JPH047629B2 - - Google Patents

Info

Publication number
JPH047629B2
JPH047629B2 JP5150583A JP5150583A JPH047629B2 JP H047629 B2 JPH047629 B2 JP H047629B2 JP 5150583 A JP5150583 A JP 5150583A JP 5150583 A JP5150583 A JP 5150583A JP H047629 B2 JPH047629 B2 JP H047629B2
Authority
JP
Japan
Prior art keywords
pulse
signal
pattern
period
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5150583A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59178072A (ja
Inventor
Shoichi Tanimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP58051505A priority Critical patent/JPS59178072A/ja
Publication of JPS59178072A publication Critical patent/JPS59178072A/ja
Publication of JPH047629B2 publication Critical patent/JPH047629B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Facsimiles In General (AREA)
  • Facsimile Scanning Arrangements (AREA)
JP58051505A 1983-03-29 1983-03-29 パタ−ン描画装置 Granted JPS59178072A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58051505A JPS59178072A (ja) 1983-03-29 1983-03-29 パタ−ン描画装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58051505A JPS59178072A (ja) 1983-03-29 1983-03-29 パタ−ン描画装置

Publications (2)

Publication Number Publication Date
JPS59178072A JPS59178072A (ja) 1984-10-09
JPH047629B2 true JPH047629B2 (sv) 1992-02-12

Family

ID=12888848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58051505A Granted JPS59178072A (ja) 1983-03-29 1983-03-29 パタ−ン描画装置

Country Status (1)

Country Link
JP (1) JPS59178072A (sv)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0668581B2 (ja) * 1985-10-08 1994-08-31 東芝機械株式会社 レ−ザ描画装置の焦点位置調整装置
JP2562304B2 (ja) * 1986-07-16 1996-12-11 キヤノン株式会社 画像形成装置
JP2600168B2 (ja) * 1987-05-13 1997-04-16 富士ゼロックス株式会社 画像記録装置
JP6690214B2 (ja) * 2015-12-09 2020-04-28 株式会社ニコン パターン描画装置

Also Published As

Publication number Publication date
JPS59178072A (ja) 1984-10-09

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