JPH047666U - - Google Patents

Info

Publication number
JPH047666U
JPH047666U JP4806990U JP4806990U JPH047666U JP H047666 U JPH047666 U JP H047666U JP 4806990 U JP4806990 U JP 4806990U JP 4806990 U JP4806990 U JP 4806990U JP H047666 U JPH047666 U JP H047666U
Authority
JP
Japan
Prior art keywords
heater
crucible
melted
explanatory diagram
shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4806990U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4806990U priority Critical patent/JPH047666U/ja
Publication of JPH047666U publication Critical patent/JPH047666U/ja
Pending legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】
第１図は本考案装置の模式的縦断面図、第２図
は遮蔽体の効果を数値解析により計算した結果を
示す説明図、第３図は従来の装置及び本考案によ
る装置双方の装置より引上げた単結晶の電気抵抗
を評価した説明図、第４図は従来の装置及び本考
案の装置双方の使用頻度による固体層の厚みの変
化を比較した説明図、第５図はＣＺ法による結晶
成長装置を示す模式的縦断面図、第６図は溶融層
法による従来の結晶成長装置を示す模式的縦断面
図、第７図〜第１０図は溶融層法での充填材料の
相変化を示す一次元モデル図、第１１図は従来の
結晶成長装置内の中心軸上の温度分布を示す説明
図である。 １……坩堝、２……ヒータ、４……引上げ軸、
８……保温筒、１０……チヤンバ、１１……固体
原料供給器、２２……遮蔽体。

Claims (1)

  1. 【実用新案登録請求の範囲】 周囲にヒータ及びその外側に位置して保温壁を
    配設した坩堝内の結晶用原料を、前記ヒータにて
    上側から下側へ向けて溶融しつつ、その溶融液か
    ら結晶を引き上げて成長させる装置において、 前記ヒータの下方に、該ヒータから坩堝下部へ
    の輻射熱を遮断する遮蔽体を設けたことを特徴と
    する結晶成長装置。
JP4806990U 1990-05-07 1990-05-07 Pending JPH047666U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4806990U JPH047666U (ja) 1990-05-07 1990-05-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4806990U JPH047666U (ja) 1990-05-07 1990-05-07

Publications (1)

Publication Number Publication Date
JPH047666U true JPH047666U (ja) 1992-01-23

Family

ID=31564558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4806990U Pending JPH047666U (ja) 1990-05-07 1990-05-07

Country Status (1)

Country Link
JP (1) JPH047666U (ja)

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