JPH0523585Y2 - - Google Patents
Info
- Publication number
- JPH0523585Y2 JPH0523585Y2 JP1987186776U JP18677687U JPH0523585Y2 JP H0523585 Y2 JPH0523585 Y2 JP H0523585Y2 JP 1987186776 U JP1987186776 U JP 1987186776U JP 18677687 U JP18677687 U JP 18677687U JP H0523585 Y2 JPH0523585 Y2 JP H0523585Y2
- Authority
- JP
- Japan
- Prior art keywords
- melt
- substrate
- substrate holder
- shutter
- epitaxial growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987186776U JPH0523585Y2 (da) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987186776U JPH0523585Y2 (da) | 1987-12-07 | 1987-12-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0189965U JPH0189965U (da) | 1989-06-13 |
| JPH0523585Y2 true JPH0523585Y2 (da) | 1993-06-16 |
Family
ID=31477984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987186776U Expired - Lifetime JPH0523585Y2 (da) | 1987-12-07 | 1987-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523585Y2 (da) |
-
1987
- 1987-12-07 JP JP1987186776U patent/JPH0523585Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0189965U (da) | 1989-06-13 |
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