JPS5294785A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5294785A
JPS5294785A JP1168576A JP1168576A JPS5294785A JP S5294785 A JPS5294785 A JP S5294785A JP 1168576 A JP1168576 A JP 1168576A JP 1168576 A JP1168576 A JP 1168576A JP S5294785 A JPS5294785 A JP S5294785A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
open
hole
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1168576A
Other languages
Japanese (ja)
Inventor
Kiyoshi Kanekawa
Kenji Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1168576A priority Critical patent/JPS5294785A/en
Publication of JPS5294785A publication Critical patent/JPS5294785A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: In order to open the hole on the surface of semiconductor element for formation of conductive thin film, ion is injected into the surface layer, forming destruction layer. After this, etching is carried out using anti-etching resist for the mask. As a result, the open hole is s haped into a cone, avoiding the stage breakeage for wiring.
COPYRIGHT: (C)1977,JPO&Japio
JP1168576A 1976-02-05 1976-02-05 Manufacture of semiconductor device Pending JPS5294785A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1168576A JPS5294785A (en) 1976-02-05 1976-02-05 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1168576A JPS5294785A (en) 1976-02-05 1976-02-05 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5294785A true JPS5294785A (en) 1977-08-09

Family

ID=11784858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1168576A Pending JPS5294785A (en) 1976-02-05 1976-02-05 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5294785A (en)

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