JPH04173617A - 搬送装置 - Google Patents

搬送装置

Info

Publication number
JPH04173617A
JPH04173617A JP30069890A JP30069890A JPH04173617A JP H04173617 A JPH04173617 A JP H04173617A JP 30069890 A JP30069890 A JP 30069890A JP 30069890 A JP30069890 A JP 30069890A JP H04173617 A JPH04173617 A JP H04173617A
Authority
JP
Japan
Prior art keywords
sub
transportation
path
transport
conveyance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30069890A
Other languages
English (en)
Japanese (ja)
Inventor
Takeshi Tsuboi
健 坪井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu VLSI Ltd
Fujitsu Ltd
Original Assignee
Fujitsu VLSI Ltd
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu VLSI Ltd, Fujitsu Ltd filed Critical Fujitsu VLSI Ltd
Priority to JP30069890A priority Critical patent/JPH04173617A/ja
Priority to CA002054859A priority patent/CA2054859C/fr
Publication of JPH04173617A publication Critical patent/JPH04173617A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
  • Superheterodyne Receivers (AREA)
  • Radio Relay Systems (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP30069890A 1990-11-05 1990-11-06 搬送装置 Pending JPH04173617A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP30069890A JPH04173617A (ja) 1990-11-06 1990-11-06 搬送装置
CA002054859A CA2054859C (fr) 1990-11-05 1991-11-04 Convertisseur abaisseur pour systeme de communication a satellite

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30069890A JPH04173617A (ja) 1990-11-06 1990-11-06 搬送装置

Publications (1)

Publication Number Publication Date
JPH04173617A true JPH04173617A (ja) 1992-06-22

Family

ID=17888008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30069890A Pending JPH04173617A (ja) 1990-11-05 1990-11-06 搬送装置

Country Status (2)

Country Link
JP (1) JPH04173617A (fr)
CA (1) CA2054859C (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010058942A (ja) * 2008-09-05 2010-03-18 Murata Machinery Ltd 搬送システム
JP2022031031A (ja) * 2020-08-07 2022-02-18 株式会社京都製作所 物品の搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010058942A (ja) * 2008-09-05 2010-03-18 Murata Machinery Ltd 搬送システム
JP2022031031A (ja) * 2020-08-07 2022-02-18 株式会社京都製作所 物品の搬送装置

Also Published As

Publication number Publication date
CA2054859A1 (fr) 1992-05-06
CA2054859C (fr) 1995-10-10

Similar Documents

Publication Publication Date Title
US6308818B1 (en) Transport system with integrated transport carrier and directors
US6494308B2 (en) Integrated roller transport pod and asynchronous conveyor
JP5316907B2 (ja) 物品搬送設備
US20020033319A1 (en) Carrying system
JPH05181527A (ja) 自動搬送装置
JPH0271950A (ja) 加工物搬送装置
KR20160064199A (ko) 컨베이어 장치
JP4858673B2 (ja) 懸垂式昇降搬送台車の搬送システム
JP2005029319A (ja) 搬送システム
JPH06298321A (ja) 自在搬送装置
JPH04173617A (ja) 搬送装置
JPH0423727A (ja) 搬送装置
JP2007039237A (ja) 磁性ベルト駆動式軌道搬送方法及び装置
JP2013136447A (ja) 搬送装置
JP2000247406A (ja) コンベアー及び自動倉庫
CN208345232U (zh) 循环输送线
JP2007287877A (ja) 搬送システム
KR20220144046A (ko) 기판 이송 장치 및 기판 이송 방법
WO2022138049A1 (fr) Installation de stockage d'articles
JP4154269B2 (ja) 製造設備の搬送システム
JPS60229347A (ja) クリーンルーム用搬送システム
JPS6374806A (ja) 小型ユニツト倉庫
JPS6290945A (ja) ウエハの搬送方法
JPS60171921A (ja) 分岐路における物品の振り分け装置
JPH0829803B2 (ja) ループ式搬送システム