JPH0418377B2 - - Google Patents

Info

Publication number
JPH0418377B2
JPH0418377B2 JP60211660A JP21166085A JPH0418377B2 JP H0418377 B2 JPH0418377 B2 JP H0418377B2 JP 60211660 A JP60211660 A JP 60211660A JP 21166085 A JP21166085 A JP 21166085A JP H0418377 B2 JPH0418377 B2 JP H0418377B2
Authority
JP
Japan
Prior art keywords
film
optical memory
memory element
silicon nitride
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60211660A
Other languages
English (en)
Other versions
JPS6271042A (ja
Inventor
Yoshiteru Murakami
Akira Takahashi
Yoshikazu Fujii
Hiroyuki Katayama
Kenji Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP60211660A priority Critical patent/JPS6271042A/ja
Priority to CA000517495A priority patent/CA1264852A/en
Priority to US06/908,716 priority patent/US4792474A/en
Priority to EP86307305A priority patent/EP0216634B1/en
Priority to DE8686307305T priority patent/DE3669605D1/de
Publication of JPS6271042A publication Critical patent/JPS6271042A/ja
Publication of JPH0418377B2 publication Critical patent/JPH0418377B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B7/2578—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
    • G11B11/10586—Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/254—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of protective topcoat layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24306—Metals or metalloids transition metal elements of groups 3-10
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25708—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 13 elements (B, Al, Ga)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/2571—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 14 elements except carbon (Si, Ge, Sn, Pb)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25713—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing nitrogen
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2531—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146—Laser beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Description

