JPH0513307B2 - - Google Patents
Info
- Publication number
- JPH0513307B2 JPH0513307B2 JP59057335A JP5733584A JPH0513307B2 JP H0513307 B2 JPH0513307 B2 JP H0513307B2 JP 59057335 A JP59057335 A JP 59057335A JP 5733584 A JP5733584 A JP 5733584A JP H0513307 B2 JPH0513307 B2 JP H0513307B2
- Authority
- JP
- Japan
- Prior art keywords
- polymer
- synthesis example
- formula
- value
- methylstyrene
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59057335A JPS60201336A (ja) | 1984-03-27 | 1984-03-27 | レジストパタ−ン形成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59057335A JPS60201336A (ja) | 1984-03-27 | 1984-03-27 | レジストパタ−ン形成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60201336A JPS60201336A (ja) | 1985-10-11 |
| JPH0513307B2 true JPH0513307B2 (fr) | 1993-02-22 |
Family
ID=13052696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59057335A Granted JPS60201336A (ja) | 1984-03-27 | 1984-03-27 | レジストパタ−ン形成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60201336A (fr) |
-
1984
- 1984-03-27 JP JP59057335A patent/JPS60201336A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60201336A (ja) | 1985-10-11 |
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