JPS51147963A - Method of manufacturing a semiconductor device - Google Patents

Method of manufacturing a semiconductor device

Info

Publication number
JPS51147963A
JPS51147963A JP7145875A JP7145875A JPS51147963A JP S51147963 A JPS51147963 A JP S51147963A JP 7145875 A JP7145875 A JP 7145875A JP 7145875 A JP7145875 A JP 7145875A JP S51147963 A JPS51147963 A JP S51147963A
Authority
JP
Japan
Prior art keywords
manufacturing
semiconductor device
aluminum foil
under
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7145875A
Other languages
Japanese (ja)
Other versions
JPS5818777B2 (en
Inventor
Takashi Iwai
Yoshiiku Togei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50071458A priority Critical patent/JPS5818777B2/en
Publication of JPS51147963A publication Critical patent/JPS51147963A/en
Publication of JPS5818777B2 publication Critical patent/JPS5818777B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: A process for selectively etching an aluminum foil wherein no short circuits between wirings and no under cuts in the aluminum foil under a photoresist film are resulted when a fine pattern is applied to the aluminum thin film coated on a semiconductor substrate.
COPYRIGHT: (C)1976,JPO&Japio
JP50071458A 1975-06-14 1975-06-14 Handout Taisouchino Seizouhouhou Expired JPS5818777B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50071458A JPS5818777B2 (en) 1975-06-14 1975-06-14 Handout Taisouchino Seizouhouhou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50071458A JPS5818777B2 (en) 1975-06-14 1975-06-14 Handout Taisouchino Seizouhouhou

Publications (2)

Publication Number Publication Date
JPS51147963A true JPS51147963A (en) 1976-12-18
JPS5818777B2 JPS5818777B2 (en) 1983-04-14

Family

ID=13461143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50071458A Expired JPS5818777B2 (en) 1975-06-14 1975-06-14 Handout Taisouchino Seizouhouhou

Country Status (1)

Country Link
JP (1) JPS5818777B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110330U (en) * 1978-01-19 1979-08-03

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IBM TECHNICAL DISCLOSURE BULLETIN=1971 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110330U (en) * 1978-01-19 1979-08-03

Also Published As

Publication number Publication date
JPS5818777B2 (en) 1983-04-14

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