äž»æåãšããããªããŒãšãååŠç·ã«ããäºéåå
ã¯éåå¯èœãªççŽ äžççŽ äºéçµåããã³ã¢ããåº
åã¯ãã®åçŽåå¡©ãå«ãååç©ãšãæ··åããã
ã®ã(b)ããªã¢ããé žã®ã«ã«ããã·ã«åºã«ã¢ããçµ
åã§äžé£œåçµåãæããåºïŒããã«åºïŒãå°å ¥
ããããã«ãã¹ã¢ãžãååç©ãå ããç³»ãããªã
æå æ§èç±éåäœçµæç©ãç¥ãããŠããã ããããäžèš(a)ã®çµæç©ã¯ãæ床ãæ°çŸãæ°å
mJïŒcm2çšåºŠãããå®çšã«äŸããã«ã¯äžååã§ã
ããäžèš(b)ã®çµæç©ã¯ãçŸåæã«é²å éšã®ãã¿ãŒ
ã³ã溶åºããæããã现ããªãã¿ãŒã³ã圢æãã
ãªãã®ã¿ãªããããã¿ãŒã³ã®ç«¯é¢ãé®®æã§ãªãæ¬
ç¹ããã€ãã æ¬çºæã®ç®çã¯åèšããåŸæ¥æè¡ã®æ¬ ç¹ããªã
ããé«æ床ã§è§£å床ã®è¯å¥œãªæå æ§éåäœçµæç©
ãçšããããªã€ããã®ãã¿ãŒã³åœ¢ææ³ãæäŸãã
ã«ããã äžèšç®çãéæããããã«éææ€èšããçµæã (i) äžè¬åŒ ïŒäœããããåŒäžR1ã¯ïŒäŸ¡ãŸãã¯ïŒäŸ¡ã®æ
æ©åºãR2ã¯ïŒäŸ¡ã®ææ©åºãè¡šãããïœã¯ïŒå
ã¯ïŒã§ãããïŒã§è¡šããããç¹°ãè¿ãåäœãäž»
æåãšããããªã100éééšãšã (ii) äžè¬åŒ ãäœãããïŒåŒäžïŒžã¯âOHïŒâOR3ïŒâR4
âOHïŒâSiR3 3ïŒâCOOHïŒâCOOR3ïŒâNR2 3ïŒâ
NH2ïŒïŒR3ã¯äœçŽã¢ã«ãã«åºãR4ã¯ã¢ã«ãã¬ã³
ãè¡šããïŒããéžæãããåºãè¡šãããïœã¯ïŒ
ãŸãã¯ïŒã§ããããã§è¡šããããè³éŠæãã¹ã¢
ãžãååç©0.1ã100éééšãšã (iii) äžè¬åŒ ïŒäœããR5ïŒR6ïŒR7ïŒR9ã¯æ°ŽçŽ ãäœçŽã¢ã«
ãã«åºãããšãã«åºãããã«åºã®äžããéžæã
ããåºãR8ã¯ã¢ã«ãã¬ã³ãè¡šãããïŒã§è¡šãã
ããã¢ãã³ååç©ïŒã400éééšãšã (iv) å¿ èŠã«å¿ããŠå ããå¢æå€ãšããæãæå æ§
éåäœçµæç©ãåèšããåŸæ¥æ³ã«æ¯ã¹ãŠé«æ床
ã§ãã€è§£å床ãè¯å¥œã§ããããšãèŠãåºããã æ¬çºæã®ãã¿ãŒã³åœ¢ææ³ã«çšããæå æ§éåäœ
çµæç©ã¯ãéåžžã察象ãšããåºæ¿äžã«å¡èãšããŠ
圢æãããåŸãææã®ç®æã«çŽ«å€ç·çã®ååŠç·ã
ç §å°ããŠæªç §å°éšãšç §å°éšã®æº¶å€ã«å¯Ÿãã溶解æ§
ã®å·®ãçããããçŸå液ïŒæº¶å€ïŒã§åŠçããããš
ã«ãã€ãŠæ¬éåäœçµæç©ã§æãææã®ãã¬åãã¿
ãŒã³ãšæãã äžèšã®ãã¿ãŒã³åœ¢ææ³ã¯ååŠç·ãç §å°ããã
ãšãåå éšåã§ã¯å æ¶æ©åå¿ãèµ·ã€ãŠããªãéã«
æ¶æ©ã圢æããããã®ããã«æº¶å€ã«å¯Ÿããäžæº¶æ§
ãå¢å€§ããããšã«äŸããšèãããããæ¬æå æ§é
åäœçµæç©ã¯ããã®å æ¶æ©åå¿ãçãããããã
ãã«å æ¶æ©å€ãšããŠå æåæ§ã®é«ãããšã§ç¥ãã
ãŠãããã¹ã¢ãžãååç©ãçšããŠããããã®ãã¹
ã¢ãžãååç©ã®æã€ã¢ãžãåºïŒâN3ïŒã¯ãå ã
åžåãããšæŽ»æ§çš®ãã€ãã¬ã³ïŒâïŒïŒã圢æ
ããäºéçµåãžã®ä»å ãâçµåãžã®æ¿å ¥ãæ°Ž
çŽ åŒãæãåå¿çãèµ·ããŠçµåã圢æããããã¹
ã¢ãžãååç©ã¯ããã®ã¢ãžãåºãååã®äž¡ç«¯ã«æ
ã€ããšã«ãã€ãŠåå䞡端ã§ååŠçµåã圢æããã
ãšãã§ããåŸã€ãŠããªãã®æ¶æ©ã«ããããããšã
ã§ããããåŒããã§ç€ºãããããªã¢ããé žã¯æŽ»
æ§çš®ãã€ãã¬ã³ãšã®åå¿åºãæã€ãŠããªãããã
ã§ãæ¬æå æ§éåäœçµæç©ã§ã¯ã第ïŒã®æåãšã
ãŠããªã¢ããé žãšçµåããåºïŒã¢ããåºïŒãæã¡
ãã€æŽ»æ§çš®ãã€ãã¬ã³ãšå¹çè¯ãåå¿ããåºïŒç
çŽ äžççŽ äºéçµåãã¢ãªã«äœã®ïŒ£âåºçïŒãæ
ã€ååç©ãçšããããªã¢ããé žãšã®æ¶æ©ãå¯èœãª
ããããŠããããã®æãäžèšã®ç¬¬ïŒæåãšããŠçš
ããååç©ã¯ãã®ã¢ããåºãããªã¢ããé žã®ã«ã«
ããã·ã«åºãšã€ãªã³çµåããããšã«ãã€ãŠããªã¢
ããé žã«çµã¿èŸŒãŸãããšèããããã ããªã¢ããé žä»¥å€ã«çšãããã¹ã¢ãžãååç©ãš
ãã€ãã¬ã³ãšã®åå¿åºãæã€ã¢ãã³ååç©ãå¿ é
æåã§ãããåŸã€ãŠäžèšåå¿ãæ¶æ©ã®äž»åå¿ã§ã
ããšèããããã®ã¯ä»¥äžã®å®éšäŸã«åºãããããª
ã¢ããé žã«ãã®ã«ã«ããã·ã«åºã®ã¢ã«æ°ã«å¯ŸããŠ
çã¢ã«éã®3â²âïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒãã
ãã«âïŒâããã³ã«ã«ããã·ã¬ãŒããšã0.2åã¢
ã«éã®ïŒïŒïŒâãžïŒ4â²âã¢ãžããã³ã¶ã«ïŒâïŒâ
ããããã·ã·ã¯ããããµãã³ãå ããæå æ§éå
äœçµæç©ã¯ãå¡èå4ÎŒmãç §å°å æº350Wé«å§æ°Ž
éç¯ãçšããããªããã¹ã¯ãä»ããŠå æºãã30cm
ã®è·é¢ã§å ç §å°ããâã¡ãã«âïŒâãããªãã³
ïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæãçŸå液ã§çŸåãã
å Žåã20ç§ã®ç §å°ã«ãã€ãŠãã¿ãŒã³ã圢æããã
ã®ã«å¯Ÿããäžèšçµæã®ãã¡ããªã¢ããé žã®ã¿ã®å Ž
åãããªã¢ããé žãšãã¹ã¢ãžããŸãã¯ããªã¢ãã
é žãšã¢ãã³ååç©ã®ïŒæåãçšããçµæã®å Žåã
äžèšãšå šãåäžã®å®éšæ¡ä»¶ã§15åå ç §å°ããŠãã
ã¿ãŒã³ã¯åœ¢æãããå¡åžèã¯å šãŠçŸå液ã«æº¶è§£ã
ãã ããªã¢ããé žãšã¢ãã³ååç©ããæãç³»ã®ã
ã¡ãã¢ãã³ååç©ãå åå¿ïŒäºéåãéåçïŒã
ãäºéçµåãæã€å Žåã«ãããŠãããã¹ã¢ãžãå
åç©ãå ±åããå Žåã«ã¯å§åçã«ãã¹ã¢ãžããã
çæãã掻æ§çš®ãã€ãã¬ã³ã®ä»å ã«ããæ¶æ©åå¿
ãäž»åå¿ãšãªããäŸãã°ããªã¢ããé žãšïŒâïŒïŒ®ïŒ
âãžã¡ãã«ã¢ããïŒãšãã«ã¡ã¿ã¯ãªã¬ãŒããã
æãçµæç©ã¯ãäžèšã®ç §å°æ¡ä»¶ã§æ床ïŒå¡åžèã«
察ããŠçŸååŸåã1/2ãšãªãç §å°éïŒ3200mJïŒcm2
ã§ããããããã«ã¢ãã³æåã®ã¢ã«æ°ã«å¯ŸããŠ
0.1åã¢ã«ã®ïŒïŒïŒâãžïŒ4â²âã¢ãžããã³ã¶ã«ïŒâ
ïŒâããããã·ã·ã¯ããããµãã³ãå ããæå æ§
éåäœçµæç©ã¯æ床40mJïŒcm2ã§ãããåè ã®1.3
ïŒ ç §å°éã§ãã¿ãŒã³åœ¢æãå¯èœãšãªã€ããå³ã¡ã
ãã¹ã¢ãžãååç©ã®ãã€ãã¬ã³ã®å å解ãšããã«
ç¶ãäºéçµåãžã®ä»å ã極ããŠçæé¥ã§ãã€å¥œç
è¯ãèµ·ããŠããããšãæå³ããŠããã æ¬çºæã®ãã¿ãŒã³åœ¢ææ³ã«çšããæå æ§éåäœ
çµæç©ã¯ãå®çšçã§ãã€é«æ床ãªãã®ãšãããã
ã«åèšããæå æ§ä»äžæåèªèº«ã«ã工倫ãå ã
ããåŸæ¥ãããªãã¬ãžã¹ãææã®æå å€æåãšã
ãŠãŽã ç³»ããªãçã®æ¥µæ§ã®äœãããªããããŒã¹ãš
ããŠçšããææã«ã€ããŠã¯ããã¹ã¢ãžãååç©
ïŒäŸãã°ïŒïŒïŒâãã¹âïŒãã©ã¢ãžããã³ã¶ã«ïŒâ
ïŒâã¡ãã«ã·ã¯ããããµãã³ïŒãçšããæ¹æ³ã¯ç¥
ãããŠãããã極æ§ã®é«ãããªã¢ããé žã«ãã¹ã¢
ãžãååç©ãçšããŠè£œååããäŸã¯ç¥ãããŠããª
ããããã¯ããã¹ã¢ãžãååç©ãããªã¢ããé žãš
ã®çžæº¶æ§ãäœãããå¡èã圢æããéã«äžèšãã¹
ã¢ãžãååç©ãæåºããããåããªã¢ããé žã®æº¶
å€ïŒæ¥µæ§æº¶å€ïŒã«å¯Ÿãã溶解æ§ãäœãæ·»å éã«é
çãããããé«æ床ã®ãã®ãåŸãããšãã§ããªã
ããã§ãããæ¬çºæã«ãããŠã¯ãäžèšçžæº¶æ§ã溶
解æ§ã解決ããããã«ã¯ãã¹ã¢ãžãååç©ãšããŠ
極æ§ãªçœ®æåºãæã€ãã®ãçšããŠãããªã¢ããé ž
ããã³æ¥µæ§æº¶å€ã«å¯Ÿããçžäºäœçšãé«ããã°è¯ã
ãšèãããåãã€ã«ã äžã§ã®åå¿ã®å Žåã¯åå¿çš®
å士ã®çžäºã®äœçœ®ãè¿æ¥ããŠãããããŸãæå床
ã®é«ãäºãåå¿å¹çãé«ããå åã§ãããšèãã
ãã®èŠ³ç¹ãããããªã¢ããé žãšã®çžæº¶æ§ã®è¯ã極
æ§ãªæå æ§ä»äžæåãçšããã°è¯ããšèãããæ¬
çºæã®æå æ§éåäœçµæç©ã¯ãäžèšã®èãã«åŸ
ãããã¹ã¢ãžãååç©ãšããŠã¯ã·ã¯ããããµãã³
ç°ã®ïŒäœã«æ¥µæ§åºãæã€ãäžè¬åŒããã§è¡šãã
ããååç©ãçšããã¢ãã³æåãšããŠã¯æ¥µæ§ãªãš
ã¹ãã«åºãæã€ãäžè¬åŒããã§è¡šããããåå
