JPH11183864A5 - - Google Patents

Info

Publication number
JPH11183864A5
JPH11183864A5 JP1997364772A JP36477297A JPH11183864A5 JP H11183864 A5 JPH11183864 A5 JP H11183864A5 JP 1997364772 A JP1997364772 A JP 1997364772A JP 36477297 A JP36477297 A JP 36477297A JP H11183864 A5 JPH11183864 A5 JP H11183864A5
Authority
JP
Japan
Prior art keywords
movable body
bases
supported
substrate
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997364772A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11183864A (ja
JP3999863B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP36477297A priority Critical patent/JP3999863B2/ja
Priority claimed from JP36477297A external-priority patent/JP3999863B2/ja
Publication of JPH11183864A publication Critical patent/JPH11183864A/ja
Publication of JPH11183864A5 publication Critical patent/JPH11183864A5/ja
Application granted granted Critical
Publication of JP3999863B2 publication Critical patent/JP3999863B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP36477297A 1997-12-22 1997-12-22 被測定基板の検査装置 Expired - Lifetime JP3999863B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP36477297A JP3999863B2 (ja) 1997-12-22 1997-12-22 被測定基板の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP36477297A JP3999863B2 (ja) 1997-12-22 1997-12-22 被測定基板の検査装置

Publications (3)

Publication Number Publication Date
JPH11183864A JPH11183864A (ja) 1999-07-09
JPH11183864A5 true JPH11183864A5 (2) 2005-07-07
JP3999863B2 JP3999863B2 (ja) 2007-10-31

Family

ID=18482629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP36477297A Expired - Lifetime JP3999863B2 (ja) 1997-12-22 1997-12-22 被測定基板の検査装置

Country Status (1)

Country Link
JP (1) JP3999863B2 (2)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3958852B2 (ja) * 1997-12-22 2007-08-15 株式会社日本マイクロニクス 被測定基板の検査装置
JP2001050858A (ja) * 1999-08-04 2001-02-23 Micronics Japan Co Ltd 表示用パネル基板の検査装置
KR100685308B1 (ko) * 1999-12-04 2007-02-22 엘지.필립스 엘시디 주식회사 액정표시소자의 검사장치
JP4108263B2 (ja) * 2000-10-03 2008-06-25 株式会社日本マイクロニクス 液晶基板の支持装置
NL1017272C2 (nl) * 2001-01-16 2002-07-17 Fico Bv Inrichting en werkwijze voor het testen van elektronische componenten.
US6774958B2 (en) * 2002-02-26 2004-08-10 Lg.Philips Lcd Co., Ltd. Liquid crystal panel, apparatus for inspecting the same, and method of fabricating liquid crystal display thereof
KR20040045173A (ko) * 2002-11-22 2004-06-01 갈란트 프리시젼 머시닝 캄파니, 리미티드 교대 팰릿을 갖춘 검사 시스템
JP3745750B2 (ja) 2003-06-27 2006-02-15 東芝テリー株式会社 表示パネルの検査装置および検査方法
KR20050112231A (ko) * 2004-05-25 2005-11-30 삼성전자주식회사 평면표시장치의 생산장비 및 제조공정
TWI393875B (zh) * 2004-09-27 2013-04-21 Olympus Corp 基板檢測裝置之固持器及基板檢測裝置
KR100741290B1 (ko) 2005-05-17 2007-07-23 에버테크노 주식회사 패널 검사장치
KR100733276B1 (ko) * 2005-07-29 2007-06-28 주식회사 파이컴 디스플레이 패널의 검사 장비와 이를 이용한 디스플레이패널 검사 방법
JP2009168601A (ja) * 2008-01-16 2009-07-30 Hioki Ee Corp 回路基板検査装置
DE102017102700A1 (de) 2017-02-10 2018-09-13 Atg Luther & Maelzer Gmbh Prüfvorrichtung und Verfahren zum Prüfen von Leiterplatten

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08102476A (ja) * 1994-08-05 1996-04-16 Tokyo Electron Ltd 板状の被検査体の検査装置
JPH08152587A (ja) * 1994-11-29 1996-06-11 Nikon Corp 基板保持装置
JPH0986655A (ja) * 1995-09-20 1997-03-31 Olympus Optical Co Ltd 試料搬送装置
JPH09138256A (ja) * 1995-11-14 1997-05-27 Nippon Maikuronikusu:Kk 被検査基板のアライメント方法
JPH09281001A (ja) * 1996-04-08 1997-10-31 Nippon Maikuronikusu:Kk 液晶表示パネルの検査装置

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