JPS5267962A - Manufacture of semiconductor unit - Google Patents
Manufacture of semiconductor unitInfo
- Publication number
- JPS5267962A JPS5267962A JP14427575A JP14427575A JPS5267962A JP S5267962 A JPS5267962 A JP S5267962A JP 14427575 A JP14427575 A JP 14427575A JP 14427575 A JP14427575 A JP 14427575A JP S5267962 A JPS5267962 A JP S5267962A
- Authority
- JP
- Japan
- Prior art keywords
- diffusion region
- manufacture
- semiconductor unit
- oxidization film
- relieved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 238000009792 diffusion process Methods 0.000 abstract 3
- 238000007254 oxidation reaction Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Abstract
PURPOSE: A thickness difference of oxidization film is made at least between the electrical contact are a within diffusion region and the substrate outside diffusion region, so that the latter is made thicker than the former. In this way, the diffusion region pattern can be simplified as well as contact hole opening conditions for oxidization film can be relieved.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14427575A JPS5267962A (en) | 1975-12-03 | 1975-12-03 | Manufacture of semiconductor unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14427575A JPS5267962A (en) | 1975-12-03 | 1975-12-03 | Manufacture of semiconductor unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5267962A true JPS5267962A (en) | 1977-06-06 |
Family
ID=15358290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14427575A Pending JPS5267962A (en) | 1975-12-03 | 1975-12-03 | Manufacture of semiconductor unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5267962A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56107553A (en) * | 1980-01-29 | 1981-08-26 | Nec Corp | Semiconductor device and preparation thereof |
-
1975
- 1975-12-03 JP JP14427575A patent/JPS5267962A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56107553A (en) * | 1980-01-29 | 1981-08-26 | Nec Corp | Semiconductor device and preparation thereof |
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