JPH07176646A - 半導体パッケージ - Google Patents

半導体パッケージ

Info

Publication number
JPH07176646A
JPH07176646A JP5320243A JP32024393A JPH07176646A JP H07176646 A JPH07176646 A JP H07176646A JP 5320243 A JP5320243 A JP 5320243A JP 32024393 A JP32024393 A JP 32024393A JP H07176646 A JPH07176646 A JP H07176646A
Authority
JP
Japan
Prior art keywords
mounting
chip
circuit board
area
semiconductor package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5320243A
Other languages
English (en)
Other versions
JP3305843B2 (ja
Inventor
Hiroshi Iwasaki
博 岩崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP32024393A priority Critical patent/JP3305843B2/ja
Publication of JPH07176646A publication Critical patent/JPH07176646A/ja
Priority to US08/554,104 priority patent/US5710458A/en
Application granted granted Critical
Publication of JP3305843B2 publication Critical patent/JP3305843B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
    • G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
    • G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
    • G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
    • G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
    • G06K19/0775—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card arrangements for connecting the integrated circuit to the antenna
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
    • G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
    • G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
    • G06K19/07773—Antenna details
    • G06K19/07777—Antenna details the antenna being of the inductive type
    • G06K19/07779—Antenna details the antenna being of the inductive type the inductive antenna being a coil
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
    • G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
    • G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
    • G06K19/07773—Antenna details
    • G06K19/07777—Antenna details the antenna being of the inductive type
    • G06K19/07779—Antenna details the antenna being of the inductive type the inductive antenna being a coil
    • G06K19/07783—Antenna details the antenna being of the inductive type the inductive antenna being a coil the coil being planar
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
    • G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
    • G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
    • G06K19/07773—Antenna details
    • G06K19/07777—Antenna details the antenna being of the inductive type
    • G06K19/07784—Antenna details the antenna being of the inductive type the inductive antenna consisting of a plurality of coils stacked on top of one another
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00—Details of, or arrangements associated with, antennas
    • H01Q1/12—Supports; Mounting means
    • H01Q1/22—Supports; Mounting means by structural association with other equipment or articles
    • H01Q1/2208—Supports; Mounting means by structural association with other equipment or articles associated with components used in interrogation type services, i.e. in systems for information exchange between an interrogator/reader and a tag/transponder, e.g. in Radio Frequency Identification [RFID] systems
    • H01Q1/2225—Supports; Mounting means by structural association with other equipment or articles associated with components used in interrogation type services, i.e. in systems for information exchange between an interrogator/reader and a tag/transponder, e.g. in Radio Frequency Identification [RFID] systems used in active tags, i.e. provided with its own power source or in passive tags, i.e. deriving power from RF signal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00—Details of, or arrangements associated with, antennas
    • H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
    • H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q7/00—Loop antennas with a substantially uniform current distribution around the loop and having a directional radiation pattern in a plane perpendicular to the plane of the loop
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/699—Insulating or insulated package substrates; Interposers; Redistribution layers for flat cards, e.g. credit cards
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15—Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Credit Cards Or The Like (AREA)
  • Variable-Direction Aerials And Aerial Arrays (AREA)

Abstract

(57)【要約】 【目的】 信頼性が高く、構造・構成も簡単で、主たる
情報処理に関与する機能部として着脱を可能とし、保持
・携帯性を大幅に改善・向上させ、かつ外部機器との接
続端子の無い半導体パッケージの提供を目的とする。 【構成】 一主面にＩＣチップの搭載・実装可能な領域
を備えた回路基板と、前記回路基板の所定領域に搭載・
実装されたＩＣチップと、前記搭載・実装されたＩＣチ
ップの少なくとも一部を埋設ないし被覆するシールド樹
脂層と、前記回路基板の搭載・実装領域を除く主面の他
領域に一体的に形設された非接触に信号を送受する少な
くとも１ループ状のアンテナパターンとを具備して成る
ことを特徴とする。

