JPH0640461A - ウェハーキャリヤ用のボックス - Google Patents
ウェハーキャリヤ用のボックスInfo
- Publication number
- JPH0640461A JPH0640461A JP4729293A JP4729293A JPH0640461A JP H0640461 A JPH0640461 A JP H0640461A JP 4729293 A JP4729293 A JP 4729293A JP 4729293 A JP4729293 A JP 4729293A JP H0640461 A JPH0640461 A JP H0640461A
- Authority
- JP
- Japan
- Prior art keywords
- box
- hinge
- cover
- rim
- socket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D43/00—Lids or covers for rigid or semi-rigid containers
- B65D43/14—Non-removable lids or covers
- B65D43/16—Non-removable lids or covers hinged for upward or downward movement
- B65D43/163—Non-removable lids or covers hinged for upward or downward movement the container and the lid being made separately
- B65D43/164—Non-removable lids or covers hinged for upward or downward movement the container and the lid being made separately and connected by interfitting hinge elements integrally with the container and the lid formed respectively
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05D—HINGES OR SUSPENSION DEVICES FOR DOORS, WINDOWS OR WINGS
- E05D7/00—Hinges or pivots of special construction
- E05D7/10—Hinges or pivots of special construction to allow easy separation or connection of the parts at the hinge axis
- E05D7/1061—Hinges or pivots of special construction to allow easy separation or connection of the parts at the hinge axis in a radial direction
- E05D7/1066—Hinges or pivots of special construction to allow easy separation or connection of the parts at the hinge axis in a radial direction requiring a specific angular position
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
- E05Y2999/00—Subject-matter not otherwise provided for in this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Closures For Containers (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US83459692A | 1992-02-12 | 1992-02-12 | |
| US834596 | 1992-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0640461A true JPH0640461A (ja) | 1994-02-15 |
Family
ID=25267303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4729293A Pending JPH0640461A (ja) | 1992-02-12 | 1993-02-12 | ウェハーキャリヤ用のボックス |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPH0640461A (it) |
| KR (1) | KR930018708A (it) |
| DE (1) | DE4303784A1 (it) |
| FR (1) | FR2687272A1 (it) |
| GB (1) | GB2264105A (it) |
| IT (1) | ITTO930066A1 (it) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0872972A (ja) * | 1994-08-26 | 1996-03-19 | Gold Kogyo Kk | 精密部品搬送用の連鎖型容器 |
| JPH11111832A (ja) * | 1997-10-02 | 1999-04-23 | Shin Etsu Polymer Co Ltd | 精密基板収納容器 |
| CN105225993A (zh) * | 2014-05-30 | 2016-01-06 | 盛美半导体设备(上海)有限公司 | 手动的载片花篮装载机构 |
| JP2018206919A (ja) * | 2017-06-02 | 2018-12-27 | 株式会社東芝 | 電子機器 |
| TWI668167B (zh) * | 2017-09-25 | 2019-08-11 | 台灣積體電路製造股份有限公司 | 用於儲存和傳輸半導體元件的裝置及其形成方法 |
| US11195737B2 (en) | 2018-09-28 | 2021-12-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus for storing and transporting semiconductor elements, and method of making the same |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19517564B4 (de) * | 1995-05-12 | 2005-02-03 | Robert Pappler | Behältnis, insbesondere für Speisen |
| DE19608785C1 (de) * | 1996-03-07 | 1997-04-03 | Streuber Sulo Eisenwerk F | Müllbehälter |
| GB2323589A (en) * | 1997-03-27 | 1998-09-30 | Mckechnie Uk Ltd | Containers having hinged lids |
| US6019238A (en) * | 1998-01-20 | 2000-02-01 | Vita-Mix Corporation | Hinge assembly for an enclosure |
| DE19804859C1 (de) * | 1998-02-09 | 1999-08-26 | Dorma Gmbh & Co Kg | Schwenkbare Verbindung |
| FR2775466B1 (fr) | 1998-03-02 | 2000-05-19 | Legrand Sa | Boitier compose d'elements de boitier relies l'un a l'autre de maniere debrayable et articulee, notamment pour luminaire |
| US6517634B2 (en) * | 2000-02-28 | 2003-02-11 | Applied Materials, Inc. | Chemical vapor deposition chamber lid assembly |
| WO2003095320A1 (en) * | 2002-05-09 | 2003-11-20 | Rubbermaid Incorporated | Multifunction container hinge |
| US7124471B2 (en) | 2004-02-10 | 2006-10-24 | Primex Manufacturing Ltd. | Hidden hinge |
| SE528969C2 (sv) * | 2005-07-05 | 2007-03-27 | Tomas Berg | Gångjärnsled |
| FR2893593B1 (fr) * | 2005-11-21 | 2008-02-01 | Fors France Sa | Boitier antivol |
| DE102006042417A1 (de) | 2006-09-06 | 2008-03-27 | Siemens Ag | Transportgehäuse für eine elektronische Flachbaugruppe |