ç©ãçšããããšã«ãã€ãŠå¡è圢æèœã«åªãããã€
æ°ãæ°åmJïŒcm2å°ã®é«æ床ãªææãšããããšã
ã§ããã 以äžãæ¬çºæã§äœ¿çšããææã«ã€ããŠèª¬æã
ãã äžè¬åŒããã§ç€ºãããããªã¢ããé žã¯ãå ç±
åŠçã«ãã€ãŠããªã€ãããšæãåŸããã®ã§ããã
ãããããªã€ããã¯èç±æ§ãæãããäžè¬åŒ
ããã§è¡šããããç¹°ãè¿ãåäœãäž»æåãšãã
ããªãã¯ãäžè¬åŒããã§ç€ºãããããªã¢ããé ž
ã®ã¿ãããªããã®ã§ãããããšä»ã®ç¹°ãè¿ãåäœ
ãšã®å ±éåäœã§ãã€ãŠãè¯ãããããã®äŸãšããŠ
ã¯ããªãšã¹ãã«ã¢ããé žãããªããã©ãžãã¢ãã
é žãªã©ãæãããããå ±éåã«çšããããç¹°ãè¿
ãåäœã®çš®é¡ãéã¯æçµå ç±åŠçã«ãã€ãŠåŸãã
ãããªã€ããã®èç±æ§ãèããæãªããªãç¯å²ã§
éžæããã®ãæãããããªã€ããã®èç±æ§ãšããŠ
ã¯çªçŽ é°å²æ°äž300ã400âã«ïŒæéå ç±ããŠã圢
æããã¬ãªãŒããã¿ãŒã³ãä¿æããããã®ãæãŸ
ããã äžè¬åŒããäžã®R1ïŒR2ã¯ãããªã€ãããšã
ãæã®èç±æ§ã®é¢ããå«è³éŠæç°ææ©åºãå«è€çŽ
ç°ææ©åºãæããããããã®äŸã¯U.S.P.3ïŒ179ïŒ
614ïŒU.S.P.3ïŒ740ïŒ305ïŒç¹å ¬æ48â2956å·ã«ç€º
ãããŠããããã ããããªã€ããã«èç±æ§ãäžã
ããã®ã§ããã°ããã«éå®ãããªãã R1ã¯å ·äœçã«ã¯ã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ïŒåŒäžãçµåæã¯ããªãäž»éã®ã«ã«ããã·ã«åº
ãšã®çµåãè¡šãããã«ã«ããã·ã«åºã¯çµåæã«å¯Ÿ
ããŠãªã«ãäœã«äœçœ®ãããïŒãªã©ãæããããã R2ã¯å ·äœçã«ã¯ã
ãšã®çµåãè¡šãããã«ã«ããã·ã«åºã¯çµåæã«å¯Ÿ
ããŠãªã«ãäœã«äœçœ®ãããïŒãªã©ãæããããã R2ã¯å ·äœçã«ã¯ã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãåŒã
ãªã©ãæããããã
ãŸããããããããªã€ããã®èç±æ§ã«æªåœ±é¿ã
äžããªãç¯å²ã§ã¢ããåºãã¢ããåºãã«ã«ããã·
ã«åºãã¹ã«ãã³é žåºãªã©ã®çœ®æåºãæããŠããŠã
ããã€ãããªãã ãªããäžè¬åŒããã§è¡šããããããªã¢ããé ž
ã§å¥œãŸãããã®ãšããŠã¯ããã¡ãªããé žäºç¡æ°Žç©
ãšïŒïŒ4â²âãžã¢ãããžããšãã«ãšãŒãã«ãããã¡
ãªããé žäºç¡æ°Žç©ããã³ïŒïŒ3â²ïŒïŒïŒ4â²âãã³ãŸ
ããšãã³ããã©ã«ã«ãã³é žäºç¡æ°Žç©ãšïŒïŒ4â²ãžã¢
ãããžããšãã«ãšãŒãã«ãããã¡ãªããé žäºç¡æ°Ž
ç©ããã³ïŒïŒ3â²ïŒïŒïŒ4â²âãã³ãŸããšãã³ããã©
ã«ã«ãã³é žäºç¡æ°Žç©ãšïŒïŒ4â²âãžã¢ãããžããšã
ã«ãšãŒãã«åã³ïŒïŒ3â²ïŒïŒïŒ4â²âãã³ãŸããšãã³
ããã©ã«ã«ãã³é žäºç¡æ°Žç©ãšïŒïŒ4â²âãžã¢ãããž
ããšãã«ãšãŒãã«âïŒâã«ã«ãã¢ãããããã¡ãª
ããé žäºç¡æ°Žç©ããã³ïŒïŒ3â²ïŒïŒïŒ4â²âãã³ãŸã
ãšãã³ããã©ã«ã«ãã³é žäºç¡æ°Žç©ãšïŒïŒ4â²âãžã¢
ãããžããšãã«ãšãŒãã«ããã³ãã¹ïŒïŒâã¢ãã
ãããã«ïŒããã©ã¡ãã«ãžã·ãããµã³ããå°ãã
ãããªã¢ããé žãªã©ãæããããã äžè¬åŒããã§è¡šããããããªã¢ããé žã¯äžèš
ã®ããã«ãéåžžãžã¢ãã³ååç©ã«é žäºç¡æ°Žç©ãã»
ãŒåœã¢ã«éåå¿ãããããšã«ãã€ãŠåŸããããã
ãã®å Žåã«çšããåå¿æº¶åªãšããŠã¯ãåå¿åºè³ªã
ãã³çæããããªã¢ããé žã®æº¶è§£æ§çã®ç¹ããé
ãããã³æ§æ¥µæ§æº¶åªã奜ããçšãããããâã¡
ãã«âïŒâãããªãã³ãïŒïŒ®âãžã¡ãã«ãã«ã
ã¢ãããïŒïŒ®âãžã¡ãã«ã¢ã»ãã¢ããããžã¡ã
ã«ã¹ã«ããã·ããâã¢ã»ãã«âεâã«ããã©ã¯
ã¿ã ããã³ïŒïŒïŒâãžã¡ãã«âïŒâã€ãããŸãªãž
ãã³ãªã©ãå žåçãªäŸãšããŠæããããã äžè¬åŒããã§ç€ºããããã¹ã¢ãžãååç©ãšã
ãŠã¯ ãªã©ã奜é©ãªäŸãšããŠæããããããããã«éå®
ãããªãã äžè¬åŒããã§ç€ºããããã¹ã¢ãžãååç©ã®é
åå²åã¯ãäžè¬åŒããã§è¡šããããç¹°ãåãå
äœãäž»æåãšããããªã100éééšã«å¯ŸããŠ0.1é
ééšä»¥äž100éééšä»¥äžãè¯ããããã«å¥œããã¯
0.5éééšä»¥äž50éééšä»¥äžã§çšããã®ã奜ãŸã
ãããã®ç¯å²ãéžè±ãããšãçŸåæ§ã¯ãã¹ã®ä¿å
å®å®æ§çã«æªåœ±é¿ãåãŒãã äžè¬åŒããã§ç€ºãããã¢ãã³ååç©ãšããŠã¯
ïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒãšãã«ã¢ã¯ãªã¬
ãŒããïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒãšãã«ã¡
ã¿ã¯ãªã¬ãŒããïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒ
ãããã«ã¢ã¯ãªã¬ãŒããïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«
ã¢ããïŒãããã«ã¡ã¿ã¯ãªã¬ãŒããïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒããã«ã¢ã¯ãªã¬ãŒããïŒâ
ïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒããã«ã¡ã¿ã¯ãªã¬ãŒ
ããïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒãã³ãã«ã¢
ã¯ãªã¬ãŒããïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒã
ã³ãã«ã¡ã¿ã¯ãªã¬ãŒããïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«
ã¢ããïŒããã·ã«ã¢ã¯ã¬ãŒããïŒâïŒïŒ®ïŒïŒ®âãž
ã¡ãã«ã¢ããïŒããã·ã«ã¡ã¿ã¯ã¬ã¬ãŒããïŒâ
ïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒãšãã«ã·ã³ãã¡ãŒãã
ïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒãããã«ã·ã³ã
ã¡ãŒããªã©ã奜é©ãªäŸãšããŠæãããããããã¹
ã¢ãžããããšå¹çè¯ãåå¿ãããã®ã§ããã°è¯
ããããã«éå®ãããªãã ã¢ãã³ååç©ããã®é åå²åã¯äžè¬åŒãã
ã§è¡šããããç¹°ãè¿ãåäœãäž»æåãšããããªã
100éééšã«å¯ŸããŠïŒéééšä»¥äžã400éééšä»¥äž
ã§çšãããã奜ããã¯10éééšä»¥äž400éééšä»¥
äžã§çšããã®ãæãããäžèšç¯å²ãéžè±ãããšã
çŸåæ§ãæçµçæç©ã®ããªã€ããã®è質ã«æªåœ±é¿
ãããããã æ¬çºæã«ããæå æ§éåäœçµæç©ã¯äžèšæ§æå
ãé©åœãªææ©æº¶å€ã«æº¶è§£ãã溶液ç¶æ ã§çšãã
ãããã®å Žåçšãã溶å€ãšããŠã¯æº¶è§£æ§ã®èŠ³ç¹ã
ãéãããã³æ§æ¥µæ§æº¶åªãæãããâã¡ãã«â
ïŒâãããªãã³ãâã¢ã»ãã«âïŒâãããªã
ã³ãâãã³ãžã«âïŒâãããªãã³ãïŒïŒ®âãž
ã¡ãã«ãã«ã ã¢ãããïŒïŒ®âãžã¡ãã«ã¢ã»ãã¢
ããããžã¡ãã«ã¹ã«ããã·ãããããµã¡ãã«ãã¹
ãã«ããªã¢ãããâã¢ã»ãã«âεâã«ããã©ã¯
ã¿ã ããžã¡ãã«ã€ãããŸãªãžãã³ãªã©ãäŸãšããŠ
æããããããããã¯åç¬ã§çšããŠãè¯ãããæ··
åããŠçšããããšãå¯èœã§ããã溶å€ã®éã¯äžè¬
åŒããã§è¡šããããç¹°ãè¿ãåäœãäž»æåãšã
ãããªããäžè¬åŒããã§è¡šãããããã¹ã¢ãžã
ååç©ãäžè¬åŒããã§è¡šããããã¢ãã³ååç©
ã®ç·åã100éééšãšããæãããã«å¯ŸããŠ100é
ééšä»¥äž10000éééšä»¥äžã§çšããã®ãæããã
ããã«å¥œããã¯200éééšä»¥äž5000éééšä»¥äžã§
çšããã®ãæããããã®ç¯å²ãéžè±ãããšæèæ§
ã«åœ±é¿ãåãŒãã äžèšçµæç©ã«ã¯æ床åäžã®ç®çã§é©å®å¢æå€ã
æ·»å ããŠãããã€ãããªãããæ·»å éã¯äžè¬åŒ
ããã§è¡šããããç¹°ãè¿ãåäœãäž»æåãšãã
ããªããäžè¬åŒããã§è¡šãããããã¹ã¢ãžãå
åç©ãã¢ãã³ååç©ã®ç·ééã®0.1éééšä»¥äž10
éééšä»¥äžã§çšããã®ãæããããã®ç¯å²ãéžè±
ãããšçŸåæ§ãæçµçæç©ã®ããªã€ããã®èç±æ§
