JPS53129985A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53129985A
JPS53129985A JP4447277A JP4447277A JPS53129985A JP S53129985 A JPS53129985 A JP S53129985A JP 4447277 A JP4447277 A JP 4447277A JP 4447277 A JP4447277 A JP 4447277A JP S53129985 A JPS53129985 A JP S53129985A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
walled emitter
impruity
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4447277A
Other languages
English (en)
Inventor
Akio Anzai
Takehisa Nitta
Masami Kanegae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4447277A priority Critical patent/JPS53129985A/ja
Publication of JPS53129985A publication Critical patent/JPS53129985A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
JP4447277A 1977-04-20 1977-04-20 Production of semiconductor device Pending JPS53129985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4447277A JPS53129985A (en) 1977-04-20 1977-04-20 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4447277A JPS53129985A (en) 1977-04-20 1977-04-20 Production of semiconductor device

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP59049128A Division JPS59197149A (ja) 1984-03-16 1984-03-16 半導体装置の製造方法
JP59049129A Division JPS59197150A (ja) 1984-03-16 1984-03-16 半導体装置の製造方法

Publications (1)

Publication Number Publication Date
JPS53129985A true JPS53129985A (en) 1978-11-13

Family

ID=12692448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4447277A Pending JPS53129985A (en) 1977-04-20 1977-04-20 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53129985A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5593258A (en) * 1978-12-30 1980-07-15 Fujitsu Ltd Manufacture of semiconductor device
JPS55127061A (en) * 1979-03-26 1980-10-01 Hitachi Ltd Manufacture of semiconductor memory
JPS59147455A (ja) * 1983-02-10 1984-08-23 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
JPS59161067A (ja) * 1983-03-04 1984-09-11 Hitachi Micro Comput Eng Ltd バイポ−ラ型半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5245884A (en) * 1975-10-08 1977-04-11 Hitachi Ltd Process for production of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5245884A (en) * 1975-10-08 1977-04-11 Hitachi Ltd Process for production of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5593258A (en) * 1978-12-30 1980-07-15 Fujitsu Ltd Manufacture of semiconductor device
JPS55127061A (en) * 1979-03-26 1980-10-01 Hitachi Ltd Manufacture of semiconductor memory
JPS59147455A (ja) * 1983-02-10 1984-08-23 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
JPS59161067A (ja) * 1983-03-04 1984-09-11 Hitachi Micro Comput Eng Ltd バイポ−ラ型半導体装置の製造方法

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