JPS51148388A - Semiconductor device including mis type capacitive element - Google Patents

Semiconductor device including mis type capacitive element

Info

Publication number
JPS51148388A
JPS51148388A JP50072585A JP7258575A JPS51148388A JP S51148388 A JPS51148388 A JP S51148388A JP 50072585 A JP50072585 A JP 50072585A JP 7258575 A JP7258575 A JP 7258575A JP S51148388 A JPS51148388 A JP S51148388A
Authority
JP
Japan
Prior art keywords
capacitive element
semiconductor device
mis type
device including
type capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50072585A
Other languages
Japanese (ja)
Inventor
Takashi Ito
Masaichi Shinoda
Motoo Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50072585A priority Critical patent/JPS51148388A/en
Publication of JPS51148388A publication Critical patent/JPS51148388A/en
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To manufacture a MIS type capacitive element whose Q is large and which is small and large capacity with high pressure resistance by using a silicon nitrized film as a dielectric film.
COPYRIGHT: (C)1976,JPO&Japio
JP50072585A 1975-06-14 1975-06-14 Semiconductor device including mis type capacitive element Pending JPS51148388A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50072585A JPS51148388A (en) 1975-06-14 1975-06-14 Semiconductor device including mis type capacitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50072585A JPS51148388A (en) 1975-06-14 1975-06-14 Semiconductor device including mis type capacitive element

Publications (1)

Publication Number Publication Date
JPS51148388A true JPS51148388A (en) 1976-12-20

Family

ID=13493590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50072585A Pending JPS51148388A (en) 1975-06-14 1975-06-14 Semiconductor device including mis type capacitive element

Country Status (1)

Country Link
JP (1) JPS51148388A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565458A (en) * 1978-11-10 1980-05-16 Nec Corp Memory cell
JPS57106064A (en) * 1980-12-23 1982-07-01 Seiko Epson Corp Semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48102980A (en) * 1972-04-07 1973-12-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48102980A (en) * 1972-04-07 1973-12-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565458A (en) * 1978-11-10 1980-05-16 Nec Corp Memory cell
JPS57106064A (en) * 1980-12-23 1982-07-01 Seiko Epson Corp Semiconductor device

Similar Documents

Publication Publication Date Title
JPS52140280A (en) Semiconductor device
JPS5395571A (en) Semiconductor device
JPS51135383A (en) Semiconductor variable capacitance device
JPS5380966A (en) Manufacture of electrode fdr semiconductor device
JPS51148388A (en) Semiconductor device including mis type capacitive element
JPS5372471A (en) Mis type semiconductor device
JPS5210082A (en) Semiconductor device
JPS5278389A (en) Semiconductor memory device
JPS5371588A (en) Manufacture of semiconductor memory device
JPS5245275A (en) Mis type semiconductor device
JPS51114883A (en) Mos variable capacitance element incorporated in ic
JPS5252370A (en) Fabrication of glass-sealed semiconductor device
JPS5362987A (en) Production of mos type semiconductor device
JPS5353262A (en) Manufacture of semiconductor device
JPS5240987A (en) Integratd capacitance element
JPS52153383A (en) Preparation of semiconductor device
JPS51113458A (en) Wafer stretching device
JPS5258370A (en) Semiconductor device
JPS52117081A (en) Preparation of mis semiconductor device
JPS51134084A (en) Element for transmission line circuit
JPS5210084A (en) Dual directional negative resistance semiconductor device
JPS5211772A (en) Semiconductor device
JPS5363866A (en) Production of semiconductor device
JPS535580A (en) Field effect type semiconductor device
JPS51147968A (en) Method of manufacturing semiconductor device