JPS5565472A - Integrated circuit device - Google Patents

Integrated circuit device

Info

Publication number
JPS5565472A
JPS5565472A JP13967578A JP13967578A JPS5565472A JP S5565472 A JPS5565472 A JP S5565472A JP 13967578 A JP13967578 A JP 13967578A JP 13967578 A JP13967578 A JP 13967578A JP S5565472 A JPS5565472 A JP S5565472A
Authority
JP
Japan
Prior art keywords
layer
thickness
max
equipotential
obtainable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13967578A
Other languages
English (en)
Inventor
Nobuo Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13967578A priority Critical patent/JPS5565472A/ja
Publication of JPS5565472A publication Critical patent/JPS5565472A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Volatile Memory (AREA)
JP13967578A 1978-11-13 1978-11-13 Integrated circuit device Pending JPS5565472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13967578A JPS5565472A (en) 1978-11-13 1978-11-13 Integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13967578A JPS5565472A (en) 1978-11-13 1978-11-13 Integrated circuit device

Publications (1)

Publication Number Publication Date
JPS5565472A true JPS5565472A (en) 1980-05-16

Family

ID=15250793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13967578A Pending JPS5565472A (en) 1978-11-13 1978-11-13 Integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5565472A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63215077A (ja) * 1987-03-04 1988-09-07 Agency Of Ind Science & Technol Ｍｏｓトランジスタ
US5111260A (en) * 1983-06-17 1992-05-05 Texax Instruments Incorporated Polysilicon FETs

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160173A (en) * 1974-09-12 1976-05-25 Rca Corp Zetsuengeetodenkaikokatoranjisuta
JPS52141580A (en) * 1976-05-20 1977-11-25 Matsushita Electric Ind Co Ltd Manufacture of mos-type semiconductor device
JPS52144980A (en) * 1976-05-28 1977-12-02 Agency Of Ind Science & Technol Sos semiconductor device
JPS5377481A (en) * 1976-12-21 1978-07-08 Nec Corp Prodiction of semionductor substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160173A (en) * 1974-09-12 1976-05-25 Rca Corp Zetsuengeetodenkaikokatoranjisuta
JPS52141580A (en) * 1976-05-20 1977-11-25 Matsushita Electric Ind Co Ltd Manufacture of mos-type semiconductor device
JPS52144980A (en) * 1976-05-28 1977-12-02 Agency Of Ind Science & Technol Sos semiconductor device
JPS5377481A (en) * 1976-12-21 1978-07-08 Nec Corp Prodiction of semionductor substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5111260A (en) * 1983-06-17 1992-05-05 Texax Instruments Incorporated Polysilicon FETs
JPS63215077A (ja) * 1987-03-04 1988-09-07 Agency Of Ind Science & Technol Ｍｏｓトランジスタ

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