ã«æªåœ±é¿ãããããã è³éŠæãã¹ã¢ãžãååç©ã®å¢æã«æå¹ãªååç©
ã¯è§ç°ã山岡ãPhot.Sci.Eng.ïŒ17ãïŒ390ïŒ1973ïŒã
ãã«ãã€ãŠè©³ããå ±åãããŠããããªãã§ãã¢ã³
ããã³ãïŒïŒïŒâãã³ãŸã¢ã³ããã³ãã¢ã¯ãªãž
ã³ãã·ã¢ãã¢ã¯ãªãžã³ãããããã¬ã³ãïŒïŒïŒâ
ãžããããã¬ã³ãããã©ã±ãã³ãïŒâãããã¢ã»
ãããã³ãïŒâããããã«ãªã¬ã³ããã¬ã³âïŒïŒ
ïŒâããã³ãïŒâãã«ãªã¬ãã³ãïŒïŒïŒâãã³ãŸ
ã¢ã³ãã©ããã³ãã¢ã³ãã¢ã³ããã³ãïŒâã¯ãã
âïŒïŒïŒâãã³ãºã¢ã³ãã©ããã³ãïŒâããã¢ã
ã³ãºã¢ã³ãã©ããã³ãïŒâã¯ããâïŒïŒïŒâãã¿
ãã€ã«ããã¿ã¬ã³ãªã©ã奜ãŸããã æ¬çºæã®ãã¿ãŒã³åœ¢ææ³ã®å·¥çšã§æå æ§éåäœ
çµæç©ã®å¡èãŸãã¯å ç±ç¡¬ååŸã®ããªã€ãã被è
ãšæ¯æåºæ¿ã®æ¥çæ§ãåäžãããããã«é©å®æ¯æ
åºæ¿ãæ¥çå©å€ã§åŠçããŠãããã€ãããªãã æ¯æåºæ¿ãšããŠã¯ãéå±ãã¬ã©ã¹ãåå°äœãé
å±é žåç©çµ¶çžäœïŒäŸãã°ãTiO2ïŒTa2O5ïŒSiO2
ãªã©ïŒãçªåã±ã€çŽ ãªã©ãäŸãšããŠæããããã æ¬çºæã«ããæå æ§éåäœçµæç©ã¯éåžžã®åŸ®çŽ°
å å·¥æè¡ã§ãã¿ãŒã³å å·¥ãå¯èœã§ãããäžèšæ¯æ
äœãžã®æ¬éåäœçµæç©ã®å¡åžã«ã¯ã¹ãã³ããçšã
ãå転å¡åžã浞挬ãåŽé§å°å·ãªã©ã®æ段ãå¯èœã§
ãããé©å®éžæããããšãã§ãããå¡åžèåã«å¡
åžæ段ãæ¬éåäœçµæç©ã®ã¯ãã¹ã®åºåœ¢åæ¿åºŠã
ç²åºŠçã«ãã€ãŠèª¿ç¯å¯èœã§ããã 瀺æåºæ¿äžã§å¡èãšãªã€ãæ¬çºæã«ããæå æ§
éåäœçµæç©ã«çŽ«å€ç·ãç §å°ãã次ã«æªé²å éšã
çŸå液ã§æº¶è§£é€å»ããããšã«ããã¬ãªãŒãã»ãã¿
ãŒã³ãåŸãã çŸå液ãšããŠã¯ïŒ®âã¡ãã«âïŒâãããªãã³ã
âã¢ã»ãã«âïŒâãããªãã³ãïŒïŒ®âãžã¡ã
ã«ãã«ã ã¢ãããïŒïŒ®âãžã¡ãã«ã¢ã»ãã¢ã
ãããžã¡ãã«ã¹ã«ããã·ãããããµã¡ãã«ãã¹ã
ã«ããªã¢ããããžã¡ãã«ã€ãããŸãªãžãã³ãâ
ãã³ãžã«âïŒâãããªãã³ãâã¢ã»ãã«âεâ
ã«ããã©ã¯ã¿ã ãªã©ã®éãããã³æ§æ¥µæ§æº¶åªãå
ç¬ãããã¯ã¡ã¿ããŒã«ããšã¿ããŒã«ãã€ãœããã
ã«ã¢ã«ã³ãŒã«ããã³ãŒã³ããã«ãšã³ãã·ã¬ã³ãã¡
ãã«ã»ããœã«ããªã©ã®ããªã¢ããé žã®é溶åªãšã®
æ··å液ãšããŠçšããããšãã§ããã çŸåã«ãã€ãŠåœ¢æããã¬ãªãŒãã»ãã¿ãŒã³ã¯æ¬¡
ãã§ãªã³ã¹æ¶²ã«ãã€ãŠæŽæµããçŸå溶åªãé€å»ã
ãããªã³ã¹æ¶²ã«ã¯çŸå液ãšã®æ··åæ§ã®è¯ãããªã¢
ããé žã®é溶åªãçšããããã¡ã¿ããŒã«ããšã¿ã
ãŒã«ãã€ãœãããã«ã¢ã«ã³ãŒã«ããã³ãŒã³ããã«
ãšã³ããã·ã¬ã³ãã¡ãã¬ã³ã»ããœã«ããªã©ã奜é©
ãªäŸãšããŠæããããã äžèšã®åŠçã«ãã€ãŠåŸãããã¬ãªãŒãã»ãã¿ãŒ
ã³ã®ããªãã¯ããªã€ããã®åé§äœã§ããã150â
ãã450âãŸã§ã®ç¯å²ããéžã°ããå ç±æž©åºŠã§åŠ
çããããšã«ããã€ããç°ãä»ã®ç°ç¶åºãæã€è
ç±æ§ããªãã®ã¬ãªãŒãã»ãã¿ãŒã³ãšãªãã 以äžãæ¬çºæãå®æœäŸã«ãã€ãŠèª¬æããã å®æœäŸ ïŒ çªçŽ æ°æµäžã«ïŒïŒïŒãžã¢ãããžããšãã«ãšãŒã
ã«100ïœïŒ0.5ã¢ã«ïŒãâã¡ãã«âïŒâãããªã
ã³1791ïœã«æº¶è§£ããã¢ãã³æº¶æ¶²ã調åããã次
ã«ããã®æº¶æ¶²ãæ°·å·ã«ãã€ãŠçŽ15âã®æž©åºŠã«ä¿ã¡
ãªãããæªæäžã«ããã¡ãªããé žäºç¡æ°Žç©109ïœ
ïŒ0.5ã¢ã«ïŒãå ãããå ãçµã€ãŠããããã«çŽ15
âã§ïŒæéåå¿ãããŠãç²åºŠ60ãã¢ãºïŒ30âïŒã®
ããªã¢ããé ž ã®æº¶æ¶²(A)ãåŸãã äžèšã«ãã€ãŠåŸããã溶液(A)20ïœã«ïŒïŒ®ïŒïŒ®â
ãžã¡ãã«ã¢ããïŒãšãã«ã¡ã¿ã¯ãªã¬ãŒã0.79ïœ
ïŒ0.005ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²âã¢ãžããã³ã¶ã«ïŒ
âïŒâããããã·ã·ã¯ãããµããã³0.74ïœ
ïŒ0.002ã¢ã«ïŒã溶解ãã次ãã§5ÎŒmåã®ãã€ã«ã¿
ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã30å也ç¥ããŠãïŒã
2ÎŒmåã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒã
ã¬ã©ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wã®Xe
âHgç¯ã§çŽ«å€ç·ç §å°ãããåå é¢ã§ã®çŽ«å€ç·åŒ·
床ã¯365nmã®æ³¢é·8mWïŒcm2ã§ãã€ããé²å åŸã
âã¡ãã«âïŒâãããªãã³ïŒå®¹ããšã¿ããŒã«ïŒ
容ããæã混液ã§çŸåãã次ãã§ãšã¿ããŒã«ã§ãª
ã³ã¹ããŠæå°ç·å¹ 2ÎŒmã®ã¬ãªãŒãã»ãã¿ãŒã³ãåŸ
ããæ床ïŒçŸååŸã®èåãåæåã«å¯ŸããŠ1/2ãš
ãªãç §å°éïŒã¯40mJïŒcm2ã§ãããåŸããããã¿
ãŒã³ã400âã60åå ç±ããŠããã¿ãŒã³ã®ãŒãã
ã¯èªããããªãã€ãã å®æœäŸ ïŒ çªçŽ æ°æµäžã«ïŒïŒ4â²âãžã¢ãããžããšãã«ãšãŒ
ãã«90ïœïŒ0.45ã¢ã«ïŒããã¹ïŒïŒâã¢ããããã
ã«ïŒããã©ã¡ãã«ãžã·ãããµã³9.6ïœïŒ0.05ã¢ã«ïŒ
ãâã¡ãã«âïŒâãããªãã³1765ïœã«æº¶è§£ãã
ã¢ãã³æº¶æ¶²ã調åããã次ã«ããã®æº¶æ¶²ãæ°·å·ã«
ãã€ãŠçŽ15âã®æž©åºŠã«ä¿ã¡ãªãããæªæäžã«ãã
ã¡ãªããé žäºç¡æ°Žç©54.5ïœïŒ0.25ã¢ã«ïŒãïŒïŒ3â²ïŒ
ïŒïŒ4â²âãã³ãŸããšãã³ããã©ã«ã«ãã³é žäºæ°Žç©
80.5ïœïŒ0.25ã¢ã«ïŒãå ãããå ãçµããŠããã
ãã«çŽ15âã§ïŒæéåå¿ãããŠç²åºŠ50ãã¢ãºïŒ30
âïŒã®ããªã¢ããé ž
äžããªãç¯å²ã§ã¢ããåºãã¢ããåºãã«ã«ããã·
ã«åºãã¹ã«ãã³é žåºãªã©ã®çœ®æåºãæããŠããŠã
ããã€ãããªãã ãªããäžè¬åŒããã§è¡šããããããªã¢ããé ž
ã§å¥œãŸãããã®ãšããŠã¯ããã¡ãªããé žäºç¡æ°Žç©
ãšïŒïŒ4â²âãžã¢ãããžããšãã«ãšãŒãã«ãããã¡
ãªããé žäºç¡æ°Žç©ããã³ïŒïŒ3â²ïŒïŒïŒ4â²âãã³ãŸ
ããšãã³ããã©ã«ã«ãã³é žäºç¡æ°Žç©ãšïŒïŒ4â²ãžã¢
ãããžããšãã«ãšãŒãã«ãããã¡ãªããé žäºç¡æ°Ž
ç©ããã³ïŒïŒ3â²ïŒïŒïŒ4â²âãã³ãŸããšãã³ããã©
ã«ã«ãã³é žäºç¡æ°Žç©ãšïŒïŒ4â²âãžã¢ãããžããšã
ã«ãšãŒãã«åã³ïŒïŒ3â²ïŒïŒïŒ4â²âãã³ãŸããšãã³
ããã©ã«ã«ãã³é žäºç¡æ°Žç©ãšïŒïŒ4â²âãžã¢ãããž
ããšãã«ãšãŒãã«âïŒâã«ã«ãã¢ãããããã¡ãª
ããé žäºç¡æ°Žç©ããã³ïŒïŒ3â²ïŒïŒïŒ4â²âãã³ãŸã
ãšãã³ããã©ã«ã«ãã³é žäºç¡æ°Žç©ãšïŒïŒ4â²âãžã¢
ãããžããšãã«ãšãŒãã«ããã³ãã¹ïŒïŒâã¢ãã
ãããã«ïŒããã©ã¡ãã«ãžã·ãããµã³ããå°ãã
ãããªã¢ããé žãªã©ãæããããã äžè¬åŒããã§è¡šããããããªã¢ããé žã¯äžèš
ã®ããã«ãéåžžãžã¢ãã³ååç©ã«é žäºç¡æ°Žç©ãã»
ãŒåœã¢ã«éåå¿ãããããšã«ãã€ãŠåŸããããã
ãã®å Žåã«çšããåå¿æº¶åªãšããŠã¯ãåå¿åºè³ªã
ãã³çæããããªã¢ããé žã®æº¶è§£æ§çã®ç¹ããé
ãããã³æ§æ¥µæ§æº¶åªã奜ããçšãããããâã¡
ãã«âïŒâãããªãã³ãïŒïŒ®âãžã¡ãã«ãã«ã
ã¢ãããïŒïŒ®âãžã¡ãã«ã¢ã»ãã¢ããããžã¡ã
ã«ã¹ã«ããã·ããâã¢ã»ãã«âεâã«ããã©ã¯
ã¿ã ããã³ïŒïŒïŒâãžã¡ãã«âïŒâã€ãããŸãªãž
ãã³ãªã©ãå žåçãªäŸãšããŠæããããã äžè¬åŒããã§ç€ºããããã¹ã¢ãžãååç©ãšã
ãŠã¯ ãªã©ã奜é©ãªäŸãšããŠæããããããããã«éå®
ãããªãã äžè¬åŒããã§ç€ºããããã¹ã¢ãžãååç©ã®é
åå²åã¯ãäžè¬åŒããã§è¡šããããç¹°ãåãå
äœãäž»æåãšããããªã100éééšã«å¯ŸããŠ0.1é
ééšä»¥äž100éééšä»¥äžãè¯ããããã«å¥œããã¯
0.5éééšä»¥äž50éééšä»¥äžã§çšããã®ã奜ãŸã
