JPS53129985A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53129985A JPS53129985A JP4447277A JP4447277A JPS53129985A JP S53129985 A JPS53129985 A JP S53129985A JP 4447277 A JP4447277 A JP 4447277A JP 4447277 A JP4447277 A JP 4447277A JP S53129985 A JPS53129985 A JP S53129985A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- walled emitter
- impruity
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 238000009792 diffusion process Methods 0.000 abstract 1
Landscapes
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Abstract
PURPOSE: To obtain walled emitter transistors of high speeds at a small area and sa small capacity by double diffusing impruity materials of different coefficients of diffusion by using the same windowed part, thereby forming base region and walled emitter region.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4447277A JPS53129985A (en) | 1977-04-20 | 1977-04-20 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4447277A JPS53129985A (en) | 1977-04-20 | 1977-04-20 | Production of semiconductor device |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59049128A Division JPS59197149A (en) | 1984-03-16 | 1984-03-16 | Manufacture of semiconductor device |
| JP59049129A Division JPS59197150A (en) | 1984-03-16 | 1984-03-16 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS53129985A true JPS53129985A (en) | 1978-11-13 |
Family
ID=12692448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4447277A Pending JPS53129985A (en) | 1977-04-20 | 1977-04-20 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53129985A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5593258A (en) * | 1978-12-30 | 1980-07-15 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS55127061A (en) * | 1979-03-26 | 1980-10-01 | Hitachi Ltd | Manufacture of semiconductor memory |
| JPS59147455A (en) * | 1983-02-10 | 1984-08-23 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS59161067A (en) * | 1983-03-04 | 1984-09-11 | Hitachi Micro Comput Eng Ltd | Method for manufacturing bipolar semiconductor device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5245884A (en) * | 1975-10-08 | 1977-04-11 | Hitachi Ltd | Process for production of semiconductor device |
-
1977
- 1977-04-20 JP JP4447277A patent/JPS53129985A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5245884A (en) * | 1975-10-08 | 1977-04-11 | Hitachi Ltd | Process for production of semiconductor device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5593258A (en) * | 1978-12-30 | 1980-07-15 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS55127061A (en) * | 1979-03-26 | 1980-10-01 | Hitachi Ltd | Manufacture of semiconductor memory |
| JPS59147455A (en) * | 1983-02-10 | 1984-08-23 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS59161067A (en) * | 1983-03-04 | 1984-09-11 | Hitachi Micro Comput Eng Ltd | Method for manufacturing bipolar semiconductor device |
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