JPS51150274A - Manufacturing method of semiconductor device - Google Patents

Manufacturing method of semiconductor device

Info

Publication number
JPS51150274A
JPS51150274A JP50074946A JP7494675A JPS51150274A JP S51150274 A JPS51150274 A JP S51150274A JP 50074946 A JP50074946 A JP 50074946A JP 7494675 A JP7494675 A JP 7494675A JP S51150274 A JPS51150274 A JP S51150274A
Authority
JP
Japan
Prior art keywords
manufacturing
semiconductor device
mask
apperture
implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50074946A
Other languages
Japanese (ja)
Inventor
Hiroyuki Aoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP50074946A priority Critical patent/JPS51150274A/en
Publication of JPS51150274A publication Critical patent/JPS51150274A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To reduce irradiation energy in the method of inserting a junction end edge beneath a mask through into implantation using a mask having an inclined apperture circumferential edge, by making the irradiation direction of ion beams perpendicular to the inclined surface.
COPYRIGHT: (C)1976,JPO&Japio
JP50074946A 1975-06-18 1975-06-18 Manufacturing method of semiconductor device Pending JPS51150274A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50074946A JPS51150274A (en) 1975-06-18 1975-06-18 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50074946A JPS51150274A (en) 1975-06-18 1975-06-18 Manufacturing method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS51150274A true JPS51150274A (en) 1976-12-23

Family

ID=13561994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50074946A Pending JPS51150274A (en) 1975-06-18 1975-06-18 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51150274A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5669548U (en) * 1979-10-29 1981-06-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5669548U (en) * 1979-10-29 1981-06-09

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