| US20090020540A1 (en) * | 2007-07-17 | 2009-01-22 | Terry Vovan | Tilted cake container system |
| FR2951118B1 (fr) * | 2009-10-08 | 2011-12-16 | Cera | Dispositif de montage d'une plaque de recouvrement d'un compartiment a bagages de vehicule automobile |
| BR112015006491B1 (pt) * | 2012-09-25 | 2021-07-27 | Fisher & Paykel Healthcare Limited | Aparelho de auxílio à respiração |
| JP7051252B2 (ja) * | 2020-01-16 | 2022-04-11 | 矢崎総業株式会社 | 電気接続箱及び電気接続箇所のカバー構造 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4349120A (en) * | 1981-06-10 | 1982-09-14 | Bay State Plastics Corp. | Plastic box hinge |
| US4549670A (en) * | 1984-12-19 | 1985-10-29 | Maclean-Fogg Company | Hinged tissue cassette apparatus |
-
1993
- 1993-02-05 DE DE4303784A patent/DE4303784A1/de not_active Withdrawn
- 1993-02-05 IT IT93TO000066A patent/ITTO930066A1/it not_active Application Discontinuation
- 1993-02-08 FR FR9301353A patent/FR2687272A1/fr active Pending
- 1993-02-10 KR KR1019930001809A patent/KR930018708A/ko not_active Withdrawn
- 1993-02-10 GB GB9302642A patent/GB2264105A/en not_active Withdrawn
- 1993-02-12 JP JP4729293A patent/JPH0640461A/ja active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0872972A (ja) * | 1994-08-26 | 1996-03-19 | Gold Kogyo Kk | 精密部品搬送用の連鎖型容器 |
| JPH11111832A (ja) * | 1997-10-02 | 1999-04-23 | Shin Etsu Polymer Co Ltd | 精密基板収納容器 |
| CN105225993A (zh) * | 2014-05-30 | 2016-01-06 | 盛美半导体设备(上海)有限公司 | 手动的载片花篮装载机构 |
| JP2018206919A (ja) * | 2017-06-02 | 2018-12-27 | 株式会社東芝 | 電子機器 |
| TWI668167B (zh) * | 2017-09-25 | 2019-08-11 | 台灣積體電路製造股份有限公司 | 用於儲存和傳輸半導體元件的裝置及其形成方法 |
| US10738935B2 (en) | 2017-09-25 | 2020-08-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus for storing and transporting semiconductor elements, and method of making the same |
| US20200332943A1 (en) * | 2017-09-25 | 2020-10-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus for storing and transporting semiconductor elements, and method of making the same |
| US11796123B2 (en) * | 2017-09-25 | 2023-10-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus for storing and transporting semiconductor elements, and method of making the same |
| US12085220B2 (en) * | 2017-09-25 | 2024-09-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus for storing and transporting semiconductor elements, and method of making the same |
| US12338943B2 (en) | 2017-09-25 | 2025-06-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for storing and transporting semiconductor elements, and method of making the same |
| US11195737B2 (en) | 2018-09-28 | 2021-12-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus for storing and transporting semiconductor elements, and method of making the same |
Also Published As
| Publication number | Publication date |
|---|---|
| GB9302642D0 (en) | 1993-03-24 |
| KR930018708A (ko) | 1993-09-22 |
| ITTO930066A0 (it) | 1993-02-05 |
| FR2687272A1 (fr) | 1993-08-13 |
| ITTO930066A1 (it) | 1994-08-05 |
| GB2264105A (en) | 1993-08-18 |
| DE4303784A1 (it) | 1993-08-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0640461A (ja) | ウェハーキャリヤ用のボックス | |
| US5248033A (en) | Hinged tilt box with inclined portion | |
| TWI276196B (en) | Container body for accommodating the processed object | |
| US6109677A (en) | Apparatus for handling and transporting plate like substrates | |
| JPS5917893Y2 (ja) | カセツト装置 | |
| JP3483573B2 (ja) | パッケージ | |
| US20060216942A1 (en) | Wafer carrier for minimizing contacting area with wafers | |
| US4752007A (en) | Disk shipper | |
| US20160254172A1 (en) | Wafer carrier | |
| CN113194871B (zh) | 医疗设备容纳和运输系统及方法 | |
| KR100479022B1 (ko) | 병원체 전이방지용 완전 밀폐형 케이지시스템 | |
| US5775508A (en) | Disk package for rotating memory disks | |
| US6691718B2 (en) | Wafer container cleaning system | |
| USRE37627E1 (en) | Wafer centrifugal drying apparatus | |
| US6220438B1 (en) | Container for transporting precision substrates | |
| TW469605B (en) | Sheet support container | |
| KR20080077093A (ko) | 오염에 민감한 평탄한 물품, 특히 반도체 웨이퍼 저장용장치 | |
| JP2002175998A (ja) | 処理装置 | |
| EP0343762A2 (en) | Substrate package | |
| JPH0831519B2 (ja) | ウェハ収納器 | |
| JPS6328046A (ja) | カセツト搬送ボツクス | |
| CN218369127U (zh) | 一种防止污染的检测试剂盒 | |
| KR20010027953A (ko) | 외장형 사료통과 물통 구조를 갖는 마우스 사육용 케이지 | |
| JPH0426381Y2 (it) | ||
| JP2001168165A (ja) | 無人搬送車 |