JPH042022U - - Google Patents
Info
- Publication number
- JPH042022U JPH042022U JP4259390U JP4259390U JPH042022U JP H042022 U JPH042022 U JP H042022U JP 4259390 U JP4259390 U JP 4259390U JP 4259390 U JP4259390 U JP 4259390U JP H042022 U JPH042022 U JP H042022U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- predetermined intervals
- manufacturing jig
- semiconductor manufacturing
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は本考案に係る半導体製造治具の斜視図
、第２図は同じく平面図である。第３図は従来の
半導体製造治具の斜視図、第４図は同じく縦断側
面図である。 ５……半導体ウエーハ、５ａ……底部、５ｂ…
…側部、７……ロツド、９……凹凸部、１０……
突起。
、第２図は同じく平面図である。第３図は従来の
半導体製造治具の斜視図、第４図は同じく縦断側
面図である。 ５……半導体ウエーハ、５ａ……底部、５ｂ…
…側部、７……ロツド、９……凹凸部、１０……
突起。
Claims (1)
- 【実用新案登録請求の範囲】 多数の半導体ウエーハを、所定間隔で鉛直姿勢
に整列保持する半導体製造治具であつて、 半導体ウエーハの底部及び両側部を支承する３
本のロツドの両端部を連結支持し、前記３本のロ
ツドの半導体ウエーハとの当接面に凹凸部を所定
間隔に形成したことを特徴とする半導体製造治具
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4259390U JPH042022U (ja) | 1990-04-20 | 1990-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4259390U JPH042022U (ja) | 1990-04-20 | 1990-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH042022U true JPH042022U (ja) | 1992-01-09 |
Family
ID=31554271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4259390U Pending JPH042022U (ja) | 1990-04-20 | 1990-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH042022U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS647205U (ja) * | 1987-06-30 | 1989-01-17 |
-
1990
- 1990-04-20 JP JP4259390U patent/JPH042022U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS647205U (ja) * | 1987-06-30 | 1989-01-17 |