JPH043101B2 - - Google Patents

Info

Publication number
JPH043101B2
JPH043101B2 JP60262757A JP26275785A JPH043101B2 JP H043101 B2 JPH043101 B2 JP H043101B2 JP 60262757 A JP60262757 A JP 60262757A JP 26275785 A JP26275785 A JP 26275785A JP H043101 B2 JPH043101 B2 JP H043101B2
Authority
JP
Japan
Prior art keywords
chamber
slider
crystal growth
saturated
melt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60262757A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62130517A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP60262757A priority Critical patent/JPS62130517A/ja
Publication of JPS62130517A publication Critical patent/JPS62130517A/ja
Publication of JPH043101B2 publication Critical patent/JPH043101B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP60262757A 1985-11-22 1985-11-22 液相エピタキシヤル成長装置 Granted JPS62130517A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60262757A JPS62130517A (ja) 1985-11-22 1985-11-22 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60262757A JPS62130517A (ja) 1985-11-22 1985-11-22 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS62130517A JPS62130517A (ja) 1987-06-12
JPH043101B2 true JPH043101B2 (lt) 1992-01-22

Family

ID=17380165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60262757A Granted JPS62130517A (ja) 1985-11-22 1985-11-22 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS62130517A (lt)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130046346A (ko) * 2011-10-27 2013-05-07 코웨이 주식회사 제습장치의 열교환기 건조방법 및 이를 이용하는 제습장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130046346A (ko) * 2011-10-27 2013-05-07 코웨이 주식회사 제습장치의 열교환기 건조방법 및 이를 이용하는 제습장치

Also Published As

Publication number Publication date
JPS62130517A (ja) 1987-06-12

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