ãããã®ç¯å²ãéžè±ãããšãçŸåæ§ã¯ãã¹ã®ä¿å
å®å®æ§çã«æªåœ±é¿ãåãŒãã äžè¬åŒããã§ç€ºãããã¢ãã³ååç©ãšããŠã¯
ïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒãšãã«ã¢ã¯ãªã¬
ãŒããïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒãšãã«ã¡
ã¿ã¯ãªã¬ãŒããïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒ
ãããã«ã¢ã¯ãªã¬ãŒããïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«
ã¢ããïŒãããã«ã¡ã¿ã¯ãªã¬ãŒããïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒããã«ã¢ã¯ãªã¬ãŒããïŒâ
ïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒããã«ã¡ã¿ã¯ãªã¬ãŒ
ããïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒãã³ãã«ã¢
ã¯ãªã¬ãŒããïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒã
ã³ãã«ã¡ã¿ã¯ãªã¬ãŒããïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«
ã¢ããïŒããã·ã«ã¢ã¯ã¬ãŒããïŒâïŒïŒ®ïŒïŒ®âãž
ã¡ãã«ã¢ããïŒããã·ã«ã¡ã¿ã¯ã¬ã¬ãŒããïŒâ
ïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒãšãã«ã·ã³ãã¡ãŒãã
ïŒâïŒïŒ®ïŒïŒ®âãžã¡ãã«ã¢ããïŒãããã«ã·ã³ã
ã¡ãŒããªã©ã奜é©ãªäŸãšããŠæãããããããã¹
ã¢ãžããããšå¹çè¯ãåå¿ãããã®ã§ããã°è¯
ããããã«éå®ãããªãã ã¢ãã³ååç©ããã®é åå²åã¯äžè¬åŒãã
ã§è¡šããããç¹°ãè¿ãåäœãäž»æåãšããããªã
100éééšã«å¯ŸããŠïŒéééšä»¥äžã400éééšä»¥äž
ã§çšãããã奜ããã¯10éééšä»¥äž400éééšä»¥
äžã§çšããã®ãæãããäžèšç¯å²ãéžè±ãããšã
çŸåæ§ãæçµçæç©ã®ããªã€ããã®è質ã«æªåœ±é¿
ãããããã æ¬çºæã«ããæå æ§éåäœçµæç©ã¯äžèšæ§æå
ãé©åœãªææ©æº¶å€ã«æº¶è§£ãã溶液ç¶æ ã§çšãã
ãããã®å Žåçšãã溶å€ãšããŠã¯æº¶è§£æ§ã®èŠ³ç¹ã
ãéãããã³æ§æ¥µæ§æº¶åªãæãããâã¡ãã«â
ïŒâãããªãã³ãâã¢ã»ãã«âïŒâãããªã
ã³ãâãã³ãžã«âïŒâãããªãã³ãïŒïŒ®âãž
ã¡ãã«ãã«ã ã¢ãããïŒïŒ®âãžã¡ãã«ã¢ã»ãã¢
ããããžã¡ãã«ã¹ã«ããã·ãããããµã¡ãã«ãã¹
ãã«ããªã¢ãããâã¢ã»ãã«âεâã«ããã©ã¯
ã¿ã ããžã¡ãã«ã€ãããŸãªãžãã³ãªã©ãäŸãšããŠ
æããããããããã¯åç¬ã§çšããŠãè¯ãããæ··
åããŠçšããããšãå¯èœã§ããã溶å€ã®éã¯äžè¬
åŒããã§è¡šããããç¹°ãè¿ãåäœãäž»æåãšã
ãããªããäžè¬åŒããã§è¡šãããããã¹ã¢ãžã
ååç©ãäžè¬åŒããã§è¡šããããã¢ãã³ååç©
ã®ç·åã100éééšãšããæãããã«å¯ŸããŠ100é
ééšä»¥äž10000éééšä»¥äžã§çšããã®ãæããã
ããã«å¥œããã¯200éééšä»¥äž5000éééšä»¥äžã§
çšããã®ãæããããã®ç¯å²ãéžè±ãããšæèæ§
ã«åœ±é¿ãåãŒãã äžèšçµæç©ã«ã¯æ床åäžã®ç®çã§é©å®å¢æå€ã
æ·»å ããŠãããã€ãããªãããæ·»å éã¯äžè¬åŒ
ããã§è¡šããããç¹°ãè¿ãåäœãäž»æåãšãã
ããªããäžè¬åŒããã§è¡šãããããã¹ã¢ãžãå
åç©ãã¢ãã³ååç©ã®ç·ééã®0.1éééšä»¥äž10
éééšä»¥äžã§çšããã®ãæããããã®ç¯å²ãéžè±
ãããšçŸåæ§ãæçµçæç©ã®ããªã€ããã®èç±æ§
ã«æªåœ±é¿ãããããã è³éŠæãã¹ã¢ãžãååç©ã®å¢æã«æå¹ãªååç©
ã¯è§ç°ã山岡ãPhot.Sci.Eng.ïŒ17ãïŒ390ïŒ1973ïŒã
ãã«ãã€ãŠè©³ããå ±åãããŠããããªãã§ãã¢ã³
ããã³ãïŒïŒïŒâãã³ãŸã¢ã³ããã³ãã¢ã¯ãªãž
ã³ãã·ã¢ãã¢ã¯ãªãžã³ãããããã¬ã³ãïŒïŒïŒâ
ãžããããã¬ã³ãããã©ã±ãã³ãïŒâãããã¢ã»
ãããã³ãïŒâããããã«ãªã¬ã³ããã¬ã³âïŒïŒ
ïŒâããã³ãïŒâãã«ãªã¬ãã³ãïŒïŒïŒâãã³ãŸ
ã¢ã³ãã©ããã³ãã¢ã³ãã¢ã³ããã³ãïŒâã¯ãã
âïŒïŒïŒâãã³ãºã¢ã³ãã©ããã³ãïŒâããã¢ã
ã³ãºã¢ã³ãã©ããã³ãïŒâã¯ããâïŒïŒïŒâãã¿
ãã€ã«ããã¿ã¬ã³ãªã©ã奜ãŸããã æ¬çºæã®ãã¿ãŒã³åœ¢ææ³ã®å·¥çšã§æå æ§éåäœ
çµæç©ã®å¡èãŸãã¯å ç±ç¡¬ååŸã®ããªã€ãã被è
ãšæ¯æåºæ¿ã®æ¥çæ§ãåäžãããããã«é©å®æ¯æ
åºæ¿ãæ¥çå©å€ã§åŠçããŠãããã€ãããªãã æ¯æåºæ¿ãšããŠã¯ãéå±ãã¬ã©ã¹ãåå°äœãé
å±é žåç©çµ¶çžäœïŒäŸãã°ãTiO2ïŒTa2O5ïŒSiO2
ãªã©ïŒãçªåã±ã€çŽ ãªã©ãäŸãšããŠæããããã æ¬çºæã«ããæå æ§éåäœçµæç©ã¯éåžžã®åŸ®çŽ°
å å·¥æè¡ã§ãã¿ãŒã³å å·¥ãå¯èœã§ãããäžèšæ¯æ
äœãžã®æ¬éåäœçµæç©ã®å¡åžã«ã¯ã¹ãã³ããçšã
ãå転å¡åžã浞挬ãåŽé§å°å·ãªã©ã®æ段ãå¯èœã§
ãããé©å®éžæããããšãã§ãããå¡åžèåã«å¡
åžæ段ãæ¬éåäœçµæç©ã®ã¯ãã¹ã®åºåœ¢åæ¿åºŠã
ç²åºŠçã«ãã€ãŠèª¿ç¯å¯èœã§ããã 瀺æåºæ¿äžã§å¡èãšãªã€ãæ¬çºæã«ããæå æ§
éåäœçµæç©ã«çŽ«å€ç·ãç §å°ãã次ã«æªé²å éšã
çŸå液ã§æº¶è§£é€å»ããããšã«ããã¬ãªãŒãã»ãã¿
ãŒã³ãåŸãã çŸå液ãšããŠã¯ïŒ®âã¡ãã«âïŒâãããªãã³ã
âã¢ã»ãã«âïŒâãããªãã³ãïŒïŒ®âãžã¡ã
ã«ãã«ã ã¢ãããïŒïŒ®âãžã¡ãã«ã¢ã»ãã¢ã
ãããžã¡ãã«ã¹ã«ããã·ãããããµã¡ãã«ãã¹ã
ã«ããªã¢ããããžã¡ãã«ã€ãããŸãªãžãã³ãâ
ãã³ãžã«âïŒâãããªãã³ãâã¢ã»ãã«âεâ
ã«ããã©ã¯ã¿ã ãªã©ã®éãããã³æ§æ¥µæ§æº¶åªãå
ç¬ãããã¯ã¡ã¿ããŒã«ããšã¿ããŒã«ãã€ãœããã
ã«ã¢ã«ã³ãŒã«ããã³ãŒã³ããã«ãšã³ãã·ã¬ã³ãã¡
ãã«ã»ããœã«ããªã©ã®ããªã¢ããé žã®é溶åªãšã®
æ··å液ãšããŠçšããããšãã§ããã çŸåã«ãã€ãŠåœ¢æããã¬ãªãŒãã»ãã¿ãŒã³ã¯æ¬¡
ãã§ãªã³ã¹æ¶²ã«ãã€ãŠæŽæµããçŸå溶åªãé€å»ã
ãããªã³ã¹æ¶²ã«ã¯çŸå液ãšã®æ··åæ§ã®è¯ãããªã¢
ããé žã®é溶åªãçšããããã¡ã¿ããŒã«ããšã¿ã
ãŒã«ãã€ãœãããã«ã¢ã«ã³ãŒã«ããã³ãŒã³ããã«
ãšã³ããã·ã¬ã³ãã¡ãã¬ã³ã»ããœã«ããªã©ã奜é©
ãªäŸãšããŠæããããã äžèšã®åŠçã«ãã€ãŠåŸãããã¬ãªãŒãã»ãã¿ãŒ
ã³ã®ããªãã¯ããªã€ããã®åé§äœã§ããã150â
ãã450âãŸã§ã®ç¯å²ããéžã°ããå ç±æž©åºŠã§åŠ
çããããšã«ããã€ããç°ãä»ã®ç°ç¶åºãæã€è
ç±æ§ããªãã®ã¬ãªãŒãã»ãã¿ãŒã³ãšãªãã 以äžãæ¬çºæãå®æœäŸã«ãã€ãŠèª¬æããã å®æœäŸ ïŒ çªçŽ æ°æµäžã«ïŒïŒïŒãžã¢ãããžããšãã«ãšãŒã
ã«100ïœïŒ0.5ã¢ã«ïŒãâã¡ãã«âïŒâãããªã
ã³1791ïœã«æº¶è§£ããã¢ãã³æº¶æ¶²ã調åããã次
ã«ããã®æº¶æ¶²ãæ°·å·ã«ãã€ãŠçŽ15âã®æž©åºŠã«ä¿ã¡
ãªãããæªæäžã«ããã¡ãªããé žäºç¡æ°Žç©109ïœ
ïŒ0.5ã¢ã«ïŒãå ãããå ãçµã€ãŠããããã«çŽ15
âã§ïŒæéåå¿ãããŠãç²åºŠ60ãã¢ãºïŒ30âïŒã®
ããªã¢ããé ž ã®æº¶æ¶²(A)ãåŸãã äžèšã«ãã€ãŠåŸããã溶液(A)20ïœã«ïŒïŒ®ïŒïŒ®â
ãžã¡ãã«ã¢ããïŒãšãã«ã¡ã¿ã¯ãªã¬ãŒã0.79ïœ
ïŒ0.005ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²âã¢ãžããã³ã¶ã«ïŒ
âïŒâããããã·ã·ã¯ãããµããã³0.74ïœ
ïŒ0.002ã¢ã«ïŒã溶解ãã次ãã§5ÎŒmåã®ãã€ã«ã¿
ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã30å也ç¥ããŠãïŒã
2ÎŒmåã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒã
