JPS5267981A - Manufacture of semiconductor unit - Google Patents

Manufacture of semiconductor unit

Info

Publication number
JPS5267981A
JPS5267981A JP14425675A JP14425675A JPS5267981A JP S5267981 A JPS5267981 A JP S5267981A JP 14425675 A JP14425675 A JP 14425675A JP 14425675 A JP14425675 A JP 14425675A JP S5267981 A JPS5267981 A JP S5267981A
Authority
JP
Japan
Prior art keywords
semiconductor unit
manufacture
alteration
formation
design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14425675A
Other languages
Japanese (ja)
Inventor
Shigeru Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14425675A priority Critical patent/JPS5267981A/en
Publication of JPS5267981A publication Critical patent/JPS5267981A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve electrical property of semiconductor unit with no alteration of both materials and design by having heat processing in inactive atmosphere after formation of insulation film onto semiconductor substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP14425675A 1975-12-03 1975-12-03 Manufacture of semiconductor unit Pending JPS5267981A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14425675A JPS5267981A (en) 1975-12-03 1975-12-03 Manufacture of semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14425675A JPS5267981A (en) 1975-12-03 1975-12-03 Manufacture of semiconductor unit

Publications (1)

Publication Number Publication Date
JPS5267981A true JPS5267981A (en) 1977-06-06

Family

ID=15357859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14425675A Pending JPS5267981A (en) 1975-12-03 1975-12-03 Manufacture of semiconductor unit

Country Status (1)

Country Link
JP (1) JPS5267981A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109763A (en) * 1978-02-16 1979-08-28 Akai Electric Method of thermally treating semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109763A (en) * 1978-02-16 1979-08-28 Akai Electric Method of thermally treating semiconductor device

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