JPS5364475A - Semiconductor wafer transfer method - Google Patents

Semiconductor wafer transfer method

Info

Publication number
JPS5364475A
JPS5364475A JP13956076A JP13956076A JPS5364475A JP S5364475 A JPS5364475 A JP S5364475A JP 13956076 A JP13956076 A JP 13956076A JP 13956076 A JP13956076 A JP 13956076A JP S5364475 A JPS5364475 A JP S5364475A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
transfer method
wafer transfer
placement plate
placement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13956076A
Other languages
Japanese (ja)
Inventor
Masanori Ebihara
Akimitsu Yoshida
Katsumi Hatori
Junichi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13956076A priority Critical patent/JPS5364475A/en
Publication of JPS5364475A publication Critical patent/JPS5364475A/en
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To prevent hovering of dust by tilting a placement plate by bringing a thin metal piece in a lower position and contacting one end of a wafer onto the placement surface thereafter pulling off the placement plate.
COPYRIGHT: (C)1978,JPO&Japio
JP13956076A 1976-11-22 1976-11-22 Semiconductor wafer transfer method Pending JPS5364475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13956076A JPS5364475A (en) 1976-11-22 1976-11-22 Semiconductor wafer transfer method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13956076A JPS5364475A (en) 1976-11-22 1976-11-22 Semiconductor wafer transfer method

Publications (1)

Publication Number Publication Date
JPS5364475A true JPS5364475A (en) 1978-06-08

Family

ID=15248098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13956076A Pending JPS5364475A (en) 1976-11-22 1976-11-22 Semiconductor wafer transfer method

Country Status (1)

Country Link
JP (1) JPS5364475A (en)

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