ã¬ã©ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wã®Xe
âHgç¯ã§çŽ«å€ç·ç §å°ãããåå é¢ã§ã®çŽ«å€ç·åŒ·
床ã¯365nmã®æ³¢é·8mWïŒcm2ã§ãã€ããé²å åŸã
âã¡ãã«âïŒâãããªãã³ïŒå®¹ããšã¿ããŒã«ïŒ
容ããæã混液ã§çŸåãã次ãã§ãšã¿ããŒã«ã§ãª
ã³ã¹ããŠæå°ç·å¹ 2ÎŒmã®ã¬ãªãŒãã»ãã¿ãŒã³ãåŸ
ããæ床ïŒçŸååŸã®èåãåæåã«å¯ŸããŠ1/2ãš
ãªãç §å°éïŒã¯40mJïŒcm2ã§ãããåŸããããã¿
ãŒã³ã400âã60åå ç±ããŠããã¿ãŒã³ã®ãŒãã
ã¯èªããããªãã€ãã å®æœäŸ ïŒ çªçŽ æ°æµäžã«ïŒïŒ4â²âãžã¢ãããžããšãã«ãšãŒ
ãã«90ïœïŒ0.45ã¢ã«ïŒããã¹ïŒïŒâã¢ããããã
ã«ïŒããã©ã¡ãã«ãžã·ãããµã³9.6ïœïŒ0.05ã¢ã«ïŒ
ãâã¡ãã«âïŒâãããªãã³1765ïœã«æº¶è§£ãã
ã¢ãã³æº¶æ¶²ã調åããã次ã«ããã®æº¶æ¶²ãæ°·å·ã«
ãã€ãŠçŽ15âã®æž©åºŠã«ä¿ã¡ãªãããæªæäžã«ãã
ã¡ãªããé žäºç¡æ°Žç©54.5ïœïŒ0.25ã¢ã«ïŒãïŒïŒ3â²ïŒ
ïŒïŒ4â²âãã³ãŸããšãã³ããã©ã«ã«ãã³é žäºæ°Žç©
80.5ïœïŒ0.25ã¢ã«ïŒãå ãããå ãçµããŠããã
ãã«çŽ15âã§ïŒæéåå¿ãããŠç²åºŠ50ãã¢ãºïŒ30
âïŒã®ããªã¢ããé ž
ãåŒãïŒäœãR19ã¯
ãåŒããš
ãåŒãã
ïŒïŒïŒãR20ã¯
ãåŒããš
ãïŒïŒïŒïŒã®æº¶æ¶²(B)ãåŸãã
äžèšã«ãã€ãŠåŸããã溶液(B)20ïœã«ïŒâïŒïŒ®ïŒ
âãžã¡ãã«ã¢ããïŒãšãã«ã¡ã¿ã¯ãªã¬ãŒã1.57
ïœïŒ0.01ã¢ã«ïŒã2.6âãžïŒ4â²âã¢ãžãã·ã³ãããª
ãã³ïŒâïŒâããããã·ã·ã¯ããããµãã³0.42
ïŒ0.001ã¢ã«ïŒã溶解ãã次ãã§5ÎŒmåã®ãã€ã«ã¿
ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã30å也ç¥ããŠ3.3ÎŒmå
ã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©ã¹
補ããªããã¹ã¯ã§å¯ç被èŠãã500Wé«å§æ°Žéç¯
ã§çŽ«å€ç·ç §å°ãã次ãã§ïŒ®âã¡ãã«âïŒâãããª
ãã³ïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæã混液ã§çŸå
ãããšã¿ããŒã«ã§æŽæµããŠæå°ç·å¹ 6ÎŒmã®ã¬ãªãŒ
ãã»ãã¿ãŒã³ãåŸããæ床ã¯35mJïŒcm2ã§ããã
åŸããããã¿ãŒã³ã400âã60åå ç±ããŠããã¿
ãŒã³ã®ãŒããã¯èªããããªãã€ãã圢æããããª
ã€ããèã¯åºæ¿ãšã®å¯çæ§ãåäžããã å®æœäŸ ïŒ çªçŽ æ°æµäžã«ïŒïŒ4â²âãžã¢ãããžããšãã«ãšãŒ
ãã«90ïœïŒ0.45ã¢ã«ïŒãïŒïŒ4â²âãžã¢ãããžããš
ãã«ãšãŒãã«âïŒâã«ã«ãã³ã¢ãã1.14ïœïŒ0.05
ã¢ã«ïŒãâã¡ãã«âïŒâãããªãã³1764ïœã«æº¶
解ããã¢ãã³æº¶æ¶²ã調åããã次ã«ããã®æº¶æ¶²ã
æ°·å·ã«ãã€ãŠçŽ15âã®æž©åºŠã«ä¿ã¡ãªãããæªæäž
ã«ããã¡ãªããé žäºç¡æ°Žç©54.5ïœïŒ0.25ã¢ã«ïŒã
ïŒïŒ3â²ïŒïŒïŒ4â²âãã³ãŸããšãã³ããã©ã«ã«ãã³
é žäºç¡æ°Žç©80.5ïœïŒ0.25ã¢ã«ïŒãå ãããå ãçµ
ããŠãããããã«çŽ15âã§ïŒæéåå¿ãããŠç²åºŠ
55ãã¢ãºïŒ30âïŒã®ããªã¢ããé ž ïŒäœããR17ã¯
âãžã¡ãã«ã¢ããïŒãšãã«ã¡ã¿ã¯ãªã¬ãŒã1.57
ïœïŒ0.01ã¢ã«ïŒã2.6âãžïŒ4â²âã¢ãžãã·ã³ãããª
ãã³ïŒâïŒâããããã·ã·ã¯ããããµãã³0.42
ïŒ0.001ã¢ã«ïŒã溶解ãã次ãã§5ÎŒmåã®ãã€ã«ã¿
ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã30å也ç¥ããŠ3.3ÎŒmå
ã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©ã¹
補ããªããã¹ã¯ã§å¯ç被èŠãã500Wé«å§æ°Žéç¯
ã§çŽ«å€ç·ç §å°ãã次ãã§ïŒ®âã¡ãã«âïŒâãããª
ãã³ïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæã混液ã§çŸå
ãããšã¿ããŒã«ã§æŽæµããŠæå°ç·å¹ 6ÎŒmã®ã¬ãªãŒ
ãã»ãã¿ãŒã³ãåŸããæ床ã¯35mJïŒcm2ã§ããã
åŸããããã¿ãŒã³ã400âã60åå ç±ããŠããã¿
ãŒã³ã®ãŒããã¯èªããããªãã€ãã圢æããããª
ã€ããèã¯åºæ¿ãšã®å¯çæ§ãåäžããã å®æœäŸ ïŒ çªçŽ æ°æµäžã«ïŒïŒ4â²âãžã¢ãããžããšãã«ãšãŒ
ãã«90ïœïŒ0.45ã¢ã«ïŒãïŒïŒ4â²âãžã¢ãããžããš
ãã«ãšãŒãã«âïŒâã«ã«ãã³ã¢ãã1.14ïœïŒ0.05
ã¢ã«ïŒãâã¡ãã«âïŒâãããªãã³1764ïœã«æº¶
解ããã¢ãã³æº¶æ¶²ã調åããã次ã«ããã®æº¶æ¶²ã
æ°·å·ã«ãã€ãŠçŽ15âã®æž©åºŠã«ä¿ã¡ãªãããæªæäž
ã«ããã¡ãªããé žäºç¡æ°Žç©54.5ïœïŒ0.25ã¢ã«ïŒã
ïŒïŒ3â²ïŒïŒïŒ4â²âãã³ãŸããšãã³ããã©ã«ã«ãã³
é žäºç¡æ°Žç©80.5ïœïŒ0.25ã¢ã«ïŒãå ãããå ãçµ
ããŠãããããã«çŽ15âã§ïŒæéåå¿ãããŠç²åºŠ
55ãã¢ãºïŒ30âïŒã®ããªã¢ããé ž ïŒäœããR17ã¯
ãåŒããš
ãåŒããïŒïŒïŒã R18ã¯
ãåŒããš
ãåŒããïŒïŒïŒã®æº¶
液(C)ãåŸãã
äžèšã«ãã€ãŠåŸããã溶液(B)20ïœã«ïŒâïŒïŒ®ïŒ
âãžã¡ãã«ã¢ããïŒãããã«ã¡ã¿ã¯ãªã¬ãŒã
1.71ïœïŒ0.01ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²âã¢ãžããã³
ã¶ã«ïŒâïŒâããããã·ã·ã¯ããããµãã³0.37ïœ
ïŒ0.001ã¢ã«ïŒã溶解ãã次ãã§1ÎŒmåã®ãã€ã«ã¿
ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã§30åé也ç¥ããŠ5.2ÎŒm
åã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©
ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wé«å§æ°Žé
ç¯ïŒåå é¢ã§ã®å 匷床ã¯365nmã®æ³¢é·ã§4mWïŒ
cm2ïŒã§çŽ«å€ç·ç §å°ããŠïŒ®âã¡ãã«âïŒâãããªã
ã³ïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæã混液ã§çŸåãã
次ãã§ãšã¿ããŒã«ã§ãªã³ã¹ããŠæå°ç·å¹ 6ÎŒmã®ã¬
ãªãŒãã»ãã¿ãŒã³ãåŸããæ床ã¯8mJïŒcm2ã§ã
ããåŸããããã¿ãŒã³ã400âã60åå ç±ããŠã
ãã¿ãŒã³ã®ãŒããã¯èªããããªãã€ãã å®æœäŸ ïŒ å®æœäŸïŒã§åŸããã溶液(C)20ïœã«ïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒãããã«ã¡ã¿ã¯ãªã¬ãŒã1.71
ïœïŒ0.01ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²âã¢ãžããã³ã¶
ã«ïŒâïŒâã¡ããã·ã·ã¯ããããµãã³0.39ïœ
ïŒ0.001ã¢ã«ïŒã溶解ãã次ãã§1ÎŒmåã®ãã€ã«ã¿
ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã§30åé也ç¥ããŠ4.9ÎŒm
åã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©
ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wé«å§æ°Žé
ç¯ïŒåå é¢ã§ã®å 匷床ã¯365nmã®æ³¢é·ã§4mWïŒ
cm2ïŒã§çŽ«å€ç·ç §å°ããŠïŒ®âã¡ãã«âïŒâãããªã
ã³ïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæã混液ã§çŸåãã
次ãã§ãšã¿ããŒã«ã§ãªã³ã¹ããŠæå°ç·å¹ 6ÎŒmã®ã¬
ãªãŒãã»ãã¿ãŒã³ãåŸããæ床ã¯15mJïŒcm2ã§ã
ããåŸããããã¿ãŒã³ã400âã«60åéå ç±ããŠ
ããã¿ãŒã³ã®ãŒããã¯èªããããªãã€ãã å®æœäŸ ïŒ å®æœäŸïŒã§åŸããã溶液(C)20ïœã«ïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒãããã«ã¡ã¿ã¯ãªã¬ãŒãã
1.71ïœïŒ0.01ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²ã¢ãžããã³ã¶
ã«ïŒâïŒâã¡ãããŒã«ã·ã¯ããããµãã³0.39ïœ
