JPS5267572A - Manufacturing device for semiconductor - Google Patents

Manufacturing device for semiconductor

Info

Publication number
JPS5267572A
JPS5267572A JP14433575A JP14433575A JPS5267572A JP S5267572 A JPS5267572 A JP S5267572A JP 14433575 A JP14433575 A JP 14433575A JP 14433575 A JP14433575 A JP 14433575A JP S5267572 A JPS5267572 A JP S5267572A
Authority
JP
Japan
Prior art keywords
manufacturing device
semiconductor
drived
air tightness
table supporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14433575A
Other languages
Japanese (ja)
Inventor
Yoshio Iuchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14433575A priority Critical patent/JPS5267572A/en
Publication of JPS5267572A publication Critical patent/JPS5267572A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide a manufacturing device wherein a table supporting the reacted object can be drived with keeping complete air tightness.
COPYRIGHT: (C)1977,JPO&Japio
JP14433575A 1975-12-02 1975-12-02 Manufacturing device for semiconductor Pending JPS5267572A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14433575A JPS5267572A (en) 1975-12-02 1975-12-02 Manufacturing device for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14433575A JPS5267572A (en) 1975-12-02 1975-12-02 Manufacturing device for semiconductor

Publications (1)

Publication Number Publication Date
JPS5267572A true JPS5267572A (en) 1977-06-04

Family

ID=15359707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14433575A Pending JPS5267572A (en) 1975-12-02 1975-12-02 Manufacturing device for semiconductor

Country Status (1)

Country Link
JP (1) JPS5267572A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5902407A (en) * 1987-03-31 1999-05-11 Deboer; Wiebe B. Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5902407A (en) * 1987-03-31 1999-05-11 Deboer; Wiebe B. Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment

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