JPH0713213Y2 - 化成装置 - Google Patents

化成装置

Info

Publication number
JPH0713213Y2
JPH0713213Y2 JP7329287U JP7329287U JPH0713213Y2 JP H0713213 Y2 JPH0713213 Y2 JP H0713213Y2 JP 7329287 U JP7329287 U JP 7329287U JP 7329287 U JP7329287 U JP 7329287U JP H0713213 Y2 JPH0713213 Y2 JP H0713213Y2
Authority
JP
Japan
Prior art keywords
chemical conversion
semiconductor wafer
conversion head
head
conversion device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7329287U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63183267U (sr
Inventor
美和 世古
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP7329287U priority Critical patent/JPH0713213Y2/ja
Publication of JPS63183267U publication Critical patent/JPS63183267U/ja
Application granted granted Critical
Publication of JPH0713213Y2 publication Critical patent/JPH0713213Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Chemical Treatment Of Metals (AREA)
  • Weting (AREA)
JP7329287U 1987-05-15 1987-05-15 化成装置 Expired - Lifetime JPH0713213Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7329287U JPH0713213Y2 (ja) 1987-05-15 1987-05-15 化成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7329287U JPH0713213Y2 (ja) 1987-05-15 1987-05-15 化成装置

Publications (2)

Publication Number Publication Date
JPS63183267U JPS63183267U (sr) 1988-11-25
JPH0713213Y2 true JPH0713213Y2 (ja) 1995-03-29

Family

ID=30917498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7329287U Expired - Lifetime JPH0713213Y2 (ja) 1987-05-15 1987-05-15 化成装置

Country Status (1)

Country Link
JP (1) JPH0713213Y2 (sr)

Also Published As

Publication number Publication date
JPS63183267U (sr) 1988-11-25

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