ïŒ0.001ã¢ã«ïŒã溶解ãã次ãã§1ÎŒmåã®ãã€ã«ã¿
ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã§30åé也ç¥ããŠ5.2ÎŒm
åã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©
ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wé«å§æ°Žé
ç¯ïŒåå é¢ã§ã®å 匷床ã¯365nmã®æ³¢é·ã§4mWïŒ
cm2ïŒã§çŽ«å€ç·ç §å°ããŠïŒ®âã¡ãã«âïŒâãããªã
ã³ïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæã混液ã§çŸåãã
次ãã§ãšã¿ããŒã«ã§ãªã³ã¹ããŠæå°ç·å¹ 6ÎŒmã®ã¬
ãªãŒãã»ãã¿ãŒã³ãåŸããæ床ã¯7mJïŒcm2ã§ã
ããåŸããããã¿ãŒã³ã400âã§60åéå ç±ããŠ
ããã¿ãŒã³ã®ãŒããã¯èªããããªãã€ãã å®æœäŸ ïŒ å®æœäŸïŒã§åŸããã溶液(C)20ïœã«ïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒãããã«ã¡ã¿ã¯ãªã¬ãŒã1.71
ïœïŒ0.01ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²ã¢ãžããã³ã¶ã«ïŒ
âïŒâã«ã«ããã·ã·ã¯ããããµã³0.04ïœïŒ0.001
ã¢ã«ïŒã溶解ãã次ãã§1ÎŒmåã®ãã€ã«ã¿ãçšã
ãŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã§30åé也ç¥ããŠ5.0ÎŒm
åã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©
ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wã®é«å§æ°Ž
éç¯ïŒåå é¢ã§ã®å 匷床ã¯365nmã®æ³¢é·ã§
4mWïŒcm2ïŒã§çŽ«å€ç·ç §å°ããŠïŒ®âã¡ãã«âïŒâ
ãããªãã³ïŒå®¹ãã¡ã¿ããŒã«ïŒå®¹ããæã混液ã§
çŸåãã次ãã§ãšã¿ããŒã«ã§ãªã³ã¹ããŠæå°ç·å¹
5ÎŒmã®ã¬ãªãŒãã»ãã¿ãŒã³ãåŸããæ床ã¯6mJïŒ
cm2ã瀺ããåŸããããã¿ãŒã³ã¯400âã§60åéå
ç±ããŠããã¿ãŒã³ã®ãŒããã¯èªããããªãã€ãã å®æœäŸ ïŒ å®æœäŸïŒã§åŸããã溶液(C)20ïœã«ïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒãããã«ã¡ã¿ã¯ãªã¬ãŒã1.71
ïœïŒ0.01ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²âã¢ãžããã³ã¶
ã«ïŒâïŒâããªã¡ãã«ã·ãªã«ã·ã¯ããããµãã³
0.43ïœïŒ0.001ã¢ã«ïŒã溶解ãã次ãã§1ÎŒmåã®ã
ã€ã«ã¿ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã§30åé也ç¥ããŠ5.3ÎŒm
åã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒããã¬
ã©ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wé«å§æ°Ž
éç¯ïŒåå é¢ã§ã®å 匷床ã¯365nmã®æ³¢é·ã§
4mWïŒcm2ïŒã§çŽ«å€ç·ç §å°ããŠïŒ®âã¡ãã«âïŒâ
ãããªãã³ïŒå®¹ãã¡ã¿ããŒã«ïŒå®¹ããæã混液ã§
çŸåãã次ãã§ãšã¿ããŒã«ã§ãªã³ã¹ããŠæå°ç·å¹
6ÎŒmã®ã¬ãªãŒãã»ãã¿ãŒã³ãåŸããæ床ã¯
10mJïŒcm2ã瀺ããåŸããããã¿ãŒã³ã¯400âã§60
åéå ç±ããŠããã¿ãŒã³ã®ãŒããã¯èªããããªã
ã€ãã å®æœäŸ ïŒ å®æœäŸïŒã§åŸããã溶液(C)20ïœã«ïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒããã«ã¡ã¿ã¯ãªã¬ãŒã1.85ïœ
ïŒ0.01ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²âã¢ãžããã³ã¶ã«ïŒ
âïŒâããããã·ã·ã¯ããããµãã³0.37ïœ
ïŒ0.001ã¢ã«ïŒã溶解ãã次ãã§1ÎŒmåã®ãã€ã«ã¿
ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã«30åé也ç¥ããŠ4.7ÎŒm
åã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©
ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wã®é«å§æ°Ž
éç¯ïŒåå é¢ã§ã®å 匷床ã¯365nmã®æ³¢é·ã§
4mWïŒcm2ïŒã§çŽ«å€ç·ç §å°ããŠïŒ®âã¡ãã«âïŒâ
ãããªãã³ïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæã混液ã§
çŸåãã次ãã§ãšã¿ããŒã«ã§ãªã³ã¹ããŠæå°ç·
5ÎŒmã®ã¬ãªãŒãã»ãã¿ãŒã³ãåŸããæ床ã¯6mJïŒ
cm2ã§ãããåŸããããã¿ãŒã³ã400âã§60åéå
ç±ããŠããã¿ãŒã³ã®ãŒããã¯èªããããªãã€ãã æ¯èŒäŸ ïŒ ããªã¢ããé žãäž»æåãšããããªãã«ååŠç·ã«
ããäºéååã¯éåå¯èœãªççŽ äžççŽ äºéçµåå
ã³ã¢ããåºåã¯ãã®åçŽåå¡©ãæ·»å ããæ¹æ³ã«ã
ãå®éšçµæã以äžã«æ¯èŒäŸãšããŠç€ºãã å®æœäŸïŒã§åŸããã溶液(A)20ïœã«ïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒãšãã«ã¡ã¿ã¯ãªã¬ãŒã1.57ïœ
ïŒ0.01ã¢ã«ïŒã溶解ãã5ÎŒmåã®ãã€ã«ã¿ãçšã
ãŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã30å也ç¥ããŠ3.2ÎŒmå
ã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©ã¹
補ããªããã¹ã¯ã§å¯ç被èŠãã500Wã®é«å§æ°Žé
ç¯ã§çŽ«å€ç·ç §å°ãããé²å åŸãïŒïŒ®âãžã¡ãã«
ã¢ã»ãã¢ããïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæã混液
ã§çŸåãã次ãã§ãšã¿ããŒã«ã§æŽæµããŠã¬ãªãŒ
ãã»ãã¿ãŒã³ãåŸããæ床ã¯3200mJïŒcm2ã§ããã
å®æœäŸïŒãïŒã®ãããã«æ¯ã¹ãŠãäœæ床ã§ãã€
ãã æ¯èŒäŸ ïŒ ããªã¢ããé žã®ã«ã«ããã·ã«åºã«ã¢ããçµåã§
äžé£œåçµåãæããåºïŒããã«åºïŒãå°å ¥ããã
ãã«ãã¹ã¢ãžãååç©ãå ããç³»ããæãæå æ§
èç±éåäœçµæç©ã«ããå®éšçµæã以äžã«æ¯èŒäŸ
ãšããŠç€ºãã æªææ£ãå·åŽç®¡ãå¡©åã«ã«ã·ãŠã 管ãã¬ã¹å°å ¥
管ãåãä»ããäžã€å£ãã©ã¹ã³ã«çªçŽ æ°æµäžïŒïŒ
4â²âãžã¢ãããžããšãã«ãšãŒãã«2.0ïœïŒ0.01ã¢
ã«ïŒãå ¥ããâã¡ãã«âïŒâãããªãã³25ïœã§
溶解ãããã次ã«æº¶åšãæ°·å·ãïŒâ以äžã«ä¿ã¡ãª
ããåŸã ã«ç¡æ°Žããã¡ãªããé ž2.2ïœïŒ0.01ã¢ã«ïŒ
ãå ãå®å šã«æº¶è§£ããåŸå®€æž©ã«ãã©ãïŒæéæªæ
ãããåŸãããããªã溶液ã«ããªãšãã«ã¢ãã³ïŒ
ïœïŒ0.02ã¢ã«ïŒããããµã¯ããã·ã¯ãããªãã¹ã
ã¢ããªã¢ãŒã³7.0ïœïŒ0.02ã¢ã«ïŒãå ã宀枩ã§ïŒ
æéæªæãã次ãã§ã¢ãªã«ã¢ãã³6.8ïœïŒ0.12ã¢
ã«ïŒãå ã宀枩ã§ïŒæéæªæããããã®æº¶æ¶²ã«
ïŒïŒ4â²âãžã¢ãžãã¹ãã«ãã³1.5ïœãå ããŠæå
æ§ããªã¢ããé žã¯ãã¹ã調補ããããã®ã¯ãã¹ã
ã¬ã©ã¹æ¿äžã«å転å¡åžã也ç¥ãçžæš¡æ§ã®ãã¹ã¯ã
çšã500Wã®é«å§æ°Žéç¯ã§é²å ãâã¡ãã«âïŒ
âãããªãã³ã§çŸåãããšã¿ããŒã«ã§ãªã³ã¹ãã
ãšããããã¹ã¯ãããéšåã¯æº¶åªã«æº¶ãããã¹ã¯
ãããªãéšåã¯æº¶åªã«äžæº¶ãšãªã€ãã 解åæ§ã¯å®æœäŸïŒãïŒã«æ¯ã¹ãŠèããäœããåŸ
ãããã¬ãªãŒãã»ãã¿ãŒã³ã®ç«¯é¢ã¯æ³¢æã€ãŠãã
ãã€ã解å床ãæå°ç·å¹ 1000ÎŒmã®ãã¿ãŒã³ãåŸ
ãããã«ãšã©ãŸã€ãã 以äžè¿°ã¹ãããã«æ¬çºæã«ããçµæç©ãçšãã
ããªã€ããã®ãã¿ãŒã³åœ¢ææ³ã«ããã°ãåŸæ¥åé¡
ã®ãã€ãæå æ§è¢«èã®æå æ床ã解åæ§åã³æçµ
çã«åŸãããããªã€ããèã®èç±æ§ãæ©æ¢°ç¹æ§ã
åäžãããããšãå¯èœã«ãªããŸãããããŠæ¬çºæ
ã®æå æ§éåäœçµæç©ãçšããããªã€ããã®ãã¿
ãŒã³åœ¢ææ³ã¯åå°äœã®å€å±€é ç·çšå±€é絶çžèãè
ç±æ§ããªãã¬ãžã¹ããªã©ã«é©çšãããã
âãžã¡ãã«ã¢ããïŒãããã«ã¡ã¿ã¯ãªã¬ãŒã
