JPS51118380A - Manufacturing process for ic - Google Patents

Manufacturing process for ic

Info

Publication number
JPS51118380A
JPS51118380A JP4378075A JP4378075A JPS51118380A JP S51118380 A JPS51118380 A JP S51118380A JP 4378075 A JP4378075 A JP 4378075A JP 4378075 A JP4378075 A JP 4378075A JP S51118380 A JPS51118380 A JP S51118380A
Authority
JP
Japan
Prior art keywords
manufacturing process
decided
mask pattern
electric character
large integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4378075A
Other languages
Japanese (ja)
Inventor
Yoshinori Yukimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4378075A priority Critical patent/JPS51118380A/en
Publication of JPS51118380A publication Critical patent/JPS51118380A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: Manufacturing process for IC with a large integrated density. The electric character is decided at the first from of mask pattern, and get little influences of parameter fluctuations in the process.
COPYRIGHT: (C)1976,JPO&Japio
JP4378075A 1975-04-10 1975-04-10 Manufacturing process for ic Pending JPS51118380A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4378075A JPS51118380A (en) 1975-04-10 1975-04-10 Manufacturing process for ic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4378075A JPS51118380A (en) 1975-04-10 1975-04-10 Manufacturing process for ic

Publications (1)

Publication Number Publication Date
JPS51118380A true JPS51118380A (en) 1976-10-18

Family

ID=12673258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4378075A Pending JPS51118380A (en) 1975-04-10 1975-04-10 Manufacturing process for ic

Country Status (1)

Country Link
JP (1) JPS51118380A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840825A (en) * 1971-09-21 1973-06-15
JPS4979183A (en) * 1972-12-01 1974-07-31
JPS4984587A (en) * 1972-12-19 1974-08-14

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840825A (en) * 1971-09-21 1973-06-15
JPS4979183A (en) * 1972-12-01 1974-07-31
JPS4984587A (en) * 1972-12-19 1974-08-14

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