JPH0468348U - - Google Patents

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Publication number
JPH0468348U
JPH0468348U JP11177390U JP11177390U JPH0468348U JP H0468348 U JPH0468348 U JP H0468348U JP 11177390 U JP11177390 U JP 11177390U JP 11177390 U JP11177390 U JP 11177390U JP H0468348 U JPH0468348 U JP H0468348U
Authority
JP
Japan
Prior art keywords
electrode
ion
positive
extraction
electrode rods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11177390U
Other languages
English (en)
Other versions
JP2505067Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990111773U priority Critical patent/JP2505067Y2/ja
Publication of JPH0468348U publication Critical patent/JPH0468348U/ja
Application granted granted Critical
Publication of JP2505067Y2 publication Critical patent/JP2505067Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例にかかるイオン引出し
正電極の斜視図。第２図は本考案に係る電極棒の
みの平面図と断面図。第３図はイオン源の一般的
な例を示す断面図。第４図は従来例に係るイオン
引出し正電極の平面図。第５図は同じ従来例に係
るイオン引出し正電極の電極棒のみの平面図。 １……引出し正電極、２……負電極、３……接
地電極、４……正電極支持枠、５……薄板、６…
…引出し開口部、７……ヒータ兼用電極棒、８…
…往路部、９……彎曲部、１０……復路部、２０
……ヒータ無し電極棒、２１……接続端子、２２
……ヒータ電源。

Claims (1)

    【実用新案登録請求の範囲】
  1. 原料ガスまたは加熱された金属蒸気を励起して
    プラズマとするイオン源チヤンバのイオンの出口
    に負電極、接地電極とともに設けられイオンを引
    き出す為の引出し正電極であつて、複数の金属棒
    を折り曲げあるいは折り曲げない電極棒よりなり
    すべての電極棒にはイオン引き出しのための正電
    圧が印加されており、少なくとも一部の電極棒は
    上下に平行の対になるように設けてあり、上下に
    対になつた電極棒には電極棒加熱用の電流が互い
    に逆方向に流れるようにしたことを特徴とする加
    熱型イオン引出し正電極。
JP1990111773U 1990-10-24 1990-10-24 加熱型イオン引出し正電極 Expired - Fee Related JP2505067Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990111773U JP2505067Y2 (ja) 1990-10-24 1990-10-24 加熱型イオン引出し正電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990111773U JP2505067Y2 (ja) 1990-10-24 1990-10-24 加熱型イオン引出し正電極

Publications (2)

Publication Number Publication Date
JPH0468348U true JPH0468348U (ja) 1992-06-17
JP2505067Y2 JP2505067Y2 (ja) 1996-07-24

Family

ID=31859251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990111773U Expired - Fee Related JP2505067Y2 (ja) 1990-10-24 1990-10-24 加熱型イオン引出し正電極

Country Status (1)

Country Link
JP (1) JP2505067Y2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63127056U (ja) * 1987-02-12 1988-08-19
JPH0166741U (ja) * 1987-10-21 1989-04-28
JPH0270884U (ja) * 1988-11-15 1990-05-30

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63127056U (ja) * 1987-02-12 1988-08-19
JPH0166741U (ja) * 1987-10-21 1989-04-28
JPH0270884U (ja) * 1988-11-15 1990-05-30

Also Published As

Publication number Publication date
JP2505067Y2 (ja) 1996-07-24

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