JPH0377435U - - Google Patents

Info

Publication number
JPH0377435U
JPH0377435U JP13898689U JP13898689U JPH0377435U JP H0377435 U JPH0377435 U JP H0377435U JP 13898689 U JP13898689 U JP 13898689U JP 13898689 U JP13898689 U JP 13898689U JP H0377435 U JPH0377435 U JP H0377435U
Authority
JP
Japan
Prior art keywords
heat treatment
boat
operating rod
core tube
furnace core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13898689U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13898689U priority Critical patent/JPH0377435U/ja
Publication of JPH0377435U publication Critical patent/JPH0377435U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例に係る熱処理用治具
の一部を破断した斜視図、第２図は第１図の−
線に沿つた断面図、第３図は及び第４図は何れ
も同実施例の熱処理用治具の使用例を示す熱処理
装置の断面図、第５図は従来の熱処理用治具の使
用例を示す熱処理装置の断面図である。 １……半導体ウエハ、３……熱処理用ボート、
１０……炉芯管、１４……ガス出口、２０……熱
処理用治具、２１……ボート操作棒、２２……内
蓋、３０……位置決め手段。

Claims (1)

  1. 【実用新案登録請求の範囲】 半導体ウエハが搭載された熱処理用ボートを炉
    芯管内に出し入れするボート操作棒と、熱処理時
    に前記熱処理用ボートと炉芯管のガス出口間を仕
    切る内蓋とよりなる熱処理用治具であつて、 上記ボート操作棒に上記内蓋を位置決め手段を
    介して取付け、該内蓋をボート操作棒に対して移
    動自在としたことを特徴とする熱処理治具。
JP13898689U 1989-11-30 1989-11-30 Pending JPH0377435U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13898689U JPH0377435U (ja) 1989-11-30 1989-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13898689U JPH0377435U (ja) 1989-11-30 1989-11-30

Publications (1)

Publication Number Publication Date
JPH0377435U true JPH0377435U (ja) 1991-08-05

Family

ID=31686059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13898689U Pending JPH0377435U (ja) 1989-11-30 1989-11-30

Country Status (1)

Country Link
JP (1) JPH0377435U (ja)

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