JPH0476040U - - Google Patents

Info

Publication number
JPH0476040U
JPH0476040U JP12058190U JP12058190U JPH0476040U JP H0476040 U JPH0476040 U JP H0476040U JP 12058190 U JP12058190 U JP 12058190U JP 12058190 U JP12058190 U JP 12058190U JP H0476040 U JPH0476040 U JP H0476040U
Authority
JP
Japan
Prior art keywords
probe
probe card
testing
card
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12058190U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12058190U priority Critical patent/JPH0476040U/ja
Publication of JPH0476040U publication Critical patent/JPH0476040U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例である半導体検査
装置の断面図、第２図はこの考案の他の実施例を
示すサブステージの斜視図、第３図は従来の半導
体検査装置の断面図である。 図において、１はプローブ針、２……プローブ
カード、３は粘着マツト、４はサブステージ、５
はウエハ、６はステージ、７はセラミツク板を示
す。なお、図中、同一符号は同一、または相当部
分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体を検査する半導体検査装置において、プ
    ローブカードを装置より取り外すことなく、プロ
    ーブカードのプローブ針を自動的に清掃すること
    を特徴とするプローブカードのプローブ針清掃装
    置。
JP12058190U 1990-11-15 1990-11-15 Pending JPH0476040U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12058190U JPH0476040U (ja) 1990-11-15 1990-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12058190U JPH0476040U (ja) 1990-11-15 1990-11-15

Publications (1)

Publication Number Publication Date
JPH0476040U true JPH0476040U (ja) 1992-07-02

Family

ID=31868480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12058190U Pending JPH0476040U (ja) 1990-11-15 1990-11-15

Country Status (1)

Country Link
JP (1) JPH0476040U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1151998A (ja) * 1997-08-04 1999-02-26 Matsushita Electric Ind Co Ltd プリント配線板の検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1151998A (ja) * 1997-08-04 1999-02-26 Matsushita Electric Ind Co Ltd プリント配線板の検査装置

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