JPH1110048A5 - - Google Patents

Info

Publication number
JPH1110048A5
JPH1110048A5 JP1997162966A JP16296697A JPH1110048A5 JP H1110048 A5 JPH1110048 A5 JP H1110048A5 JP 1997162966 A JP1997162966 A JP 1997162966A JP 16296697 A JP16296697 A JP 16296697A JP H1110048 A5 JPH1110048 A5 JP H1110048A5
Authority
JP
Japan
Prior art keywords
coating liquid
substrate
coated
nozzle
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997162966A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1110048A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9162966A priority Critical patent/JPH1110048A/ja
Priority claimed from JP9162966A external-priority patent/JPH1110048A/ja
Publication of JPH1110048A publication Critical patent/JPH1110048A/ja
Publication of JPH1110048A5 publication Critical patent/JPH1110048A5/ja
Pending legal-status Critical Current

Links

JP9162966A 1997-06-19 1997-06-19 塗布装置および塗布方法 Pending JPH1110048A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9162966A JPH1110048A (ja) 1997-06-19 1997-06-19 塗布装置および塗布方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9162966A JPH1110048A (ja) 1997-06-19 1997-06-19 塗布装置および塗布方法

Publications (2)

Publication Number Publication Date
JPH1110048A JPH1110048A (ja) 1999-01-19
JPH1110048A5 true JPH1110048A5 (fr) 2004-12-09

Family

ID=15764669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9162966A Pending JPH1110048A (ja) 1997-06-19 1997-06-19 塗布装置および塗布方法

Country Status (1)

Country Link
JP (1) JPH1110048A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001113214A (ja) * 1999-10-19 2001-04-24 Casio Comput Co Ltd 薄膜の形成方法、及び形成装置
JP2013243262A (ja) * 2012-05-21 2013-12-05 Tokyo Electron Ltd 塗布方法、塗布装置、及びコンピュータ可読記憶媒体
CN119076315B (zh) * 2024-11-08 2025-04-01 尚泰传感科技(南通)有限公司 一种压差传感器制造用注胶装置

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