【発明の詳細な説明】 〈技術分野〉 本発明はレーザ等の光により情報の記録、再
生、消去等を行なう光メモリ素子に関するもので
ある。
〈従来技術〉 近年、光メモリ素子は高密度、大容量なメモリ
となる為、多方面で種々の研究開発が行なわれて
いる。特に使用者が情報の追加記録をなし得るメ
モリ、あるいは使用者が情報の追加記録及び消去
をなし得るメモリは巾広に応用分野があり、種々
の材料やシステムが発表されている。前者のメモ
リの材料としてはTeOx，TeSe，TeC等があり、
後者のメモリの材料としてはGdTbFe，
GdTbDyFe，TbFeCo等の希土類遷移金属合金薄
膜等がある。しかし、これら情報の追加記録がで
きるメモリ、あるいは情報の追加記録及び消去が
できるメモリの基本となる記録媒体材料は酸化等
の耐食性に欠ける為、その対策としてメモリ素子
の構造には色々な工夫がなされている。たとえば
追加記録をなし得るメモリとして用いられる記録
材料を用いた場合には第８図に示す様に透明基板
１上に真空蒸着やスパツタリング等の製膜手段に
より記録媒体膜２を設け、該記録媒体膜２を酸化
等の腐食から保護する目的で保護層３を設けたも
のがある。また情報の追加記録及び消去ができる
メモリとして用いられる希土類遷移金属合金薄膜
の場合には、たとえば第９図に示す様に透明基板
１上に保護層３と、希土類遷移金属合金薄膜２
と、保護層４とをこの順にて積層したもの、ある
いは更に反射層５を第４番号の層として付加した
もの（第１０図参照）がある。しかし前述の如き
保護層を設ける素子構成を用いても酸化等の腐食
を防止できるとは限らない。
以下に使用者が情報の追加記録及び消去をなし
得る光メモリ素子である磁気光学記憶素子の酸化
の問題について例を挙げて説明する。
第１１図は本発明者等が調査を行つた磁気光学
記憶素子の一部側面断面図である。６はガラス基
板であり、該ガラス基板６上に第１の透明誘電体
保護膜であるSiO膜７（膜厚120nm）が形成さ
れ、該SiO膜７上に希土類遷移金属合金薄膜であ
るGdTbF合金薄膜８（膜厚15nm）が形成され、
該GdTbFe合金薄膜８上に第２の透明誘電体保護
膜であるSiO2膜９（膜厚50nm）が形成され、該
SiO2膜９上に反射膜であるCu膜１０（膜厚
50nm）が形成されている。この磁気光学記憶素
子を高温高湿テストにかけたところ、GdTbFe合
金薄膜８が酸化されるという問題が発生した。本
発明者等はこの原因が上記SiO膜７及びSiO2膜９
中に含まれる酸素にあることを確認した。即ち上
記SiO膜７及びSiO2膜９の成膜時、あるいは成膜
後に内部の酸素成分が分離等してGdTbFe合金薄
膜８が酸化されるものである。しかるに、希土類
遷移金属合金薄膜８は酸化されることによつて磁
気記録媒体としての能力を著しく阻害されるもの
であるから、上記酸化の問題は極めて重大であ
る。又、上記希土類遷移金属合金薄膜８の膜厚が
薄い場合は僅かの酸化であつても影響が大きいの
で非常に注意が必要である。よつて、この場合上
記希土類遷移金属合金薄膜８を保護する保護膜と
しては窒化アルミニウム等の酸素を含まないもの
が良い事を既に本出願人は提案している（特願昭
57−220999）。しかしこの窒化アルミニウムは熱
伝導率が高いため記録の際に高いレーザパワーが
必要となる。言い換えれば記録感度の低い光メモ
リ素子となることが欠点である。
〈発明の目的〉 本発明は上記の点に鑑み、酸素等による記録媒
体の酸化に対し信頼性を高め且つ記録感度を向上
せしめる光メモリ素子を提供することを目的とし
てなされたものであり、この目的を達成するため
光メモリ素子の一部に窒化アルミニウムシリコン
を用いたものである。
〈発明の実施例〉 以下、本発明に係る光メモリ素子の一実施例に
ついて図面を用いて詳細に説明する。
第１図は本発明に係る光メモリ素子の一実施例
の構造を示す一部側面断面図である。１はガラ
ス、ポリカーボネート、アクリル等の透明基板で
あり、該透明基板１上に第１の透明誘電体膜であ
る窒化アルミニウムシリコン膜１１が形成され、
該窒化アルミニウムシリコン膜１１上に希土類遷
移金属合金薄膜１２（たとえばGdTbFe，
GdTbDyFe，TbFeCo等）が形成され、該希土類
遷移金属合金薄膜１２上に第２の透明誘電体膜で
ある窒化アルミニウムシリコン膜１３が形成さ
れ、該窒化アルミニウムシリコン膜１３上にCu，
Ag，Al等の反射膜１４が形成される。この構造
の有利な点について以下説明する。
窒化アルミニウムシリコン膜は極めて定であ
り、窒化物であるため酸化物の膜に比較して緻
密な膜が形成できる。
窒化アルミニウムシリコンはその成分として
酸素を含有しないので記録媒体膜が酸化される
危険性を極度に減少せしめ得る。
窒化アルミニウムシリコンは上記，を満
足する耐湿耐酸素性膜として有用な窒化アルミ
ニウムに比べ熱伝導率が低く、記録媒体への記
録感度を向上せしめる効果をもたらす。第２図
はこの効果を調べる為に行つた実験結果を示す
もので、第１図に構成を示した光メモリ素子に
おいて、第１，第２図の誘電体膜である窒化ア
ルミニウムシリコン膜のシリコン組成（wt％）
を０〜８％の範囲で変化させ記録感度の変化を
見たものである。記録感度は一定パワーで記録
した時のビツトの大きさで判断した。第２図か
ら明らかなように誘電体膜として窒化アルミニ
ウムを用いたときよりも窒化アルミニウムシリ
コン膜を用いた方が記録感度が向上している。
本発明は、記録媒体の保護膜及び記録感度上昇
用膜として窒化アルミニウムシリコンを用いたも
のであるが記録材料の種類は問わず、光メモリ素
子の構成としては少なくとも一層に窒化アルミニ
ウムシリコンを用いていればそれ以外については
いかなる構成でも良い。即ち、第３図に示すよう
に透明基板１上に記録媒体膜２、窒化アルミニウ
ムシリコン膜１５をこの順に積層したもの、又第
４図に示すように透明基板１上に記録媒体膜２、
窒化アルミニウムシリコン膜１５、反射膜１４を
この順に積層したもの、又第５図に示すように透
明基板１上に窒化アルミニウムシリコン膜１５、
記録媒体膜２、反射膜１４をこの順に積層したも
の、又第６図に示すように透明基板１上に第１の
誘電体膜１６、記録媒体膜２、第２の誘電体膜１
７をこの順に積層したものにおいて、上記第１、
第２の誘電体膜の少なくとも一方が窒化アルミニ
ウムシリコンで形成されたもの、又、第７図に示
すように透明基板１上に第１の誘電体膜１６、記
録媒体膜２、第２の誘電体膜１７、反射膜１４を
この順に積層したものにおいて上記第１、第２の
誘電体膜の少なくとも一方が窒化アルミニウムシ
リコンで形成されたもの等の構成が適用可能であ
る。
〈発明の効果〉 以上のように本発明によれば記録媒体の耐酸化
性及び情報の記録再生特性を共に良好に確保せし
めることができるものである。
【図面の簡単な説明】
第１図は本発明に係る光メモリ素子の一実施例
の構成を示す一部側面断面図、第２図は測定グラ
フ図、第３図、第４図、第５図、第６図、第７図
は本発明に係る光メモリ素子の他の実施例の構成
を示す一部側面断面図、第８図は、従来の光メモ
リ素子の一例を示す一部側面断面図、第９図、第
１０図は光磁気メモリ素子の一例を示す一部側面
断面図、第１１図は従来の光メモリ素子の一部側
面断面図である。 図中、１：透明基板、２：記録媒体膜、３，
４：保護膜、５：反射膜、６：ガラス基板、７：
SiO膜、８：GdTbFe合金薄膜、９：SiO2膜、１
０：Cu膜、１１：第１の窒化アルミニウムシリ
コン膜、１２：希土類遷移金属合金薄膜、１３：
第２の窒化アルミニウムシリコン膜、１４：反射
膜、１５：窒化アルミニウムシリコン膜、１６：
第１の誘電体膜、１７：第２の誘電体膜。

