JPS5383459A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5383459A
JPS5383459A JP15918776A JP15918776A JPS5383459A JP S5383459 A JPS5383459 A JP S5383459A JP 15918776 A JP15918776 A JP 15918776A JP 15918776 A JP15918776 A JP 15918776A JP S5383459 A JPS5383459 A JP S5383459A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
simplify
forming
substrate surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15918776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5753967B2 (th
Inventor
Kenji Sugishima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15918776A priority Critical patent/JPS5383459A/ja
Publication of JPS5383459A publication Critical patent/JPS5383459A/ja
Publication of JPS5753967B2 publication Critical patent/JPS5753967B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP15918776A 1976-12-28 1976-12-28 Production of semiconductor device Granted JPS5383459A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15918776A JPS5383459A (en) 1976-12-28 1976-12-28 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15918776A JPS5383459A (en) 1976-12-28 1976-12-28 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5383459A true JPS5383459A (en) 1978-07-22
JPS5753967B2 JPS5753967B2 (th) 1982-11-16

Family

ID=15688204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15918776A Granted JPS5383459A (en) 1976-12-28 1976-12-28 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5383459A (th)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51111056A (en) * 1975-03-26 1976-10-01 Hitachi Ltd Diffused layer forming method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51111056A (en) * 1975-03-26 1976-10-01 Hitachi Ltd Diffused layer forming method

Also Published As

Publication number Publication date
JPS5753967B2 (th) 1982-11-16

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