JPH0521885Y2 - - Google Patents
Info
- Publication number
- JPH0521885Y2 JPH0521885Y2 JP11185686U JP11185686U JPH0521885Y2 JP H0521885 Y2 JPH0521885 Y2 JP H0521885Y2 JP 11185686 U JP11185686 U JP 11185686U JP 11185686 U JP11185686 U JP 11185686U JP H0521885 Y2 JPH0521885 Y2 JP H0521885Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier
- receiving plate
- wafer carrier
- shelf
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 210
- 239000000969 carrier Substances 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 239000000428 dust Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11185686U JPH0521885Y2 (2) | 1986-07-21 | 1986-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11185686U JPH0521885Y2 (2) | 1986-07-21 | 1986-07-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0241436U JPH0241436U (2) | 1990-03-22 |
| JPH0521885Y2 true JPH0521885Y2 (2) | 1993-06-04 |
Family
ID=31350276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11185686U Expired - Lifetime JPH0521885Y2 (2) | 1986-07-21 | 1986-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521885Y2 (2) |
-
1986
- 1986-07-21 JP JP11185686U patent/JPH0521885Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0241436U (2) | 1990-03-22 |
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