Description

【発明の詳細な説明】
【０００１】
【産業上の利用分野】本発明は、薄型ＩＣカードなど携
帯ものの構成に適する外部機器との接続端子のない半導
体パッケージに関する。
【０００２】
【従来の技術】各種データなどの記録・保存が可能な記
憶装置として、たとえば各種のメモリカードが知られて
いる。そして、この種の記憶装置には、ＣＰＵを内蔵し
た接触型のマイコンカード、および電波により情報の送
受を行う非接触型の無線カードなどがあり、また、これ
らの両ＩＣカードなどは、それぞれ実用性における特
長、もしくは優位性があるので、前記特長，優位性に対
応した形で広く実用に供されている。さらに、両ＩＣカ
ードなどの使い分けの不便さに対して、接触型ＩＣカー
ドおよび非接触型ＩＣカードの特長，優位性を併せて備
えた複合ＩＣカードも開発されている（たとえば特公平
4-16831号公報）。ところで、この種のカード類の構成
においては、カードの大きさや厚さなどに制約があるた
め、たとえばメモリ機能などに寄与する半導体チップ
（ＩＣ素子など）の薄形実装が要求され、またパッケー
ジ化する場合も可及的な薄形，コンパクト化が望まれ
る。
【０００３】
【発明が解決しようとする課題】しかしながら、前記構
成の半導体パッケージの場合は、先ず、半導体チップを
搭載・実装するした部分（たとえば回路基板）におい
て、外部接続用の電極端子（端子パッドやリードビンな
ど）が導出した構成を成しているため、すくなくともそ
の分、容積的にコンパクト化が損なわれるという問題が
ある。次に、前記外部接続用の電極端子の露出部分が、
たとえば酸化や油脂類の付着などにより汚損したり、あ
るいは機械的な外力など受けて破損などを起こし易いの
で、信頼性の高い電気的な接続を達成・維持し得ない恐
れが生じ易いという問題がある。
【０００４】本発明は上記事情に対処してなされたもの
で、信頼性が高く、構造・構成も簡単で、主たる情報処
理に関与する機能部の着脱を可能とする保持・携帯性を
大幅に改善・向上させた半導体パッケージの提供を目的
とする。
【０００５】
【課題を解決するための手段】本発明に係る半導体パッ
ケージは、一主面にＩＣチップの搭載・実装可能な領域
を備えた回路基板と、前記回路基板の所定領域に搭載・
実装されたＩＣチップと、前記搭載・実装されたＩＣチ
ップの少なくとも一部を埋設ないし被覆するシールド樹
脂層と、前記回路基板の搭載・実装領域を除く主面の他
領域に一体的に形設された非接触に信号を送受する少な
くとも１ループ状のアンテナパターンとを具備して成る
ことを特徴とする。
【０００６】すなわち、本発明は非接触に信号を送受す
るアンテナ機能を含む半導体パッケージであって、ルー
プ状アンテナを通じて電磁誘導される電力をＩＣチップ
の駆動電源として利用することを骨子とし、外部機器の
アンテナが近接距離にある場合、十分な電磁誘導された
電力および信号強度が得られることに着目してなされた
ものである。ここで、周波数をマイクロ波領域にする
と、ループ状アンテナパターンをより小形に設定し得
る。また、ループ状アンテナパターンを複数にして、一
方を信号の伝達に、他方をＩＣチップの駆動電源用の電
磁誘導に利用する構成を採れば、信号処理および電力誘
起を同時に行い得るので、信号処理の短縮化も図ること
が可能となる。
【０００７】
【作用】本発明に係る半導体モジュールは、たとえばＩ
Ｃカードなどの携帯もので、主たる情報処理に関与する
機能部として、任意に着脱・交換し得る形態を採ってい
る。すなわち、回路基板の一主面に搭載・実装したＩＣ
チップを、その少なくとも一部をシールド樹脂層で埋設
ないし被覆・封止する一方、前記回路基板のＩＣチップ
の搭載・実装領域を除く一主面の他領域に、非接触に信
号を送受する少なくとも１個のループ状アンテナが配置
された構成を成している。そして、前記ループ状アンテ
ナがＩＣチップの駆動電力源として機能および新郷の送
受の機能を有するので、外部接続用端子が不要となるこ
とにより、静電破壊によるＩＣチップの破損などの恐れ
を解消する。ここで、外部接続用端子が省略されること
は、露出端子面の損傷や汚染による電気的な接続不良発
生の恐れも解消されることを意味し、信号の書き込み，
読みだしの信頼性が向上されることになる。
【０００８】
【実施例】以下図１〜図４を参照して本発明の実施例を
説明する。
【０００９】図１は本発明に係る半導体パッケージの概
略構成例を展開して示す斜視図、図２は図１に図示した
回路基板の裏面側を示す斜視図である。ここで、１はフ
ェースダウン型に搭載・実装されるＩＣチップ、２は前
記ＩＣチップ１の搭載・実装領域2aを備えた回路基板、
３は前記ＩＣチップ１の搭載・実装領域2aを除いた回路
基板２の他領域面に一体的に配設されているループ状ア
ンテナパターンであり、このループ状アンテナパターン
は、回路基板２の裏面にも一体的に配設されているルー
プ状アンテナパターン３′とスルホール3a，3bを介して
