JPS5260992A - Manufacturing of dielectric thin film - Google Patents

Manufacturing of dielectric thin film

Info

Publication number
JPS5260992A
JPS5260992A JP50136956A JP13695675A JPS5260992A JP S5260992 A JPS5260992 A JP S5260992A JP 50136956 A JP50136956 A JP 50136956A JP 13695675 A JP13695675 A JP 13695675A JP S5260992 A JPS5260992 A JP S5260992A
Authority
JP
Japan
Prior art keywords
thin film
dielectric thin
manufacturing
sputterin
ocat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50136956A
Other languages
Japanese (ja)
Other versions
JPS5619930B2 (en
Inventor
Tsuneo Mitsuyu
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50136956A priority Critical patent/JPS5260992A/en
Publication of JPS5260992A publication Critical patent/JPS5260992A/en
Publication of JPS5619930B2 publication Critical patent/JPS5619930B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Inorganic Insulating Materials (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE: To ocat to form the amorphous dielectric thin film consisting of Bi2O3 including B2O3 by a sputterin process on the substrate which is heated by using the evaporation mechanism based on ionization by collision.
COPYRIGHT: (C)1977,JPO&Japio
JP50136956A 1975-11-13 1975-11-13 Manufacturing of dielectric thin film Granted JPS5260992A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50136956A JPS5260992A (en) 1975-11-13 1975-11-13 Manufacturing of dielectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50136956A JPS5260992A (en) 1975-11-13 1975-11-13 Manufacturing of dielectric thin film

Publications (2)

Publication Number Publication Date
JPS5260992A true JPS5260992A (en) 1977-05-19
JPS5619930B2 JPS5619930B2 (en) 1981-05-11

Family

ID=15187424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50136956A Granted JPS5260992A (en) 1975-11-13 1975-11-13 Manufacturing of dielectric thin film

Country Status (1)

Country Link
JP (1) JPS5260992A (en)

Also Published As

Publication number Publication date
JPS5619930B2 (en) 1981-05-11

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