JPS5261957A - Liquid phase epitaxial growth - Google Patents

Liquid phase epitaxial growth

Info

Publication number
JPS5261957A
JPS5261957A JP13845675A JP13845675A JPS5261957A JP S5261957 A JPS5261957 A JP S5261957A JP 13845675 A JP13845675 A JP 13845675A JP 13845675 A JP13845675 A JP 13845675A JP S5261957 A JPS5261957 A JP S5261957A
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
phase epitaxial
grown layer
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13845675A
Other languages
Japanese (ja)
Inventor
Masahiro Nakajima
Masanobu Kihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13845675A priority Critical patent/JPS5261957A/en
Publication of JPS5261957A publication Critical patent/JPS5261957A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To obtain a liquid phase epitaxial growth method for group III-V compound which does not cause undulation on the surface of the grown layer and permits easy control of the thickness of the grown layer.
COPYRIGHT: (C)1977,JPO&Japio
JP13845675A 1975-11-18 1975-11-18 Liquid phase epitaxial growth Pending JPS5261957A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13845675A JPS5261957A (en) 1975-11-18 1975-11-18 Liquid phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13845675A JPS5261957A (en) 1975-11-18 1975-11-18 Liquid phase epitaxial growth

Publications (1)

Publication Number Publication Date
JPS5261957A true JPS5261957A (en) 1977-05-21

Family

ID=15222428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13845675A Pending JPS5261957A (en) 1975-11-18 1975-11-18 Liquid phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS5261957A (en)

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