Claims (1)

  1. 【特許請求の範囲】 １ 光メモリ素子の基板上に記録媒体膜と、シリ
    コン組成（Wt％）が０より大きく８％以下であ
    る窒化アルミニウムシリコン膜とを積層したこと
    を特徴とする光メモリ素子。 ２ 光メモリ素子の基板上に記録媒体膜と、窒化
    アルミニウムシリコン膜とこの順にて積層したこ
    とを特徴とする光メモリ素子。 ３ 光メモリ素子の基板上に第１の窒化アルミニ
    ウムシリコン膜と記録媒体膜と第２の窒化アルミ
    ニウムシリコン膜とをこの順にて積層したことを
    特徴とする光メモリ素子。
JP60211660A 1985-09-24 1985-09-24 光メモリ素子 Granted JPS6271042A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60211660A JPS6271042A (ja) 1985-09-24 1985-09-24 光メモリ素子
CA000517495A CA1264852A (en) 1985-09-24 1986-09-04 Optical memory element
US06/908,716 US4792474A (en) 1985-09-24 1986-09-18 Optical memory element
EP86307305A EP0216634B1 (en) 1985-09-24 1986-09-23 Optical memory element
DE8686307305T DE3669605D1 (de) 1985-09-24 1986-09-23 Optisches speicherelement.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60211660A JPS6271042A (ja) 1985-09-24 1985-09-24 光メモリ素子

Publications (2)

Publication Number Publication Date
JPS6271042A JPS6271042A (ja) 1987-04-01
JPH0418377B2 true JPH0418377B2 (ja) 1992-03-27

Family

ID=16609477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60211660A Granted JPS6271042A (ja) 1985-09-24 1985-09-24 光メモリ素子

Country Status (5)

Country Link
US (1) US4792474A (ja)
EP (1) EP0216634B1 (ja)
JP (1) JPS6271042A (ja)
CA (1) CA1264852A (ja)
DE (1) DE3669605D1 (ja)

