JPH0455132U - - Google Patents
Info
- Publication number
- JPH0455132U JPH0455132U JP9778490U JP9778490U JPH0455132U JP H0455132 U JPH0455132 U JP H0455132U JP 9778490 U JP9778490 U JP 9778490U JP 9778490 U JP9778490 U JP 9778490U JP H0455132 U JPH0455132 U JP H0455132U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- vapor phase
- phase growth
- growth apparatus
- reaction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の実施例を示す気相成長装置の
縦断面図、第２図は従来の装置を示す縦断面図で
ある。
１……反応管、２……ウエーハ、３……サセプ
タ、４……回転軸、５……モータ、６……フラン
ジ、７……ガス導入口、８……加熱コイル、９…
…ガイド軸。
FIG. 1 is a longitudinal sectional view of a vapor phase growth apparatus showing an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of a conventional apparatus. DESCRIPTION OF SYMBOLS 1... Reaction tube, 2... Wafer, 3... Susceptor, 4... Rotating shaft, 5... Motor, 6... Flange, 7... Gas inlet, 8... Heating coil, 9...
...Guide shaft.
Claims (1)
ーハをのせ、ガスを流しながらサセプタを回転さ
せ、気相成長を行うバレル縦形の気相成長装置に
おいて、 ガス導入部にサセプタを回転軸方向に沿つて支
承するガイド軸を設けたことを特徴とする気相成
長装置。[Scope of Claim for Utility Model Registration] A gas introduction section in a barrel vertical vapor phase growth apparatus that performs vapor phase growth by placing multiple wafers on a susceptor placed in a reaction tube and rotating the susceptor while flowing gas. 1. A vapor phase growth apparatus characterized in that a guide shaft for supporting a susceptor along a rotational axis direction is provided on the susceptor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9778490U JPH0455132U (en) | 1990-09-18 | 1990-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9778490U JPH0455132U (en) | 1990-09-18 | 1990-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0455132U true JPH0455132U (en) | 1992-05-12 |
Family
ID=31838458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9778490U Pending JPH0455132U (en) | 1990-09-18 | 1990-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455132U (en) |
-
1990
- 1990-09-18 JP JP9778490U patent/JPH0455132U/ja active Pending