直列に接続して一つのアンテナパターンを形成してい
る。そして、前記前記ＩＣチップ１は、回路基板２のＩ
Ｃチップの搭載・実装領域2aにおいて、ＩＣチップ１の
接続バンプ1aおよび回路基板２の接続バンプ2bを対応さ
せて接続（搭載・実装）され、半導体パッケージ本体を
構成している。さらに、本発明においては、前記半導体
パッケージ本体を樹脂封止した構成が採られる。すなわ
ち、前記半導体パッケージ本体の少なくともＩＣチップ
１を搭載・実装領域を樹脂処理、もしくは樹脂モールド
して、ＩＣチップ１の少なくとも一部を埋設ないし被覆
するシールド樹脂層を形成・具備させることによって、
所望の半導体パッケージとしての構成を成している。
【００１０】前記構成において、回路基板２として多層
型回路基板を用いると、回路基板２の小形化（基板面積
小）によって、半導体パッケージをさらにコンパクト化
できるし、また複数の配線層にアンテナパターンを配置
する一方、これらを直列に接続した構成を採ると、イン
ダクタンスが大きくなり受信感度の向上を図り得る。逆
に受信感度を十分に採れれば、図２に図示したように回
路基板２の裏面に一体的に配設されたループ状アンテナ
パターン３′を省き、図１に図示したごとく、ＩＣチッ
プ１が搭載・実装される面のみに配設されたループ状ア
ンテナパターン３だけで構成してもよい。この場合、回
路基板２はより簡単な片面型基板となりコストダウンを
図り得る。そして、この構成例の場合は、前記ループ状
アンテナパターン３，３′（あるいはループ状アンテナ
パターン３のみに）に外部からタイミングを採って、信
号周波数とは波長を変えた周波数を印加することにより
電磁誘導させ、この電磁誘導による電力誘起をＩＣチッ
プ１の駆動源として動作させたところ、半導体パッケー
ジとして所要の機能を呈した。
【００１１】図３および図４に斜視的に示すごとく、２
個のループ状アンテナパターン3c，3c′，3d，3d′を一
体的に形設した回路基板２′を用いた外は、前記例示の
場合と同様の半導体パッケージを構成した。すなわち、
半導体チップ１の搭載・実装領域2a′を有する回路基板
２′面には、図３に斜視的に示すごとく、半導体チップ
１の搭載・実装領域2a′を挟む形で、互いに独立したル
ープ状アンテナパターン3c，3dが一体的に形設され、ま
た、受信感度上必要なら、図３に図示した回路基板２′
の裏面側には、図４斜視的に示すように、前記のループ
状アンテナパターン3c，3dにスルホール，3a′，3b′を
介して直列に接続するループ状アンテナパターン3c′，
3d′が一体的に形設された回路基板２′に、所要の半導
体チップ１を搭載・実装するとともに、前記半導体チッ
プ１を樹脂層で封止した構成の半導体パッケージを作成
した。
【００１２】この構成を採った場合は、互いに独立した
ループ状アンテナパターン3c，3d間に半導体チップ１が
搭載・実装されているため、受信感度がやや犠牲になる
が、独立したループ状アンテナパターン3c，3c′と3d，
3d′とを、電磁誘導用および信号伝達用に使い分けるこ
とにより、信号処理を短時間に行うことが可能であると
ともに、半導体パッケージの小形化も可能であった。受
信感度の向上には、前記実施例の場合と同様に、多層型
回路基板を用いて複数の配線層にアンテナパターンを配
置し、直列に接続する構成としてもよい。
【００１３】なお、本発明は上記実施例に限定されるも
のでなく、本発明の趣旨を逸脱しない範囲でいろいろな
変形を採り得る。たとえば、ＩＣチップの搭載・実装
は、前記フェースダウン方式によらず、ワイヤボンディ
ング方式などで行った構成としてもよい。
【００１４】
【発明の効果】上記説明から分かるように、本発明に係
る半導体パッケージは、内蔵するＩＣチップの駆動が、
受信などに寄与するアンテナパターンの電磁誘導される
電力によって行われる。つまり、受発信用として機能す
るアンテナパターンなどを、一方では電磁誘導させ、そ
れによる電力誘起をＩＣチップ１の駆動源として利用す
る構成を採っている。したがって、駆動用の電源電池の
省略、あるいは外部電源接続用端子の省略が可能となる
ので、それらが電源電池や外部接続用端子が不要になり
取扱いが大幅に簡略するばかりでなく、電源電池や外部
電源接続用端子の装着領域も割除されるので、コンバク
ト化なども図りえることになる。
【図面の簡単な説明】
【図１】本発明に係る半導体パッケージの要部構成例を
展開して示す斜視図。
【図２】図１に図示した回路基板の裏面側の構成を示す
斜視図。
【図３】本発明に係る半導体パッケージの構成に用いる
回路基板の他の要部構成例を示す斜視図。
【図４】図３に図示した回路基板の裏面側の構成を示す
斜視図。
【符号の説明】
１…ＩＣチップ 1a…ＩＣチップの接続バンプ
２，２′…回路基板2a，2a′…ＩＣチップの搭載・実装
領域 2b…回路基板の接続バンプ ３，３′，3c，
3c′，3d，3d′…ループ状アンテナパターン 3a，3
a′，3b，3b′…スルホール

