JPH0443850U - - Google Patents
Info
- Publication number
- JPH0443850U JPH0443850U JP8691690U JP8691690U JPH0443850U JP H0443850 U JPH0443850 U JP H0443850U JP 8691690 U JP8691690 U JP 8691690U JP 8691690 U JP8691690 U JP 8691690U JP H0443850 U JPH0443850 U JP H0443850U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- gas introduction
- gas
- sample holder
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
Description
第１図は本考案の一実施例装置の構成を示した
図、第２図は第１図に使用されているガス導入試
料ホルダを示す図、第３図は第２図のＡＡ断面図
、第４図は動作を説明するための図、第５図は従
来例を説明するための図である。
１７……ガス導入試料ブロツク、１８……保持
台、１９……試料ホルダ、２０……ガス導入ケー
ス、２１……試料台、２２……調整ねじ、２３…
…自在継手、２４……モータ、２５……ガス導入
室、２６……ガス導入管、２７……流量制御器、
２８ａ，２８ｂ，２８ｃ，２８ｄ……ガス通路、
２９，３０，３１，３２……Ｏリング。
FIG. 1 is a diagram showing the configuration of an apparatus according to an embodiment of the present invention, FIG. 2 is a diagram showing the gas introduction sample holder used in FIG. 1, and FIG. 3 is a cross-sectional view taken along line AA in FIG. FIG. 4 is a diagram for explaining the operation, and FIG. 5 is a diagram for explaining the conventional example. 17... Gas introduction sample block, 18... Holding stand, 19... Sample holder, 20... Gas introduction case, 21... Sample stand, 22... Adjustment screw, 23...
... Universal joint, 24 ... Motor, 25 ... Gas introduction chamber, 26 ... Gas introduction pipe, 27 ... Flow rate controller,
28a, 28b, 28c, 28d... gas passage,
29, 30, 31, 32...O-ring.
Claims (1)
装着される筒状の試料ホルダと、該試料ホルダ内
に設置された試料を保持するための試料台と、前
記試料ホルダの上部に包囲するように形成された
ガス導入室と、該ガス導入室内に外部からガスを
導入するためのガス導入手段と、前記ガス導入室
内のガスを前記試料ホルダ内の試料に向け噴射さ
せるため、該試料ホルダ側壁に形成されたガス通
路とからなる走査電子顕微鏡等におけるガス導入
試料装置。 (2) 前記試料ホルダ内に置かれ、試料台を上下
に移動させるための移動機構を設けたことを特徴
とする請求項第１記載の走査電子顕微鏡における
ガス導入試料装置。[Scope of Claim for Utility Model Registration] (1) A moving table placed in a sample chamber, a cylindrical sample holder attached to the moving table, and a sample for holding the sample placed in the sample holder. a stage, a gas introduction chamber formed to surround the upper part of the sample holder, a gas introduction means for introducing gas into the gas introduction chamber from the outside, and a gas introduction chamber for introducing gas into the sample holder. A gas introduction sample device for a scanning electron microscope or the like, comprising a gas passage formed in the side wall of the sample holder for injecting the gas toward the sample. (2) The gas introduction sample device for a scanning electron microscope according to claim 1, further comprising a moving mechanism placed in the sample holder to move the sample stage up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8691690U JPH0443850U (en) | 1990-08-20 | 1990-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8691690U JPH0443850U (en) | 1990-08-20 | 1990-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0443850U true JPH0443850U (en) | 1992-04-14 |
Family
ID=31636556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8691690U Pending JPH0443850U (en) | 1990-08-20 | 1990-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0443850U (en) |
-
1990
- 1990-08-20 JP JP8691690U patent/JPH0443850U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB2180776B (en) | Method for producing suspension in air of ultra-fine mist particles | |
| JPH0443850U (en) | ||
| ATE97479T1 (en) | DEVICE FOR TAKING A FLUID THROUGH A WALL. | |
| JPS6292461U (en) | ||
| SE8804227L (en) | PRESSURE CONTROL DEVICE FOR A VACUUM CLEANER | |
| JPS6373854U (en) | ||
| JPH0214198Y2 (en) | ||
| JPH0320858U (en) | ||
| JPS6351432U (en) | ||
| JPH02102728U (en) | ||
| JPH0160531U (en) | ||
| JPH0164849U (en) | ||
| JPS6198868U (en) | ||
| JPH0463064U (en) | ||
| JPH01135734U (en) | ||
| JPS6242238U (en) | ||
| JPS6291433U (en) | ||
| JPS62124755U (en) | ||
| SU1417945A1 (en) | Apparatus for removal of dust and gas effluents when processing molten metal in the process unit | |
| JPS645437U (en) | ||
| JPS61131834U (en) | ||
| JPS62141050U (en) | ||
| JPS6418727U (en) | ||
| JPH0244324U (en) | ||
| JPS63100827U (en) |