JPH0547504B2 - - Google Patents

Info

Publication number
JPH0547504B2
JPH0547504B2 JP17664988A JP17664988A JPH0547504B2 JP H0547504 B2 JPH0547504 B2 JP H0547504B2 JP 17664988 A JP17664988 A JP 17664988A JP 17664988 A JP17664988 A JP 17664988A JP H0547504 B2 JPH0547504 B2 JP H0547504B2
Authority
JP
Japan
Prior art keywords
silica
ultrafine
powder
sintered body
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17664988A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0226862A (ja
Inventor
Makoto Takemori
Hiroshi Danbara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP17664988A priority Critical patent/JPH0226862A/ja
Publication of JPH0226862A publication Critical patent/JPH0226862A/ja
Publication of JPH0547504B2 publication Critical patent/JPH0547504B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
JP17664988A 1988-07-15 1988-07-15 シリカ焼結体の製造方法 Granted JPH0226862A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17664988A JPH0226862A (ja) 1988-07-15 1988-07-15 シリカ焼結体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17664988A JPH0226862A (ja) 1988-07-15 1988-07-15 シリカ焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPH0226862A JPH0226862A (ja) 1990-01-29
JPH0547504B2 true JPH0547504B2 (fr) 1993-07-16

Family

ID=16017273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17664988A Granted JPH0226862A (ja) 1988-07-15 1988-07-15 シリカ焼結体の製造方法

Country Status (1)

Country Link
JP (1) JPH0226862A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5728470A (en) * 1994-05-13 1998-03-17 Nec Corporation Multi-layer wiring substrate, and process for producing the same
CN114349516B (zh) * 2021-12-16 2023-05-12 郑州大学 一种低温合成高致密SiC陶瓷的方法

Also Published As

Publication number Publication date
JPH0226862A (ja) 1990-01-29

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term