Claims (1)

    【特許請求の範囲】
  1. 【請求項１】 一主面にＩＣチップの搭載・実装可能な
    領域を備えた回路基板と、 前記回路基板の所定領域に搭載・実装されたＩＣチップ
    と、 前記搭載・実装されたＩＣチップの少なくとも一部を埋
    設ないし被覆するシールド樹脂層と、 前記回路基板の搭載・実装領域を除く主面の他領域に一
    体的に形設された非接触に信号を送受する少なくとも１
    ループ状のアンテナパターンとを具備して成ることを特
    徴とする半導体パッケージ。
JP32024393A 1993-12-20 1993-12-20 半導体装置 Expired - Fee Related JP3305843B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP32024393A JP3305843B2 (ja) 1993-12-20 1993-12-20 半導体装置
US08/554,104 US5710458A (en) 1993-12-20 1995-11-06 Card like semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32024393A JP3305843B2 (ja) 1993-12-20 1993-12-20 半導体装置

Publications (2)

Publication Number Publication Date
JPH07176646A true JPH07176646A (ja) 1995-07-14
JP3305843B2 JP3305843B2 (ja) 2002-07-24

Family

ID=18119325

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (2)

Country Link
US (1) US5710458A (ja)
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JP4735869B2 (ja) * 2006-03-24 2011-07-27 日本電気株式会社 半導体装置
JP2009117453A (ja) * 2007-11-02 2009-05-28 Nec Electronics Corp 半導体パッケージ
JP2011103347A (ja) * 2009-11-10 2011-05-26 Renesas Electronics Corp 半導体パッケージ及びシステム

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