JPH0528754Y2 - - Google Patents

Info

Publication number
JPH0528754Y2
JPH0528754Y2 JP1987186256U JP18625687U JPH0528754Y2 JP H0528754 Y2 JPH0528754 Y2 JP H0528754Y2 JP 1987186256 U JP1987186256 U JP 1987186256U JP 18625687 U JP18625687 U JP 18625687U JP H0528754 Y2 JPH0528754 Y2 JP H0528754Y2
Authority
JP
Japan
Prior art keywords
substrate
spinner device
center
spindle
resist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987186256U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0189735U (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987186256U priority Critical patent/JPH0528754Y2/ja
Publication of JPH0189735U publication Critical patent/JPH0189735U/ja
Application granted granted Critical
Publication of JPH0528754Y2 publication Critical patent/JPH0528754Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1987186256U 1987-12-07 1987-12-07 Expired - Lifetime JPH0528754Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987186256U JPH0528754Y2 (it) 1987-12-07 1987-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987186256U JPH0528754Y2 (it) 1987-12-07 1987-12-07

Publications (2)

Publication Number Publication Date
JPH0189735U JPH0189735U (it) 1989-06-13
JPH0528754Y2 true JPH0528754Y2 (it) 1993-07-23

Family

ID=31477489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987186256U Expired - Lifetime JPH0528754Y2 (it) 1987-12-07 1987-12-07

Country Status (1)

Country Link
JP (1) JPH0528754Y2 (it)

Also Published As

Publication number Publication date
JPH0189735U (it) 1989-06-13

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