JPH0449814Y2 - - Google Patents

Info

Publication number
JPH0449814Y2
JPH0449814Y2 JP9051586U JP9051586U JPH0449814Y2 JP H0449814 Y2 JPH0449814 Y2 JP H0449814Y2 JP 9051586 U JP9051586 U JP 9051586U JP 9051586 U JP9051586 U JP 9051586U JP H0449814 Y2 JPH0449814 Y2 JP H0449814Y2
Authority
JP
Japan
Prior art keywords
pad
wafer
pedestal
metal foil
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9051586U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62201937U (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9051586U priority Critical patent/JPH0449814Y2/ja
Publication of JPS62201937U publication Critical patent/JPS62201937U/ja
Application granted granted Critical
Publication of JPH0449814Y2 publication Critical patent/JPH0449814Y2/ja
Expired legal-status Critical Current

Links

JP9051586U 1986-06-16 1986-06-16 Expired JPH0449814Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9051586U JPH0449814Y2 (2) 1986-06-16 1986-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9051586U JPH0449814Y2 (2) 1986-06-16 1986-06-16

Publications (2)

Publication Number Publication Date
JPS62201937U JPS62201937U (2) 1987-12-23
JPH0449814Y2 true JPH0449814Y2 (2) 1992-11-24

Family

ID=30950454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9051586U Expired JPH0449814Y2 (2) 1986-06-16 1986-06-16

Country Status (1)

Country Link
JP (1) JPH0449814Y2 (2)

Also Published As

Publication number Publication date
JPS62201937U (2) 1987-12-23

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