JPH0450073B2 - - Google Patents

Info

Publication number
JPH0450073B2
JPH0450073B2 JP62192143A JP19214387A JPH0450073B2 JP H0450073 B2 JPH0450073 B2 JP H0450073B2 JP 62192143 A JP62192143 A JP 62192143A JP 19214387 A JP19214387 A JP 19214387A JP H0450073 B2 JPH0450073 B2 JP H0450073B2
Authority
JP
Japan
Prior art keywords
flow rate
water
pure water
circulation pump
ultrapure water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62192143A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6438186A (en
Inventor
Akio Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Organo Corp
Original Assignee
Organo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Organo Corp filed Critical Organo Corp
Priority to JP62192143A priority Critical patent/JPS6438186A/ja
Publication of JPS6438186A publication Critical patent/JPS6438186A/ja
Publication of JPH0450073B2 publication Critical patent/JPH0450073B2/ja
Granted legal-status Critical Current

Links

JP62192143A 1987-07-31 1987-07-31 Controlling method for ultrapure water producing device Granted JPS6438186A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62192143A JPS6438186A (en) 1987-07-31 1987-07-31 Controlling method for ultrapure water producing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62192143A JPS6438186A (en) 1987-07-31 1987-07-31 Controlling method for ultrapure water producing device

Publications (2)

Publication Number Publication Date
JPS6438186A JPS6438186A (en) 1989-02-08
JPH0450073B2 true JPH0450073B2 (fr) 1992-08-13

Family

ID=16286409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62192143A Granted JPS6438186A (en) 1987-07-31 1987-07-31 Controlling method for ultrapure water producing device

Country Status (1)

Country Link
JP (1) JPS6438186A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2652301B2 (ja) * 1992-05-28 1997-09-10 株式会社荏原製作所 洗浄水製造装置
JP7584574B1 (ja) * 2023-06-15 2024-11-15 野村マイクロ・サイエンス株式会社 液体循環システム

Also Published As

Publication number Publication date
JPS6438186A (en) 1989-02-08

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees