JPH0416021B2 - - Google Patents
Info
- Publication number
- JPH0416021B2 JPH0416021B2 JP7573285A JP7573285A JPH0416021B2 JP H0416021 B2 JPH0416021 B2 JP H0416021B2 JP 7573285 A JP7573285 A JP 7573285A JP 7573285 A JP7573285 A JP 7573285A JP H0416021 B2 JPH0416021 B2 JP H0416021B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- conductor
- wiring
- pattern
- wiring conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010410 layer Substances 0.000 claims description 84
- 239000004020 conductor Substances 0.000 claims description 73
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000011229 interlayer Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7573285A JPS61234052A (ja) | 1985-04-10 | 1985-04-10 | 半導体集積回路装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7573285A JPS61234052A (ja) | 1985-04-10 | 1985-04-10 | 半導体集積回路装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61234052A JPS61234052A (ja) | 1986-10-18 |
| JPH0416021B2 true JPH0416021B2 (de) | 1992-03-19 |
Family
ID=13584734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7573285A Granted JPS61234052A (ja) | 1985-04-10 | 1985-04-10 | 半導体集積回路装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61234052A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02192146A (ja) * | 1989-01-20 | 1990-07-27 | Toshiba Corp | 半導体装置 |
| JPH05283467A (ja) * | 1992-03-30 | 1993-10-29 | Nec Corp | 半導体集積回路装置 |
-
1985
- 1985-04-10 JP JP7573285A patent/JPS61234052A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61234052A (ja) | 1986-10-18 |
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