1.71ïœïŒ0.01ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²âã¢ãžããã³
ã¶ã«ïŒâïŒâããããã·ã·ã¯ããããµãã³0.37ïœ
ïŒ0.001ã¢ã«ïŒã溶解ãã次ãã§1ÎŒmåã®ãã€ã«ã¿
ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã§30åé也ç¥ããŠ5.2ÎŒm
åã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©
ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wé«å§æ°Žé
ç¯ïŒåå é¢ã§ã®å 匷床ã¯365nmã®æ³¢é·ã§4mWïŒ
cm2ïŒã§çŽ«å€ç·ç §å°ããŠïŒ®âã¡ãã«âïŒâãããªã
ã³ïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæã混液ã§çŸåãã
次ãã§ãšã¿ããŒã«ã§ãªã³ã¹ããŠæå°ç·å¹ 6ÎŒmã®ã¬
ãªãŒãã»ãã¿ãŒã³ãåŸããæ床ã¯8mJïŒcm2ã§ã
ããåŸããããã¿ãŒã³ã400âã60åå ç±ããŠã
ãã¿ãŒã³ã®ãŒããã¯èªããããªãã€ãã å®æœäŸ ïŒ å®æœäŸïŒã§åŸããã溶液(C)20ïœã«ïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒãããã«ã¡ã¿ã¯ãªã¬ãŒã1.71
ïœïŒ0.01ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²âã¢ãžããã³ã¶
ã«ïŒâïŒâã¡ããã·ã·ã¯ããããµãã³0.39ïœ
ïŒ0.001ã¢ã«ïŒã溶解ãã次ãã§1ÎŒmåã®ãã€ã«ã¿
ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã§30åé也ç¥ããŠ4.9ÎŒm
åã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©
ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wé«å§æ°Žé
ç¯ïŒåå é¢ã§ã®å 匷床ã¯365nmã®æ³¢é·ã§4mWïŒ
cm2ïŒã§çŽ«å€ç·ç §å°ããŠïŒ®âã¡ãã«âïŒâãããªã
ã³ïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæã混液ã§çŸåãã
次ãã§ãšã¿ããŒã«ã§ãªã³ã¹ããŠæå°ç·å¹ 6ÎŒmã®ã¬
ãªãŒãã»ãã¿ãŒã³ãåŸããæ床ã¯15mJïŒcm2ã§ã
ããåŸããããã¿ãŒã³ã400âã«60åéå ç±ããŠ
ããã¿ãŒã³ã®ãŒããã¯èªããããªãã€ãã å®æœäŸ ïŒ å®æœäŸïŒã§åŸããã溶液(C)20ïœã«ïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒãããã«ã¡ã¿ã¯ãªã¬ãŒãã
1.71ïœïŒ0.01ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²ã¢ãžããã³ã¶
ã«ïŒâïŒâã¡ãããŒã«ã·ã¯ããããµãã³0.39ïœ
ïŒ0.001ã¢ã«ïŒã溶解ãã次ãã§1ÎŒmåã®ãã€ã«ã¿
ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã§30åé也ç¥ããŠ5.2ÎŒm
åã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©
ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wé«å§æ°Žé
ç¯ïŒåå é¢ã§ã®å 匷床ã¯365nmã®æ³¢é·ã§4mWïŒ
cm2ïŒã§çŽ«å€ç·ç §å°ããŠïŒ®âã¡ãã«âïŒâãããªã
ã³ïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæã混液ã§çŸåãã
次ãã§ãšã¿ããŒã«ã§ãªã³ã¹ããŠæå°ç·å¹ 6ÎŒmã®ã¬
ãªãŒãã»ãã¿ãŒã³ãåŸããæ床ã¯7mJïŒcm2ã§ã
ããåŸããããã¿ãŒã³ã400âã§60åéå ç±ããŠ
ããã¿ãŒã³ã®ãŒããã¯èªããããªãã€ãã å®æœäŸ ïŒ å®æœäŸïŒã§åŸããã溶液(C)20ïœã«ïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒãããã«ã¡ã¿ã¯ãªã¬ãŒã1.71
ïœïŒ0.01ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²ã¢ãžããã³ã¶ã«ïŒ
âïŒâã«ã«ããã·ã·ã¯ããããµã³0.04ïœïŒ0.001
ã¢ã«ïŒã溶解ãã次ãã§1ÎŒmåã®ãã€ã«ã¿ãçšã
ãŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã§30åé也ç¥ããŠ5.0ÎŒm
åã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©
ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wã®é«å§æ°Ž
éç¯ïŒåå é¢ã§ã®å 匷床ã¯365nmã®æ³¢é·ã§
4mWïŒcm2ïŒã§çŽ«å€ç·ç §å°ããŠïŒ®âã¡ãã«âïŒâ
ãããªãã³ïŒå®¹ãã¡ã¿ããŒã«ïŒå®¹ããæã混液ã§
çŸåãã次ãã§ãšã¿ããŒã«ã§ãªã³ã¹ããŠæå°ç·å¹
5ÎŒmã®ã¬ãªãŒãã»ãã¿ãŒã³ãåŸããæ床ã¯6mJïŒ
cm2ã瀺ããåŸããããã¿ãŒã³ã¯400âã§60åéå
ç±ããŠããã¿ãŒã³ã®ãŒããã¯èªããããªãã€ãã å®æœäŸ ïŒ å®æœäŸïŒã§åŸããã溶液(C)20ïœã«ïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒãããã«ã¡ã¿ã¯ãªã¬ãŒã1.71
ïœïŒ0.01ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²âã¢ãžããã³ã¶
ã«ïŒâïŒâããªã¡ãã«ã·ãªã«ã·ã¯ããããµãã³
0.43ïœïŒ0.001ã¢ã«ïŒã溶解ãã次ãã§1ÎŒmåã®ã
ã€ã«ã¿ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã§30åé也ç¥ããŠ5.3ÎŒm
åã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒããã¬
ã©ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wé«å§æ°Ž
éç¯ïŒåå é¢ã§ã®å 匷床ã¯365nmã®æ³¢é·ã§
4mWïŒcm2ïŒã§çŽ«å€ç·ç §å°ããŠïŒ®âã¡ãã«âïŒâ
ãããªãã³ïŒå®¹ãã¡ã¿ããŒã«ïŒå®¹ããæã混液ã§
çŸåãã次ãã§ãšã¿ããŒã«ã§ãªã³ã¹ããŠæå°ç·å¹
6ÎŒmã®ã¬ãªãŒãã»ãã¿ãŒã³ãåŸããæ床ã¯
10mJïŒcm2ã瀺ããåŸããããã¿ãŒã³ã¯400âã§60
åéå ç±ããŠããã¿ãŒã³ã®ãŒããã¯èªããããªã
ã€ãã å®æœäŸ ïŒ å®æœäŸïŒã§åŸããã溶液(C)20ïœã«ïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒããã«ã¡ã¿ã¯ãªã¬ãŒã1.85ïœ
ïŒ0.01ã¢ã«ïŒãïŒïŒïŒâãžïŒ4â²âã¢ãžããã³ã¶ã«ïŒ
âïŒâããããã·ã·ã¯ããããµãã³0.37ïœ
ïŒ0.001ã¢ã«ïŒã溶解ãã次ãã§1ÎŒmåã®ãã€ã«ã¿
ãçšããŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã«30åé也ç¥ããŠ4.7ÎŒm
åã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©
ã¹è£œããªããã¹ã¯ã§å¯ç被èŠãã500Wã®é«å§æ°Ž
éç¯ïŒåå é¢ã§ã®å 匷床ã¯365nmã®æ³¢é·ã§
4mWïŒcm2ïŒã§çŽ«å€ç·ç §å°ããŠïŒ®âã¡ãã«âïŒâ
ãããªãã³ïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæã混液ã§
çŸåãã次ãã§ãšã¿ããŒã«ã§ãªã³ã¹ããŠæå°ç·
5ÎŒmã®ã¬ãªãŒãã»ãã¿ãŒã³ãåŸããæ床ã¯6mJïŒ
cm2ã§ãããåŸããããã¿ãŒã³ã400âã§60åéå
ç±ããŠããã¿ãŒã³ã®ãŒããã¯èªããããªãã€ãã æ¯èŒäŸ ïŒ ããªã¢ããé žãäž»æåãšããããªãã«ååŠç·ã«
ããäºéååã¯éåå¯èœãªççŽ äžççŽ äºéçµåå
ã³ã¢ããåºåã¯ãã®åçŽåå¡©ãæ·»å ããæ¹æ³ã«ã
ãå®éšçµæã以äžã«æ¯èŒäŸãšããŠç€ºãã å®æœäŸïŒã§åŸããã溶液(A)20ïœã«ïŒâïŒïŒ®ïŒïŒ®
âãžã¡ãã«ã¢ããïŒãšãã«ã¡ã¿ã¯ãªã¬ãŒã1.57ïœ
ïŒ0.01ã¢ã«ïŒã溶解ãã5ÎŒmåã®ãã€ã«ã¿ãçšã
ãŠå å§ãéããã åŸããã溶液ãã¹ãã³ãã§ã·ãªã³ã³ãŠãšãäžã«
å転å¡åžãã次ãã§70âã30å也ç¥ããŠ3.2ÎŒmå
ã®å¡èãåŸãããã®å¡èãçžæš¡æ§ã®ãœãŒãã¬ã©ã¹
補ããªããã¹ã¯ã§å¯ç被èŠãã500Wã®é«å§æ°Žé
ç¯ã§çŽ«å€ç·ç §å°ãããé²å åŸãïŒïŒ®âãžã¡ãã«
