JPS524184A - Manufacturing method of semiconductor resistors - Google Patents

Manufacturing method of semiconductor resistors

Info

Publication number
JPS524184A
JPS524184A JP7158275A JP7158275A JPS524184A JP S524184 A JPS524184 A JP S524184A JP 7158275 A JP7158275 A JP 7158275A JP 7158275 A JP7158275 A JP 7158275A JP S524184 A JPS524184 A JP S524184A
Authority
JP
Japan
Prior art keywords
manufacturing
ion doping
semiconductor resistors
resistors
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7158275A
Other languages
Japanese (ja)
Inventor
Koichi Tanaka
Satoru Shoji
Hideyuki Kondo
Kenichiro Ryono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7158275A priority Critical patent/JPS524184A/en
Publication of JPS524184A publication Critical patent/JPS524184A/en
Pending legal-status Critical Current

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  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: By properly controlling the ion doping energy and the amount of ion doping, the ion doping resistance is obtained equivalent to the noise level of thermal diffusion resistor.
COPYRIGHT: (C)1977,JPO&Japio
JP7158275A 1975-06-12 1975-06-12 Manufacturing method of semiconductor resistors Pending JPS524184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7158275A JPS524184A (en) 1975-06-12 1975-06-12 Manufacturing method of semiconductor resistors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7158275A JPS524184A (en) 1975-06-12 1975-06-12 Manufacturing method of semiconductor resistors

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP57181693A Division JPS58190052A (en) 1982-10-16 1982-10-16 Manufacturing method of semiconductor resistor

Publications (1)

Publication Number Publication Date
JPS524184A true JPS524184A (en) 1977-01-13

Family

ID=13464822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7158275A Pending JPS524184A (en) 1975-06-12 1975-06-12 Manufacturing method of semiconductor resistors

Country Status (1)

Country Link
JP (1) JPS524184A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4844064A (en) * 1971-10-08 1973-06-25
JPS5025184A (en) * 1973-01-24 1975-03-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4844064A (en) * 1971-10-08 1973-06-25
JPS5025184A (en) * 1973-01-24 1975-03-17

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