JPS52151564A - Production of semiconductor epitaxially grown layers - Google Patents

Production of semiconductor epitaxially grown layers

Info

Publication number
JPS52151564A
JPS52151564A JP6918476A JP6918476A JPS52151564A JP S52151564 A JPS52151564 A JP S52151564A JP 6918476 A JP6918476 A JP 6918476A JP 6918476 A JP6918476 A JP 6918476A JP S52151564 A JPS52151564 A JP S52151564A
Authority
JP
Japan
Prior art keywords
production
epitaxially grown
grown layers
semiconductor epitaxially
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6918476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5441463B2 (2
Inventor
Hiroshi Hayashi
Takeshi Sakurai
Kazuhisa Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP6918476A priority Critical patent/JPS52151564A/ja
Publication of JPS52151564A publication Critical patent/JPS52151564A/ja
Publication of JPS5441463B2 publication Critical patent/JPS5441463B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)
JP6918476A 1976-06-11 1976-06-11 Production of semiconductor epitaxially grown layers Granted JPS52151564A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6918476A JPS52151564A (en) 1976-06-11 1976-06-11 Production of semiconductor epitaxially grown layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6918476A JPS52151564A (en) 1976-06-11 1976-06-11 Production of semiconductor epitaxially grown layers

Publications (2)

Publication Number Publication Date
JPS52151564A true JPS52151564A (en) 1977-12-16
JPS5441463B2 JPS5441463B2 (2) 1979-12-08

Family

ID=13395373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6918476A Granted JPS52151564A (en) 1976-06-11 1976-06-11 Production of semiconductor epitaxially grown layers

Country Status (1)

Country Link
JP (1) JPS52151564A (2)

Also Published As

Publication number Publication date
JPS5441463B2 (2) 1979-12-08

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