ã¢ã»ãã¢ããïŒå®¹ããšã¿ããŒã«ïŒå®¹ããæã混液
ã§çŸåãã次ãã§ãšã¿ããŒã«ã§æŽæµããŠã¬ãªãŒ
ãã»ãã¿ãŒã³ãåŸããæ床ã¯3200mJïŒcm2ã§ããã
å®æœäŸïŒãïŒã®ãããã«æ¯ã¹ãŠãäœæ床ã§ãã€
ãã æ¯èŒäŸ ïŒ ããªã¢ããé žã®ã«ã«ããã·ã«åºã«ã¢ããçµåã§
äžé£œåçµåãæããåºïŒããã«åºïŒãå°å ¥ããã
ãã«ãã¹ã¢ãžãååç©ãå ããç³»ããæãæå æ§
èç±éåäœçµæç©ã«ããå®éšçµæã以äžã«æ¯èŒäŸ
ãšããŠç€ºãã æªææ£ãå·åŽç®¡ãå¡©åã«ã«ã·ãŠã 管ãã¬ã¹å°å ¥
管ãåãä»ããäžã€å£ãã©ã¹ã³ã«çªçŽ æ°æµäžïŒïŒ
4â²âãžã¢ãããžããšãã«ãšãŒãã«2.0ïœïŒ0.01ã¢
ã«ïŒãå ¥ããâã¡ãã«âïŒâãããªãã³25ïœã§
溶解ãããã次ã«æº¶åšãæ°·å·ãïŒâ以äžã«ä¿ã¡ãª
ããåŸã ã«ç¡æ°Žããã¡ãªããé ž2.2ïœïŒ0.01ã¢ã«ïŒ
ãå ãå®å šã«æº¶è§£ããåŸå®€æž©ã«ãã©ãïŒæéæªæ
ãããåŸãããããªã溶液ã«ããªãšãã«ã¢ãã³ïŒ
ïœïŒ0.02ã¢ã«ïŒããããµã¯ããã·ã¯ãããªãã¹ã
ã¢ããªã¢ãŒã³7.0ïœïŒ0.02ã¢ã«ïŒãå ã宀枩ã§ïŒ
æéæªæãã次ãã§ã¢ãªã«ã¢ãã³6.8ïœïŒ0.12ã¢
ã«ïŒãå ã宀枩ã§ïŒæéæªæããããã®æº¶æ¶²ã«
ïŒïŒ4â²âãžã¢ãžãã¹ãã«ãã³1.5ïœãå ããŠæå
æ§ããªã¢ããé žã¯ãã¹ã調補ããããã®ã¯ãã¹ã
ã¬ã©ã¹æ¿äžã«å転å¡åžã也ç¥ãçžæš¡æ§ã®ãã¹ã¯ã
çšã500Wã®é«å§æ°Žéç¯ã§é²å ãâã¡ãã«âïŒ
âãããªãã³ã§çŸåãããšã¿ããŒã«ã§ãªã³ã¹ãã
ãšããããã¹ã¯ãããéšåã¯æº¶åªã«æº¶ãããã¹ã¯
ãããªãéšåã¯æº¶åªã«äžæº¶ãšãªã€ãã 解åæ§ã¯å®æœäŸïŒãïŒã«æ¯ã¹ãŠèããäœããåŸ
ãããã¬ãªãŒãã»ãã¿ãŒã³ã®ç«¯é¢ã¯æ³¢æã€ãŠãã
ãã€ã解å床ãæå°ç·å¹ 1000ÎŒmã®ãã¿ãŒã³ãåŸ
ãããã«ãšã©ãŸã€ãã 以äžè¿°ã¹ãããã«æ¬çºæã«ããçµæç©ãçšãã
ããªã€ããã®ãã¿ãŒã³åœ¢ææ³ã«ããã°ãåŸæ¥åé¡
ã®ãã€ãæå æ§è¢«èã®æå æ床ã解åæ§åã³æçµ
çã«åŸãããããªã€ããèã®èç±æ§ãæ©æ¢°ç¹æ§ã
åäžãããããšãå¯èœã«ãªããŸãããããŠæ¬çºæ
ã®æå æ§éåäœçµæç©ãçšããããªã€ããã®ãã¿
ãŒã³åœ¢ææ³ã¯åå°äœã®å€å±€é ç·çšå±€é絶çžèãè
ç±æ§ããªãã¬ãžã¹ããªã©ã«é©çšãããã
Claims (1)
- ãç¹èš±è«æ±ã®ç¯å²ã ïŒ (i) äžè¬åŒ ïŒäœããããåŒäžR1ã¯ïŒäŸ¡ãŸãã¯ïŒäŸ¡ã®æ
æ©åºãR2ã¯ïŒäŸ¡ã®ææ©åºãè¡šãããïœã¯ïŒå
ã¯ïŒã§ãããïŒã§è¡šããããç¹°ãè¿ãåäœãäž»
æåãšããããªã100éééšãšã (ii) äžè¬åŒ ïŒäœãããïŒåŒäžïŒžã¯âOHïŒâOR3ïŒâR4
âOHïŒâSiR3 3ïŒâCOOHïŒâCOOR3ïŒâNR2 3ïŒâ
NH2ïŒïŒR3ã¯äœçŽã¢ã«ãã«åºãR4ã¯ã¢ã«ãã¬ã³
ãè¡šããïŒããéžæããåºãè¡šãããïœã¯ïŒãŸ
ãã¯ïŒã§ãããïŒã§è¡šããããè³éŠæãã¹ã¢ãž
ãååç©0.1ã100éééšãšã (iii) äžè¬åŒ ïŒäœããããåŒäžR5ïŒR6ïŒR7ïŒR9ã¯æ°ŽçŽ ã
äœçŽã¢ã«ãã«åºãããšãã«åºãããã«åºã®äžã
ãéžæãããåºãR8ã¯ã¢ã«ãã¬ã³ãè¡šãããïŒ
ã§è¡šããããã¢ãã³ååç©ïŒã400éééšãšã
ãæãçµæç©ã®æº¶æ¶²ãåºæ¿äžã«å¡åžããåŸä¹Ÿç¥
ããŠç®èã圢æãã該被èãææã®ãã¿ãŒã³ã
æãããããã¹ã¯ãä»ããŠæ°Žéç¯ã«ããé²å
ããæŽã«çŸåãå ç±åŠçã«ãã€ãŠèç±æ§ã«åªã
ãããªã€ããã®ãã¿ãŒã³ã圢æããããšãç¹åŸŽ
ãšãããã¿ãŒã³åœ¢ææ³ã ïŒ äžèšçµæç©ã®æº¶æ¶²ã«å¢æå€ãå ããããšãç¹
城ãšããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé èšèŒã®ãã¿ãŒã³åœ¢
ææ³ã
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29534590A JPH03179057A (ja) | 1990-11-02 | 1990-11-02 | ãã¿ãŒã³åœ¢ææ³ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29534590A JPH03179057A (ja) | 1990-11-02 | 1990-11-02 | ãã¿ãŒã³åœ¢ææ³ |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4277982A Division JPS57170929A (en) | 1982-03-19 | 1982-03-19 | Photosensitive polymeric composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03179057A JPH03179057A (ja) | 1991-08-05 |
| JPH0368066B2 true JPH0368066B2 (ja) | 1991-10-25 |
Family
ID=17819412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29534590A Granted JPH03179057A (ja) | 1990-11-02 | 1990-11-02 | ãã¿ãŒã³åœ¢ææ³ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03179057A (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5338033B2 (ja) * | 2006-05-31 | 2013-11-13 | æ±ã¬æ ªåŒäŒç€Ÿ | èç±æ§æš¹èçµæç©ããã³ãããçšããéå±æš¹èè€åäœãªãã³ã«é»åéšå |
-
1990
- 1990-11-02 JP JP29534590A patent/JPH03179057A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03179057A (ja) | 1991-08-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0065352B1 (en) | Light-sensitive polymer composition | |
| TW200428153A (en) | Novel photosensitive resin compositions | |
| US20020048726A1 (en) | Photosensitive polyimide precursor and its use for pattern formation | |
| JPH0336861B2 (ja) | ||
| JPS63318549A (ja) | èç±æå æ§éåäœçµæç© | |
| JPS60135457A (ja) | æå æ§éåäœçµæç© | |
| JPH11153866A (ja) | æå æ§çµæç© | |
| JP2000273172A (ja) | ããªã¢ããé žãšã¹ãã«ããã®è£œé æ³ãæå æ§æš¹èçµæç©ããããçšãããã¿ãŒã³è£œé æ³åã³é»åéšå | |
| JPH0658534B2 (ja) | ååŠç·æå¿æ§éåäœçµæç© | |
| JPH03179354A (ja) | ååŠç·æå¿æ§éåäœçµæç© | |
| US5851736A (en) | Heat-resistant photoresist composition, photosensitive substrate, and process for forming heat-resistant positive or negative pattern | |
| JPH0368066B2 (ja) | ||
| JPH01283554A (ja) | èç±æå æ§éåäœçµæç© | |
| JPH0337652A (ja) | ååŠç·æå¿æ§éåäœçµæç© | |
| JP2559720B2 (ja) | æå æ§éåäœçµæç© | |
| JPS6337823B2 (ja) | ||
| JPH0488347A (ja) | ååŠç·æå¿æ§éåäœçµæç© | |
| JPH0339357A (ja) | ååŠç·æå¿æ§éåäœçµæç© | |
| JP2890491B2 (ja) | ååŠç·æå¿æ§éåäœçµæç© | |
| JPH0149929B2 (ja) | ||
| JPS63256663A (ja) | æå æ§ããªã€ããçµæç© | |
| JPH08137105A (ja) | æå æ§æš¹èçµæç©ããã³ãã¿ãŒã³ã®è£œé æ³ | |
| JPH01216345A (ja) | æå æ§æš¹èçµæç© | |
| JPS58143341A (ja) | æå æ§éåäœçµæç© | |
| JP3339134B2 (ja) | ååŠç·æå¿æ§éåäœçµæç© |