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DE3778389D1 (de) * 1986-02-05 1992-05-27 Oki Electric Ind Co Ltd Magnetisch-optisches gedaechtnismedium.
JP2579465B2 (ja) * 1986-06-10 1997-02-05 セイコーエプソン株式会社 光磁気記録媒体の製造方法
NL8702493A (nl) * 1986-10-31 1988-05-16 Seiko Epson Corp Optisch opnamemedium en werkwijze voor het vervaardigen daarvan.
JPS63311642A (ja) * 1987-06-12 1988-12-20 Sharp Corp 光メモリ素子
DE3803014A1 (de) * 1988-02-02 1989-08-10 Basf Ag Verfahren zur herstellung einer duennen roentgenamorphen aluminiumnitrid- oder aluminiumsiliciumnitrid-schicht auf einer oberflaeche
DE3802998A1 (de) * 1988-02-02 1989-08-10 Basf Ag Verfahren zur herstellung einer duennen roentgenamorphen aluminiumnitrid- oder aluminiumsiliciumnitridschicht auf einer oberflaeche
JPH0296952A (ja) * 1988-06-28 1990-04-09 Sharp Corp 光学記憶素子
JPH0264944A (ja) * 1988-08-30 1990-03-05 Mitsubishi Electric Corp 光磁気記録媒体
JPH02254648A (ja) * 1989-03-28 1990-10-15 Seiko Epson Corp 光磁気ディスク
JP2654689B2 (ja) * 1989-05-16 1997-09-17 富士写真フイルム株式会社 光磁気記録媒体
US5156909A (en) * 1989-11-28 1992-10-20 Battelle Memorial Institute Thick, low-stress films, and coated substrates formed therefrom, and methods for making same
US5514468A (en) * 1991-04-17 1996-05-07 Shin-Etsu Chemical Co., Ltd. Magneto-optical recording medium
CA2083865C (en) * 1991-12-04 1998-09-29 Masahiko Sekiya Substrate for optical recording medium and magneto-optical recording medium using same
US5587216A (en) * 1992-10-16 1996-12-24 Matsushita Electric Industrial Co., Ltd. Optical recording medium
EP0598377B1 (en) * 1992-11-17 1999-09-22 Mitsubishi Chemical Corporation Magneto-optical recording medium and optical information recording and reading-out method
US7613869B2 (en) * 2006-11-27 2009-11-03 Brigham Young University Long-term digital data storage
WO2010151856A2 (en) 2009-06-26 2010-12-29 Cornell University Chemical vapor deposition process for aluminum silicon nitride
WO2010151857A2 (en) 2009-06-26 2010-12-29 Cornell University Method for forming iii-v semiconductor structures including aluminum-silicon nitride passivation

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FR2437668A1 (fr) * 1978-09-29 1980-04-25 Thomson Csf Disque optique protege
DE3039821A1 (de) * 1980-10-22 1982-06-03 Robert Bosch Gmbh, 7000 Stuttgart Mehrschichtsystem fuer waermeschutzanwendung
JPS5933320B2 (ja) * 1981-04-03 1984-08-15 株式会社東芝 光学的情報記録媒体
IL63802A (en) * 1981-09-11 1984-10-31 Iscar Ltd Sintered hard metal products having a multi-layer wear-resistant coating
JPS599094A (ja) * 1982-07-09 1984-01-18 Asahi Chem Ind Co Ltd 情報記録用部材
US4510593A (en) * 1982-10-18 1985-04-09 Minnesota Mining And Manufacturing Company Information disk of grooved, metal-coated crosslinked polymeric layer
JPH0613238B2 (ja) * 1982-11-08 1994-02-23 株式会社リコー 光学的情報記録媒体
NL8301072A (nl) * 1983-03-28 1984-10-16 Philips Nv Optische registratieschijf.
JPS59227049A (ja) * 1983-06-07 1984-12-20 Fuji Photo Film Co Ltd 情報記録媒体
US4619865A (en) * 1984-07-02 1986-10-28 Energy Conversion Devices, Inc. Multilayer coating and method
US4777068A (en) * 1984-08-10 1988-10-11 Canon Kabushiki Kaisha Optical recording medium
JPS6231052A (ja) * 1985-04-25 1987-02-10 Seiko Epson Corp 光記録媒体

Also Published As

Publication number Publication date
US4792474A (en) 1988-12-20
EP0216634B1 (en) 1990-03-14
EP0216634A1 (en) 1987-04-01
CA1264852A (en) 1990-01-23
JPS6271042A (ja) 1987-04-01
DE3669605D1 (de) 1990-04-19

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