JPH0350331U - - Google Patents
Info
- Publication number
- JPH0350331U JPH0350331U JP11013089U JP11013089U JPH0350331U JP H0350331 U JPH0350331 U JP H0350331U JP 11013089 U JP11013089 U JP 11013089U JP 11013089 U JP11013089 U JP 11013089U JP H0350331 U JPH0350331 U JP H0350331U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- reaction tube
- loaded
- heater
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の１実施例を示す断面概略図、
第２図は従来例の断面概略図、第３図は第２図に
おけるＡ矢視図である。
１……反応管、８……ボート、９……ボートカ
バー、１３……ウエーハ、１６ａ，１６ｂ，１７
ａ，１７ｂ……原料ガス供給管、２１……ヒータ
、２２……支軸、２４……ボート回転モータを示
す。
FIG. 1 is a schematic cross-sectional view showing one embodiment of the present invention;
FIG. 2 is a schematic cross-sectional view of a conventional example, and FIG. 3 is a view taken in the direction of arrow A in FIG. 1...Reaction tube, 8...Boat, 9...Boat cover, 13...Wafer, 16a, 16b, 17
a, 17b... Raw material gas supply pipe, 21... Heater, 22... Support shaft, 24... Boat rotating motor.
Claims (1)
注入、排気可能とし、該反応管にウエーハが装填
されたボートを装入、抜出可能とすると共にボー
ト装入状態でボートを回転可能としたことを特徴
とする化学気相生成装置。 It is possible to inject and exhaust raw material gas into a reaction tube surrounded by a heater, and it is possible to load and remove a boat loaded with wafers into the reaction tube, and it is also possible to rotate the boat while the boat is loaded. A chemical vapor phase generation device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11013089U JPH0350331U (en) | 1989-09-20 | 1989-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11013089U JPH0350331U (en) | 1989-09-20 | 1989-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0350331U true JPH0350331U (en) | 1991-05-16 |
Family
ID=31658682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11013089U Pending JPH0350331U (en) | 1989-09-20 | 1989-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0350331U (en) |
-
1989
- 1989-09-20 JP JP11013089U patent/JPH0350331U/ja active Pending